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公开(公告)号:US20170154952A1
公开(公告)日:2017-06-01
申请号:US14955845
申请日:2015-12-01
Applicant: Micron Technology, Inc.
Inventor: Kenji KOMEDA
CPC classification number: H01L28/90 , H01L27/016 , H01L28/91
Abstract: A capacitor includes an elevationally inner capacitor electrode, an elevationally outer capacitor electrode, and capacitor insulator between the elevationally inner and outer capacitor electrodes. The elevationally inner capacitor electrode comprises a hollow longitudinally-elongated conductive cylinder-like portion and a non-hollow longitudinally-elongated conductive cylinder-like portion electrically coupled with the hollow cylinder-like portion. The non-hollow cylinder-like portion is radially of and extends longitudinally along a longitudinal side surface of the hollow cylinder-like portion. Additional embodiments and aspects are disclosed.
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2.
公开(公告)号:US20180108486A1
公开(公告)日:2018-04-19
申请号:US15296229
申请日:2016-10-18
Applicant: Micron Technology, Inc.
Inventor: Kenji KOMEDA , Kana Suzuki
Abstract: A device comprises a capacitor comprising first and second electrodes having a capacitor insulator there-between. The first electrode is elongated and extends elevationally. The first electrode comprises elevationally-extending first conductive material and comprises second conductive material that projects laterally outward from an elevationally-extending part of the first conductive material. The laterally-projecting second conductive material has a vertical thickness that is less than that of the elevationally-extending first conductive material. Support material laterally supports the capacitor and contacts a tip end of the laterally-projecting second conductive material.
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