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公开(公告)号：US07704554B2
公开(公告)日：2010-04-27
申请号：US11745504
申请日：2007-05-08
申请人： Michael Long , Randolph C. Brost , Jeremy M. Grace , Dennis R. Freeman , Neil P. Redden , Bruce E. Koppe
发明人： Michael Long , Randolph C. Brost , Jeremy M. Grace , Dennis R. Freeman , Neil P. Redden , Bruce E. Koppe
IPC分类号： C23C16/00
CPC分类号： C23C14/243 , C23C14/12 , H01L51/001 , H01L51/0059 , H01L51/0077 , H01L51/0081
摘要： A method for vaporizing organic materials onto a substrate surface to form a film including providing a quantity of organic material into a vaporization apparatus and actively maintaining the organic material in a first heating region in the vaporization apparatus to be below the vaporization temperature. The method also includes heating a second heating region of the vaporization apparatus above the vaporization temperature of the organic material and metering, at a controlled rate, organic material from the first heating region into the second heating region so that a thin cross section of the organic material is heated at a desired rate-dependent vaporization temperature, whereby organic material vaporizes and forms a film on the substrate surface.
摘要翻译： 一种用于将有机材料蒸发到基板表面上以形成膜的方法，所述方法包括向蒸发装置中提供一定数量的有机材料并主动将所述蒸发装置中的第一加热区域中的有机材料维持在汽化温度以下。 该方法还包括将蒸发装置的第二加热区域加热到有机材料的蒸发温度以上，并以受控的速率将有机材料从第一加热区域计量到第二加热区域，使得有机物的薄截面 材料以所需的速率依赖的蒸发温度加热，由此有机材料在衬底表面上蒸发并形成膜。
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公开(公告)号：US20100206233A1
公开(公告)日：2010-08-19
申请号：US12768312
申请日：2010-04-27
申请人： Michael Long , Randolph C. Brost , Jeremy M. Grace , Dennis R. Freeman , Neil P. Redden , Bruce E. Koppe
发明人： Michael Long , Randolph C. Brost , Jeremy M. Grace , Dennis R. Freeman , Neil P. Redden , Bruce E. Koppe
IPC分类号： C23C16/00
CPC分类号： C23C14/243 , C23C14/12 , H01L51/001 , H01L51/0059 , H01L51/0077 , H01L51/0081
摘要： A device vaporizes organic materials onto a substrate surface to form a film. The device includes a vaporization apparatus to receive a quantity of organic material that can have one or more components each having a different vaporization temperature, the vaporization apparatus having a first region and a second region spaced from the first region; a cooling unit to actively cool the organic material in the first region so that each of the one or more organic components is maintained well below its vaporization temperature to reduce degradation of the organic material; heating unit to heat the second region of the vaporization apparatus above the vaporization temperature of each of the one or more organic components; and a metering unit having a permeable member to meter organic material at a controlled rate from the first region into the second region so that a thin cross section of the organic material is heated at a desired rate-dependent vaporization temperature, whereby organic material vaporizes and forms a film on the substrate surface.
摘要翻译： 装置将有机材料蒸发到基材表面上以形成膜。 该装置包括一个蒸发装置，用于接收一定量的有机材料，该有机材料可以具有各自具有不同蒸发温度的一种或多种组分，该蒸发装置具有第一区域和与该第一区域间隔开的第二区域; 冷却单元，用于主动冷却第一区域中的有机材料，使得一种或多种有机组分中的每一种保持在低于其蒸发温度以降低有机材料的降解; 加热单元以将所述蒸发装置的所述第二区域加热到所述一个或多个有机组分中的每一个的蒸发温度之上; 以及计量单元，其具有以从第一区域到第二区域的受控速率计量有机材料的渗透构件，使得有机材料的薄横截面以期望的速率依赖性蒸发温度被加热，由此有机材料蒸发， 在基板表面上形成膜。
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公开(公告)号：US07232588B2
公开(公告)日：2007-06-19
申请号：US10784585
申请日：2004-02-23
申请人： Michael Long , Randolph C. Brost , Jeremy M. Grace , Dennis R. Freeman , Neil P. Redden , Bruce E. Koppe
发明人： Michael Long , Randolph C. Brost , Jeremy M. Grace , Dennis R. Freeman , Neil P. Redden , Bruce E. Koppe
IPC分类号： C23C16/00
CPC分类号： C23C14/243 , C23C14/12 , H01L51/001 , H01L51/0059 , H01L51/0077 , H01L51/0081
摘要： A method for vaporizing organic materials onto a substrate surface to form a film including providing a quantity of organic material into a vaporization apparatus and actively maintaining the organic material in a first heating region in the vaporization apparatus to be below the vaporization temperature. The method also includes heating a second heating region of the vaporization apparatus above the vaporization temperature of the organic material and metering, at a controlled rate, organic material from the first heating region into the second heating region so that a thin cross section of the organic material is heated at a desired rate-dependent vaporization temperature, whereby organic material vaporizes and forms a film on the substrate surface.
摘要翻译： 一种用于将有机材料蒸发到基板表面上以形成膜的方法，所述方法包括向蒸发装置中提供一定数量的有机材料并主动将所述蒸发装置中的第一加热区域中的有机材料维持在汽化温度以下。 该方法还包括将蒸发装置的第二加热区域加热到有机材料的蒸发温度以上，并以受控的速率将有机材料从第一加热区域计量到第二加热区域，使得有机物的薄截面 材料以所需的速率依赖的蒸发温度加热，由此有机材料在衬底表面上蒸发并形成膜。
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公开(公告)号：US07238389B2
公开(公告)日：2007-07-03
申请号：US10805980
申请日：2004-03-22
申请人： Michael Long , David R. Strip , Jeremy M. Grace , Dennis R. Freeman , Neil P. Redden , Bruce E. Koppe
发明人： Michael Long , David R. Strip , Jeremy M. Grace , Dennis R. Freeman , Neil P. Redden , Bruce E. Koppe
IPC分类号： C23C16/00
CPC分类号： C23C14/12 , C23C14/228 , C23C14/246 , Y10S427/101
摘要： A method for vaporizing organic materials onto a surface, to form a film includes providing a quantity of organic material in a fluidized powdered form; metering the powdered organic material and directing a stream of such fluidized powder onto a first member; heating the first member so that as the stream of fluidized powder is vaporized; collecting the vaporized organic material in a manifold; and providing a second member formed with at least one aperture in communication with the manifold that permits the vaporized organic material to be directed onto the surface to form a film.
摘要翻译： 将有机材料蒸发到表面上以形成膜的方法包括提供一定量的以流化粉末形式的有机材料; 计量粉状有机材料并将这种流化粉末的流引导到第一构件上; 加热第一构件，使得随着流化粉末流的蒸发; 将蒸发的有机材料收集在歧管中; 以及提供形成有至少一个与歧管连通的孔的第二构件，其允许蒸发的有机材料被引导到表面上以形成膜。
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5.发明授权公开(公告)号：US07364772B2
公开(公告)日：2008-04-29
申请号：US10805847
申请日：2004-03-22
申请人： Michael Long , Jeremy M. Grace , Bruce E. Koppe , Dennis R. Freeman , Neil P. Redden , Robert F. Zwaap
发明人： Michael Long , Jeremy M. Grace , Bruce E. Koppe , Dennis R. Freeman , Neil P. Redden , Robert F. Zwaap
IPC分类号： C23C16/455
CPC分类号： C23C14/24 , C23C14/12 , C23C14/243 , C23C14/26
摘要： A vapor deposition source for use in vacuum chamber for coating an organic layer on a substrate of an OLED device, includes a manifold including side and bottom walls defining a chamber for receiving organic material, and an aperture plate disposed between the side walls, the aperture plate having a plurality of spaced apart apertures for emitting vaporized organic material; the aperture plate including conductive material which in response to an electrical current produces heat; means for heating the organic material to a temperature which causes its vaporization, and heating the side walls of the manifold; and an electrical insulator coupling the aperture plate to the side walls for concentrating heat in the unsupported region of the aperture plate adjacent to the apertures, whereby the distance between the aperture plate and the substrate can be reduced to provide high coating thickness uniformity on the substrate. A method for coating an organic layer on onto a substrate in a vacuum chamber includes providing a manifold including side and bottom walls defining a chamber for receiving organic material. and an aperture plate disposed between the side walls, the aperture elate having a plurality of spaced apart apertures for emitting vaporized organic material; heating the organic material to a temperature which causes its vaporization, and the side walls of the manifold, the aperture plate includes a first aperture plate emissive surface that radiates energy into the chamber and a second aperture plate emissive surface that radiates less energy to the substrate wherein the second aperture elate emissive surface has an emissivity lower than the first aperture plate emissive surface; and concentrating heat in an unsupported region of the aperture plate adjacent to the apertures by providing an electrical insulator coupling the aperture plate to the side walls.
摘要翻译： 用于在OLED器件的衬底上涂覆有机层的真空室中的气相沉积源包括：歧管，其包括限定用于接收有机材料的腔室的侧壁和底壁;以及设置在侧壁之间的孔板， 板具有多个间隔开的孔，用于发射蒸发的有机材料; 包括响应于电流的导电材料的孔板产生热量; 用于将有机材料加热到导致其蒸发的温度并加热歧管的侧壁的装置; 以及将孔板连接到侧壁上的电绝缘体，用于将热量集中在邻近孔的孔板的未支撑区域中，由此可以减小孔板和基板之间的距离，以在基板上提供高的涂层厚度均匀性 。 在真空室中将有机层涂覆到基底上的方法包括提供歧管，其包括限定用于接收有机材料的室的侧壁和底壁。 以及设置在所述侧壁之间的孔板，所述孔口具有多个间隔开的孔，用于发射蒸发的有机材料; 将有机材料加热到导致其蒸发的温度，并且歧管的侧壁，孔板包括将能量辐射到腔室中的第一孔板发射表面和向衬底辐射较少能量的第二孔板发射表面 其中所述第二孔径发光表面具有低于所述第一孔板发射表面的发射率; 并且通过提供将孔板联接到侧壁的电绝缘体将热量集中在邻近孔的孔板的未支撑区域中。
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公开(公告)号：US20100233367A1
公开(公告)日：2010-09-16
申请号：US12786182
申请日：2010-05-24
申请人： Michael L. Boroson , Michael Long , Jeremy M. Grace , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
发明人： Michael L. Boroson , Michael Long , Jeremy M. Grace , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
IPC分类号： B05D1/00
CPC分类号： C23C14/542 , C23C14/12 , C23C14/246 , H01L51/001
摘要： A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; and providing a volume of organic material and maintaining the temperature of such organic material in a first condition so that its vapor pressure is below that needed to effectively form a layer on the substrate, and in a second condition heating a volume percentage of the initial volume of such organic material so that the vapor pressure of the heated organic material is sufficient to effectively form a layer.
摘要翻译： 一种用于控制蒸发的有机材料沉积到衬底表面上的方法，包括提供具有至少一个孔的歧管，蒸发的有机材料通过该孔通过以沉积到衬底表面上; 并且提供一定体积的有机材料并将这种有机材料的温度保持在第一状态，使得其蒸气压低于在衬底上有效形成层所需的蒸气压，而在第二条件下加热初始体积的体积百分数 的这种有机材料，使得加热的有机材料的蒸气压足以有效地形成层。
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公开(公告)号：US07465475B2
公开(公告)日：2008-12-16
申请号：US10984667
申请日：2004-11-09
申请人： Jeremy M. Grace , Michael Long , Michael L. Boroson , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
发明人： Jeremy M. Grace , Michael Long , Michael L. Boroson , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
IPC分类号： C23C16/448
CPC分类号： C23C14/542 , C23C14/12 , C23C14/24 , H01L51/001 , H01L51/56
摘要： A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a heating device to produce vaporized organic material; providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; providing a controller operating independently of the heating device and effective in a first condition for limiting the passage of vaporized organic material through the aperture, and effective in a second condition for facilitating the passage of vaporized organic material through the aperture; and wherein the heating device, or the controller, or both are contiguous to the manifold.
摘要翻译： 一种用于控制蒸发的有机材料沉积到衬底表面上的方法，包括提供加热装置以产生蒸发的有机材料; 提供具有至少一个孔的歧管，蒸发的有机材料通过该孔通过以沉积到衬底表面上; 提供独立于所述加热装置操作的控制器，并且在第一条件下有效地限制汽化的有机材料通过所述孔的通道，并且在第二条件下有效地促进蒸发的有机材料通过所述孔; 并且其中所述加热装置或所述控制器或两者都与所述歧管邻接。
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公开(公告)号：US08012537B2
公开(公告)日：2011-09-06
申请号：US12786182
申请日：2010-05-24
申请人： Michael L. Boroson , Michael Long , Jeremy M. Grace , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
发明人： Michael L. Boroson , Michael Long , Jeremy M. Grace , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
CPC分类号： C23C14/542 , C23C14/12 , C23C14/246 , H01L51/001
摘要： A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; and providing a volume of organic material and maintaining the temperature of such organic material in a first condition so that its vapor pressure is below that needed to effectively form a layer on the substrate, and in a second condition heating a volume percentage of the initial volume of such organic material so that the vapor pressure of the heated organic material is sufficient to effectively form a layer.
摘要翻译： 一种用于控制蒸发的有机材料沉积到衬底表面上的方法，包括提供具有至少一个孔的歧管，蒸发的有机材料通过该孔通过以沉积到衬底表面上; 并且提供一定体积的有机材料并将这种有机材料的温度保持在第一状态，使得其蒸气压低于在衬底上有效形成层所需的蒸气压，而在第二条件下加热初始体积的体积百分数 的这种有机材料，使得加热的有机材料的蒸气压足以有效地形成层。
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9.发明授权公开(公告)号：US06893939B1
公开(公告)日：2005-05-17
申请号：US10786859
申请日：2004-02-25
CPC分类号： C23C14/24 , C23C14/12 , C23C14/243 , H01L51/001
摘要： A thermal physical vapor deposition source for depositing material onto a substrate includes an elongated container for receiving the material, the container having a conductance CB in the elongated direction, and a heater for heating the material in the container to vaporize the material to a partial pressure Pm. The container has at least one member defining a plurality of apertures arranged along the length of the member, the apertures having a total conductance CA, wherein C A C B ≤ 0.5 ; and end heaters for heating each side of the container to reduce condensation of material onto the container.
摘要翻译： 用于将材料沉积到衬底上的热物理气相沉积源包括用于接收材料的细长容器，容器在细长方向上具有导电性C B，以及用于加热容器中的材料的加热器 以使材料气化成分压P m。 所述容器具有至少一个构件，其限定沿所述构件的长度布置的多个孔，所述孔具有总电导C A A，其中
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公开(公告)号：US20080131587A1
公开(公告)日：2008-06-05
申请号：US11564976
申请日：2006-11-30
申请人： Michael L. Boroson , Michael Long , Jeremy M. Grace , Neil P. Redden , Dustin L. Winters , Thomas W. Palone
发明人： Michael L. Boroson , Michael Long , Jeremy M. Grace , Neil P. Redden , Dustin L. Winters , Thomas W. Palone
CPC分类号： C23C14/042 , C23C14/12 , H01L51/001 , H01L51/0011 , H01L51/56
摘要： A method of depositing organic material onto an OLED substrate, comprising: providing a manifold for receiving vaporized organic material, the manifold including an aperture plate having openings, the aperture plate openings being selected to provide beams of vaporized organic material directed to the substrate, such beams having off-axis components; and providing a mask spaced between the OLED substrate and the manifold, the mask having openings that respectively correspond to the aperture plate openings, the mask openings being selected to skim off at least a portion of the off-axis components of the beams.
摘要翻译： 一种将有机材料沉积在OLED衬底上的方法，包括：提供用于接收蒸发的有机材料的歧管，所述歧管包括具有开口的孔板，所述孔板开口被选择为提供被引导到衬底的气化有机材料束， 具有离轴部件的光束; 以及提供在所述OLED基板和所述歧管之间间隔开的掩模，所述掩模具有分别对应于所述孔板开口的开口，所述掩模开口被选择为撇去所述梁的所述偏轴部件的至少一部分。
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