Device for exciting a gas by a surface wave plasma
    2.
    发明授权
    Device for exciting a gas by a surface wave plasma 有权
    用于通过表面波等离子体激发气体的装置

    公开(公告)号:US06298806B1

    公开(公告)日:2001-10-09

    申请号:US09446980

    申请日:2000-02-29

    IPC分类号: C23C1600

    摘要: The invention concerns a device for exciting a gas comprising a hollow structure (24) forming a waveguide to be connected to a microwave generator and means for circulating a gas through the structure. The gas circulating means comprise an assembly of at least two hollow tubes (46, 48) made of dielectric material respectively passing through said structure (24) in the zones wherein the amplitude of the electric field associated with the incident wave is substantially the same.

    摘要翻译: 本发明涉及一种用于激发气体的装置,该装置包括形成要连接到微波发生器的波导管的中空结构(24)和用于使气体循环通过结构的装置。 气体循环装置包括由介电材料制成的至少两个中空管(46,48)的组件,分别穿过所述结构(24),其中与入射波相关联的电场的振幅基本相同。

    Device for exciting a gas by a surface wave plasma and gas treatment apparatus incorporating such a device
    3.
    发明授权
    Device for exciting a gas by a surface wave plasma and gas treatment apparatus incorporating such a device 失效
    用于通过包括这种装置的表面波等离子体和气体处理装置激发气体的装置

    公开(公告)号:US06224836B1

    公开(公告)日:2001-05-01

    申请号:US09066653

    申请日:1998-04-27

    IPC分类号: B01J1908

    CPC分类号: H05H1/46

    摘要: Device for exciting a gas comprising a hollow structure forming a waveguide, made of an electrically conductive material, connected to a microwave generator and including a passage for a hollow dielectric tube adapted for flow of the gas to be excited, the hollow structure further including a wave-concentrating region designed to concentrate microwave radiation produced by the generator onto the tube, during operation of the device, for the purpose of producing a surface wave plasma in the gas, at least one electromagnetic screening sleeve made of a conductive material, fastened to the hollow structure and extending along the extension of the passage so as to surround the hollow tube.

    摘要翻译: 用于激发包括形成由导电材料制成的波导的中空结构的气体的装置,其连接到微波发生器并且包括适于待被激发的气体流动的中空介电管的通道,所述中空结构还包括 波集中区,设计用于将由发生器产生的微波辐射集中到管上,在器件的操作期间,用于在气体中产生表面波等离子体,至少一个由导电材料制成的电磁屏蔽套,固定到 中空结构并沿着通道的延伸部延伸以围绕中空管。

    Process and apparatus for the treatment of perfluorinated and hydrofluorocarbon gases for the purpose of destroying them
    5.
    发明授权
    Process and apparatus for the treatment of perfluorinated and hydrofluorocarbon gases for the purpose of destroying them 有权
    用于处理全氟化氢和氢氟碳化合物气体的方法和设备,以摧毁它们

    公开(公告)号:US06290918B1

    公开(公告)日:2001-09-18

    申请号:US09347024

    申请日:1999-07-02

    IPC分类号: B01J1908

    摘要: An apparatus for the treatment of perfluorinated and/or hydrofluorocarbon gases, for the purpose of destroying them, is provided. The apparatus includes at least one high-frequency surface-wave exciter which produces surface waves, a waveguide designed to guide the surface waves produced by the at least one wave exciter to at least one hollow dielectric tube for (i) creating, when supplied with a carrier gas an atmospheric-pressure plasma and (ii) for dissociating the molecules of the perfluorinated and/or hydrofluorocarbon gases within the plasma in order to form reactive compounds, and at least one treatment unit for the reactive fluorinated compounds which is arranged on an exit side of a corresponding hollow dielectric tube.

    摘要翻译: 提供了用于处理全氟化和/或氢氟烃气体的装置,用于破坏它们。 该装置包括产生表面波的至少一个高频表面波激励器,设计成将由至少一个波激励器产生的表面波引导到至少一个中空电介质管的波导,用于(i)在被提供时产生 载气,大气压等离子体和(ii)用于解离等离子体内的全氟化和/或氢氟烃气体的分子以形成反应性化合物,以及至少一个反应性氟化合物的处理单元,其布置在 相应的中空电介质管的出口侧。