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公开(公告)号：US07105075B2
公开(公告)日：2006-09-12
申请号：US10884027
申请日：2004-07-02
CPC分类号： H01J37/3405 , H01J37/32027 , H01J37/3299 , H05H1/46
摘要： There is provided by this invention an apparatus and method for controlling a dc magnetron plasma processing system that automatically adjusts the control signal to the power supply based upon the dynamic impedance of the load to control the output power to the plasma. The output voltage and the output current of the power supply that supplies power to the plasma is sampled over at a sampling frequency at least four to five times higher than the switching frequency and the dynamic impedance of the plasma is calculated based upon the sampled voltage and current from the algorithm R plasma = Δ V n Δ I n wherein ΔVn and ΔIn is the maximum difference among samples on one switching cycle. If the dynamic impedance seen is negative in nature then the control signal is compensated accordingly.
摘要翻译： 本发明提供一种用于控制直流磁控管等离子体处理系统的装置和方法，该系统基于负载的动态阻抗自动调节对电源的控制信号，以控制等离子体的输出功率。 向等离子体供电的电源的输出电压和输出电流以比开关频率高至少四至五倍的采样频率被采样，并且基于采样电压来计算等离子体的动态阻抗， 来自算法的电流
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公开(公告)号：US07081598B2
公开(公告)日：2006-07-25
申请号：US10925830
申请日：2004-08-24
IPC分类号： B23K9/00
CPC分类号： H01J37/32027 , B23K10/006 , H05H1/36
摘要： There is provided by this invention an apparatus and method of supplying to ignite a plasma wherein in the event of an arc a shunt switch is used to divert the power away from the plasma that is incorporated into an over-voltage protection circuit that controls the shunt switch to act as a boost switch when the arc is extinguished such that the stored inductor energy is used to boost the ignition voltage for reigniting the plasma if it is extinguished. When the arc is extinguished, the inductor current is diminished, and the plasma is ignited, then the switch S1 is turned OFF and the inductor energy goes to the plasma and the power supply operates in its normal operating mode.
摘要翻译： 本发明提供了一种用于点燃等离子体的装置和方法，其中在电弧的情况下，使用分流开关将功率转移离开等离子体，该等离子体被结合到控制分流器的过电压保护电路中 当电弧熄灭时，切换到起升压开关的作用，使得存储的电感能量用于提升点火电压，以便在等离子体熄灭时重新点燃。 当电弧熄灭时，电感电流减小，等离子体点火，开关S 1断开，电感能量进入等离子体，电源工作在正常运行模式。
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公开(公告)号：US06979980B1
公开(公告)日：2005-12-27
申请号：US10925832
申请日：2004-08-24
CPC分类号： H02M3/1584 , H02M3/07 , H02M2003/075 , H02M2003/076 , H02M2003/1586
摘要： There is provided by this invention soft switching interleaved power converters that are suitable for high power and high voltage applications such as plasma processing. They have greatly reduced switching losses and diode reverse-recovery losses which allows operation at high switching frequencies. The peak values of the reverse-recovery currents of the diodes are substantially less then their peak forward operating currents. The power converters incorporate power converter cells that comprise a plurality of switching assemblies that are operated with an interleaved switching pattern, and that are each connected to an input terminal of an inductor assembly that also has a common terminal. The inductance between each pair of input terminals is less than the inductance between each input terminal and the common terminal of the inductor assembly.
摘要翻译： 本发明提供了适用于诸如等离子体处理的高功率和高电压应用的软切换交错功率转换器。 它们大大降低了开关损耗和二极管反向恢复损耗，允许在高开关频率下工作。 二极管的反向恢复电流的峰值明显小于它们的峰值正向工作电流。 功率转换器包括功率转换器单元，其包括以交错开关模式操作的多个开关组件，并且每个开关组件都连接到也具有公共端子的电感器组件的输入端子。 每对输入端子之间的电感小于每个输入端子和电感器组件的公共端子之间的电感。
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4.发明授权Apparatus and method for fast arc extinction with early shunting of arc current in plasma 失效用于快速灭弧的装置和方法，其中等离子体中的电弧电流早期分流公开(公告)号：US06943317B1
公开(公告)日：2005-09-13
申请号：US10884119
申请日：2004-07-02
IPC分类号： B23K9/00
CPC分类号： B23K10/006 , H01J37/32935 , H01J2237/0206 , H05H1/36
摘要： There is provided by this invention a novel apparatus and method of operating a dc plasma process that diverts the power supply current from the plasma at the initiation of an arc, thereby inhibiting energy from flowing from the power supply to the plasma, and then to allow energy to flow again when the power supply re-enables energy flow to the plasma. The diverting means is connected to the output of the power supply to divert current away from the plasma at the initiation of an arc wherein the diverting means is actuated when the arc is detected on the output and diverts the current for a first pre-determined time. The diverting means is released at the end of the first pre-determined time before the current reaches zero wherein current is redirected to the plasma and the diverting means is reactivated at the end of a second pre-determined time in the event the arc is not extinguished.
摘要翻译： 本发明提供了一种新颖的操作直流等离子体工艺的装置和方法，该方法在电弧开始时将电源电流从等离子体转移，从而阻止能量从电源流向等离子体，然后允许 当电源重新启动能量流到等离子体时，能量再次流动。 转向装置连接到电源的输出端，以在电弧开始时将电流转移离开等离子体，其中当在输出端检测到电弧时转向装置被致动，并将电流转移到第一预定时间 。 转向装置在电流达到零之前在第一预定时间结束时释放，其中电流被重定向到等离子体，并且在电弧不是的情况下在第二预定时间结束时重新激活转向装置 熄灭
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