公开(公告)号：US20140284812A1

公开(公告)日：2014-09-25

申请号：US14302160

申请日：2014-06-11

Applicant: Micron Technology, Inc.

Inventor： Roberto Somaschini ,  Alessandro Vaccaro ,  Paolo Tessariol ,  Giulio Albini

IPC: H01L21/768 ,  H01L23/528

CPC classification number: H01L21/76807 ,  H01L21/76808 ,  H01L21/76811 ,  H01L21/76816 ,  H01L21/7684 ,  H01L21/76877 ,  H01L21/76895 ,  H01L23/5226 ,  H01L23/5283 ,  H01L27/1052 ,  H01L27/11521 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Array contacts for semiconductor memories may be formed using a first set of parallel stripe masks and subsequently a second set of parallel stripe masks transverse to the first set. For example, one set of masks may be utilized to etch a dielectric layer, to form parallel spaced trenches. Then the trenches may be filled with a sacrificial material. That sacrificial material may then be masked transversely to its length and etched, for example. The resulting openings may be filled with a metal to form array contacts.

Abstract translation: 半导体存储器的阵列触点可以使用第一组并行条纹掩模形成，随后可以与第一组横向的第二组平行条纹掩模形成。 例如，可以使用一组掩模来蚀刻介电层，以形成平行隔开的沟槽。 然后可以用牺牲材料填充沟槽。 然后，该牺牲材料可以横向于其长度被掩蔽并被蚀刻。 所得到的开口可以用金属填充以形成阵列触点。

公开(公告)号：US20180151415A1

公开(公告)日：2018-05-31

申请号：US15881539

申请日：2018-01-26

Applicant: Micron Technology, Inc.

Inventor： Roberto Somaschini ,  Alessandro Vaccaro ,  Paolo Tessariol ,  Giulio Albini

IPC: H01L21/768 ,  H01L27/105

CPC classification number: H01L21/76807 ,  H01L21/76808 ,  H01L21/76811 ,  H01L21/76816 ,  H01L21/7684 ,  H01L21/76877 ,  H01L21/76895 ,  H01L23/5226 ,  H01L23/5283 ,  H01L27/1052 ,  H01L27/11521 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Array contacts for semiconductor memories may be formed using a first set of parallel stripe masks and subsequently a second set of parallel stripe masks transverse to the first set. For example, one set of masks may be utilized to etch a dielectric layer, to form parallel spaced trenches. Then the trenches may be filled with a sacrificial material. That sacrificial material may then be masked transversely to its length and etched, for example. The resulting openings may be filled with a metal to form array contacts.

公开(公告)号：US09899254B2

公开(公告)日：2018-02-20

申请号：US15471420

申请日：2017-03-28

Applicant: Micron Technology, Inc.

Inventor： Roberto Somaschini ,  Alessandro Vaccaro ,  Paolo Tessariol ,  Giulio Albini

IPC: H01L21/768 ,  H01L27/105

CPC classification number: H01L21/76807 ,  H01L21/76808 ,  H01L21/76811 ,  H01L21/76816 ,  H01L21/7684 ,  H01L21/76877 ,  H01L21/76895 ,  H01L23/5226 ,  H01L23/5283 ,  H01L27/1052 ,  H01L27/11521 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Array contacts for semiconductor memories may be formed using a first set of parallel stripe masks and subsequently a second set of parallel stripe masks transverse to the first set. For example, one set of masks may be utilized to etch a dielectric layer, to form parallel spaced trenches. Then the trenches may be filled with a sacrificial material. That sacrificial material may then be masked transversely to its length and etched, for example. The resulting openings may be filled with a metal to form array contacts.

公开(公告)号：US11056383B2

公开(公告)日：2021-07-06

申请号：US15881539

申请日：2018-01-26

Applicant: Micron Technology, Inc.

Inventor： Roberto Somaschini ,  Alessandro Vaccaro ,  Paolo Tessariol ,  Giulio Albini

IPC: H01L27/115 ,  H01L27/105 ,  H01L23/522 ,  H01L23/528 ,  H01L21/768 ,  H01L27/11521

Abstract: Array contacts for semiconductor memories may be formed using a first set of parallel stripe masks and subsequently a second set of parallel stripe masks transverse to the first set. For example, one set of masks may be utilized to etch a dielectric layer, to form parallel spaced trenches. Then the trenches may be filled with a sacrificial material. That sacrificial material may then be masked transversely to its length and etched, for example. The resulting openings may be filled with a metal to form array contacts.

公开(公告)号：US20140048956A1

公开(公告)日：2014-02-20

申请号：US14066340

申请日：2013-10-29

Applicant: Micron Technology, Inc.

Inventor： Roberto Somaschini ,  Alessandro Vaccaro ,  Paolo Tessariol ,  Giulio Albini

IPC: H01L23/522 ,  H01L23/528

CPC classification number: H01L21/76807 ,  H01L21/76808 ,  H01L21/76811 ,  H01L21/76816 ,  H01L21/7684 ,  H01L21/76877 ,  H01L21/76895 ,  H01L23/5226 ,  H01L23/5283 ,  H01L27/1052 ,  H01L27/11521 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Array contacts for semiconductor memories may be formed using a first set of parallel stripe masks and subsequently a second set of parallel stripe masks transverse to the first set. For example, one set of masks may be utilized to etch a dielectric layer, to form parallel spaced trenches. Then the trenches may be filled with a sacrificial material. That sacrificial material may then be masked transversely to its length and etched, for example. The resulting openings may be filled with a metal to form array contacts.

公开(公告)号：US20170200635A1

公开(公告)日：2017-07-13

申请号：US15471420

申请日：2017-03-28

Applicant: Micron Technology, Inc.

Inventor： Roberto Somaschini ,  Alessandro Vaccaro ,  Paolo Tessariol ,  Giulio Albini

IPC: H01L21/768 ,  H01L27/105

CPC classification number: H01L21/76807 ,  H01L21/76808 ,  H01L21/76811 ,  H01L21/76816 ,  H01L21/7684 ,  H01L21/76877 ,  H01L21/76895 ,  H01L23/5226 ,  H01L23/5283 ,  H01L27/1052 ,  H01L27/11521 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Array contacts for semiconductor memories may be formed using a first set of parallel stripe masks and subsequently a second set of parallel stripe masks transverse to the first set. For example, one set of masks may be utilized to etch a dielectric layer, to form parallel spaced trenches. Then the trenches may be filled with a sacrificial material. That sacrificial material may then be masked transversely to its length and etched, for example. The resulting openings may be filled with a metal to form array contacts.

公开(公告)号：US09627251B2

公开(公告)日：2017-04-18

申请号：US14722889

申请日：2015-05-27

Applicant: Micron Technology, Inc.

Inventor： Roberto Somaschini ,  Alessandro Vaccaro ,  Paolo Tessariol ,  Giulio Albini

IPC: H01L21/768 ,  H01L27/105 ,  H01L23/522 ,  H01L23/528 ,  H01L27/11521

CPC classification number: H01L21/76807 ,  H01L21/76808 ,  H01L21/76811 ,  H01L21/76816 ,  H01L21/7684 ,  H01L21/76877 ,  H01L21/76895 ,  H01L23/5226 ,  H01L23/5283 ,  H01L27/1052 ,  H01L27/11521 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Array contacts for semiconductor memories may be formed using a first set of parallel stripe masks and subsequently a second set of parallel stripe masks transverse to the first set. For example, one set of masks may be utilized to etch a dielectric layer, to form parallel spaced trenches. Then the trenches may be filled with a sacrificial material. That sacrificial material may then be masked transversely to its length and etched, for example. The resulting openings may be filled with a metal to form array contacts.

公开(公告)号：US09059261B2

公开(公告)日：2015-06-16

申请号：US14302160

申请日：2014-06-11

Applicant: Micron Technology, Inc.

Inventor： Roberto Somaschini ,  Alessandro Vaccaro ,  Paolo Tessariol ,  Giulio Albini

IPC: H01L21/768 ,  H01L27/105 ,  H01L23/522 ,  H01L23/528 ,  H01L27/115

CPC classification number: H01L21/76807 ,  H01L21/76808 ,  H01L21/76811 ,  H01L21/76816 ,  H01L21/7684 ,  H01L21/76877 ,  H01L21/76895 ,  H01L23/5226 ,  H01L23/5283 ,  H01L27/1052 ,  H01L27/11521 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Array contacts for semiconductor memories may be formed using a first set of parallel stripe masks and subsequently a second set of parallel stripe masks transverse to the first set. For example, one set of masks may be utilized to etch a dielectric layer, to form parallel spaced trenches. Then the trenches may be filled with a sacrificial material. That sacrificial material may then be masked transversely to its length and etched, for example. The resulting openings may be filled with a metal to form array contacts.

Abstract translation: 半导体存储器的阵列触点可以使用第一组并行条纹掩模形成，随后可以与第一组横向的第二组平行条纹掩模形成。 例如，可以使用一组掩模来蚀刻介电层，以形成平行隔开的沟槽。 然后可以用牺牲材料填充沟槽。 然后，该牺牲材料可以横向于其长度被掩蔽并被蚀刻。 所得到的开口可以用金属填充以形成阵列触点。

公开(公告)号：US20150262867A1

公开(公告)日：2015-09-17

申请号：US14722889

申请日：2015-05-27

Applicant: Micron Technology, Inc.

Inventor： Roberto Somaschini ,  Alessandro Vaccaro ,  Paolo Tessariol ,  Giulio Albini

IPC: H01L21/768 ,  H01L27/105

CPC classification number: H01L21/76807 ,  H01L21/76808 ,  H01L21/76811 ,  H01L21/76816 ,  H01L21/7684 ,  H01L21/76877 ,  H01L21/76895 ,  H01L23/5226 ,  H01L23/5283 ,  H01L27/1052 ,  H01L27/11521 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Array contacts for semiconductor memories may be formed using a first set of parallel stripe masks and subsequently a second set of parallel stripe masks transverse to the first set. For example, one set of masks may be utilized to etch a dielectric layer, to form parallel spaced trenches. Then the trenches may be filled with a sacrificial material. That sacrificial material may then be masked transversely to its length and etched, for example. The resulting openings may be filled with a metal to form array contacts.

Abstract translation: 半导体存储器的阵列触点可以使用第一组并行条纹掩模形成，随后可以与第一组横向的第二组平行条纹掩模形成。 例如，可以使用一组掩模来蚀刻介电层，以形成平行隔开的沟槽。 然后可以用牺牲材料填充沟槽。 然后，该牺牲材料可以横向于其长度被掩蔽并被蚀刻。 所得到的开口可以用金属填充以形成阵列触点。

公开(公告)号：US08759980B2

公开(公告)日：2014-06-24

申请号：US14066340

申请日：2013-10-29

Applicant: Micron Technology, Inc.

Inventor： Roberto Somaschini ,  Alessandro Vaccaro ,  Paolo Tessariol ,  Giulio Albini

IPC: G11C11/24

CPC classification number: H01L21/76807 ,  H01L21/76808 ,  H01L21/76811 ,  H01L21/76816 ,  H01L21/7684 ,  H01L21/76877 ,  H01L21/76895 ,  H01L23/5226 ,  H01L23/5283 ,  H01L27/1052 ,  H01L27/11521 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Array contacts for semiconductor memories may be formed using a first set of parallel stripe masks and subsequently a second set of parallel stripe masks transverse to the first set. For example, one set of masks may be utilized to etch a dielectric layer, to form parallel spaced trenches. Then the trenches may be filled with a sacrificial material. That sacrificial material may then be masked transversely to its length and etched, for example. The resulting openings may be filled with a metal to form array contacts.

Abstract translation: 半导体存储器的阵列触点可以使用第一组并行条纹掩模形成，随后可以与第一组横向的第二组平行条纹掩模形成。 例如，可以使用一组掩模来蚀刻介电层，以形成平行间隔开的​​沟槽。 然后可以用牺牲材料填充沟槽。 然后，该牺牲材料可以横向于其长度被掩蔽并被蚀刻。 所得到的开口可以用金属填充以形成阵列触点。