公开(公告)号：US08120233B2

公开(公告)日：2012-02-21

申请号：US12592910

申请日：2009-12-03

申请人： Mitoshi Umeki ,  Takahiro Inoue ,  Yoshiaki Amano ,  Takefumi Saito

发明人： Mitoshi Umeki ,  Takahiro Inoue ,  Yoshiaki Amano ,  Takefumi Saito

IPC分类号： H01L41/047

CPC分类号： H01L41/29 ,  H01L41/332 ,  H03H9/0595 ,  H03H9/1035 ,  H03H9/21 ,  Y10T29/42

摘要： Methods are disclosed for manufacturing piezoelectric vibrating pieces and devices including such pieces. According to an embodiment of the method, a piezoelectric vibrating piece is produced from a piezoelectric wafer. To form the piece, a profile of the piezoelectric vibrating piece is formed in a piezoelectric wafer. A first metal film (chromium; Cr) is formed on the surface of the piezoelectric piece. The chromium film is surface-oxidized to form a film having Cr foundation layer and an oxidized surface. A second metal film (gold; Au) is formed on the oxidized surface. Then, in selected regions not destined to become electrodes, the second metal film is removed, leaving electrode patterns at designated regions of the piezoelectric vibrating piece.

摘要翻译： 公开了用于制造压电振动片和包括这些片的装置的方法。 根据该方法的一个实施例，由压电晶片制造压电振动片。 为了形成该片，在压电晶片中形成压电振动片的轮廓。 在压电片的表面上形成第一金属膜（铬; Cr）。 铬膜被表面氧化以形成具有Cr基础层和氧化表面的膜。 在氧化的表面上形成第二金属膜（金; Au）。 然后，在不想成为电极的选择区域中，去除第二金属膜，将电极图案留在压电振动片的指定区域。

公开(公告)号：US20100133958A1

公开(公告)日：2010-06-03

申请号：US12592910

申请日：2009-12-03

申请人： Mitoshi Umeki ,  Takahiro Inoue ,  Yoshiaki Amano ,  Takefumi Saito

发明人： Mitoshi Umeki ,  Takahiro Inoue ,  Yoshiaki Amano ,  Takefumi Saito

IPC分类号： H01L41/047 ,  H01L41/22

CPC分类号： H01L41/29 ,  H01L41/332 ,  H03H9/0595 ,  H03H9/1035 ,  H03H9/21 ,  Y10T29/42

摘要： Methods are disclosed for manufacturing piezoelectric vibrating pieces and devices including such pieces. According to an embodiment of the method, a piezoelectric vibrating piece is produced from a piezoelectric wafer. To form the piece, a profile of the piezoelectric vibrating piece is formed in a piezoelectric wafer. A first metal film (chromium; Cr) is formed on the surface of the piezoelectric piece. The chromium film is surface-oxidized to form a film having Cr foundation layer and an oxidized surface. A second metal film (gold; Au) is formed on the oxidized surface. Then, in selected regions not destined to become electrodes, the second metal film is removed, leaving electrode patterns at designated regions of the piezoelectric vibrating piece.

摘要翻译： 公开了用于制造压电振动片和包括这些片的装置的方法。 根据该方法的一个实施例，由压电晶片制造压电振动片。 为了形成该片，在压电晶片中形成压电振动片的轮廓。 在压电片的表面上形成第一金属膜（铬; Cr）。 铬膜被表面氧化以形成具有Cr基础层和氧化表面的膜。 在氧化的表面上形成第二金属膜（金; Au）。 然后，在不想成为电极的选择区域中，去除第二金属膜，将电极图案留在压电振动片的指定区域。

公开(公告)号：US20100201221A1

公开(公告)日：2010-08-12

申请号：US12703473

申请日：2010-02-10

申请人： Takahiro Inoue ,  Takefumi Saito ,  Mitoshi Umeki ,  Ryoichi Ichikawa

发明人： Takahiro Inoue ,  Takefumi Saito ,  Mitoshi Umeki ,  Ryoichi Ichikawa

IPC分类号： H01L41/053 ,  H01L41/04 ,  H01L41/22

CPC分类号： H03H3/04 ,  H03H9/1035 ,  H03H9/21 ,  H03H2003/0492 ,  Y10T29/42

摘要： An exemplary piezoelectric vibrating device includes a piezoelectric frame that supports and surrounds a tuning-fork type piezoelectric vibrating piece having a pair of vibrating arms. The device also includes a lid and a package base that are siloxane-bonded to the frame. The lid defines at least one frequency-adjustment hole extending through the thickness dimension of the lid from an inner major surface thereof (facing the frame) to an outer major surface of the lid. The package base defines at least one through-hole electrode passing via a respective electrode through-hole through the thickness of the base from an inner major surface thereof (facing the frame) to the outer major surface thereof. The electrode is connected to the piezoelectric vibrating piece. The lid and base include external electrodes, made of an electrically conductive material, that cover the through-holes and frequency-adjustment hole(s).

摘要翻译： 示例性压电振动装置包括支撑并围绕具有一对振动臂的音叉型压电振动片的压电框架。 该装置还包括硅胶结合到框架上的盖和封装基座。 盖子限定了至少一个频率调节孔，其延伸穿过盖的厚度尺寸从其内部主表面（面向框架）到盖的外主表面。 封装基部限定了至少一个通孔，该通孔经由相应的电极通孔穿过基底的厚度从其内主表面（面向框架）到其外主表面。 电极与压电振动片连接。 盖和底座包括覆盖通孔和频率调节孔的由导电材料制成的外部电极。

公开(公告)号：US08227958B2

公开(公告)日：2012-07-24

申请号：US12703473

申请日：2010-02-10

申请人： Takahiro Inoue ,  Takefumi Saito ,  Mitoshi Umeki ,  Ryoichi Ichikawa

发明人： Takahiro Inoue ,  Takefumi Saito ,  Mitoshi Umeki ,  Ryoichi Ichikawa

IPC分类号： H01L41/04

CPC分类号： H03H3/04 ,  H03H9/1035 ,  H03H9/21 ,  H03H2003/0492 ,  Y10T29/42

摘要： An exemplary piezoelectric vibrating device includes a piezoelectric frame that supports and surrounds a tuning-fork type piezoelectric vibrating piece having a pair of vibrating arms. The device also includes a lid and a package base that are siloxane-bonded to the frame. The lid defines at least one frequency-adjustment hole extending through the thickness dimension of the lid from an inner major surface thereof (facing the frame) to an outer major surface of the lid. The package base defines at least one through-hole electrode passing via a respective electrode through-hole through the thickness of the base from an inner major surface thereof (facing the frame) to the outer major surface thereof. The electrode is connected to the piezoelectric vibrating piece. The lid and base include external electrodes, made of an electrically conductive material, that cover the through-holes and frequency-adjustment hole(s).

摘要翻译： 示例性压电振动装置包括支撑并围绕具有一对振动臂的音叉型压电振动片的压电框架。 该装置还包括硅胶结合到框架上的盖和封装基座。 盖子限定了至少一个频率调节孔，其延伸穿过盖的厚度尺寸从其内部主表面（面向框架）到盖的外主表面。 封装基部限定了至少一个通孔，该通孔经由相应的电极通孔穿过基底的厚度从其内部主表面（面向框架）到其外主表面。 电极与压电振动片连接。 盖和底座包括覆盖通孔和频率调节孔的由导电材料制成的外部电极。

公开(公告)号：US20110062826A1

公开(公告)日：2011-03-17

申请号：US12859210

申请日：2010-08-18

申请人： Mitoshi Umeki ,  Takefumi Saito ,  Ryoichi Ichikawa

发明人： Mitoshi Umeki ,  Takefumi Saito ,  Ryoichi Ichikawa

IPC分类号： H01L41/053

CPC分类号： H03H9/1021 ,  H03H9/0595 ,  H03H9/1035 ,  H03H9/21

摘要： Surface-mounted piezoelectric devices are disclosed that include a package having a base and a lid made of a piezoelectric material or of glass. The package defines an internal cavity containing a tuning-fork type crystal vibrating piece having a pair of vibrating arms. The volume of the cavity is at least twelve times the volume of the pair of vibrating arms. Piezoelectric devices having these characteristics exhibit reduced CI degradation.

摘要翻译： 公开了表面安装的压电装置，其包括具有基底和由压电材料或玻璃制成的盖的封装。 包装件限定了包含具有一对振动臂的音叉型水晶振动片的内部空腔。 空腔的体积是该对振动臂的体积的至少十二倍。 具有这些特性的压电元件表现出降低的CI降解。

公开(公告)号：US08018126B2

公开(公告)日：2011-09-13

申请号：US12859210

申请日：2010-08-18

申请人： Mitoshi Umeki ,  Takefumi Saito ,  Ryoichi Ichikawa

发明人： Mitoshi Umeki ,  Takefumi Saito ,  Ryoichi Ichikawa

IPC分类号： H01L41/08

CPC分类号： H03H9/1021 ,  H03H9/0595 ,  H03H9/1035 ,  H03H9/21

摘要： Surface-mounted piezoelectric devices are disclosed that include a package having a base and a lid made of a piezoelectric material or of glass. The package defines an internal cavity containing a tuning-fork type crystal vibrating piece having a pair of vibrating arms. The volume of the cavity is at least twelve times the volume of the pair of vibrating arms. Piezoelectric devices having these characteristics exhibit reduced CI degradation.

摘要翻译： 公开了表面安装的压电装置，其包括具有基底和由压电材料或玻璃制成的盖的封装。 包装件限定了包含具有一对振动臂的音叉型水晶振动片的内部空腔。 空腔的体积是该对振动臂的体积的至少十二倍。 具有这些特性的压电元件表现出降低的CI降解。

公开(公告)号：US08456065B2

公开(公告)日：2013-06-04

申请号：US12880742

申请日：2010-09-13

申请人： Yoshiaki Amano ,  Takefumi Saito

发明人： Yoshiaki Amano ,  Takefumi Saito

IPC分类号： H03H9/21

CPC分类号： H03H9/0595 ,  H03H9/1021 ,  H03H9/1035

摘要： Surface-mounted piezoelectric devices are disclosed, of which an exemplary device includes a tuning-fork type piezoelectric vibrating piece having a base portion and a pair of vibrating arms extending from the base portion. The device includes a package defined by a wall. The package includes a cavity accommodating the tuning-fork type piezoelectric vibrating piece and at least one columnar body situated between the vibrating arms in the cavity.

摘要翻译： 公开了表面安装的压电装置，其中示例性装置包括具有基部的音叉型压电振动片和从基部延伸的一对振动臂。 该装置包括由墙壁限定的包装。 该包装包括容纳音叉型压电振动片的空腔和位于空腔中的振动臂之间的至少一个柱状体。

公开(公告)号：US20110062831A1

公开(公告)日：2011-03-17

申请号：US12880742

申请日：2010-09-13

申请人： Yoshiaki Amano ,  Takefumi Saito

发明人： Yoshiaki Amano ,  Takefumi Saito

IPC分类号： H01L41/053

CPC分类号： H03H9/0595 ,  H03H9/1021 ,  H03H9/1035

摘要： Surface-mounted piezoelectric devices are disclosed, of which an exemplary device includes a tuning-fork type piezoelectric vibrating piece having a base portion and a pair of vibrating arms extending from the base portion. The device includes a package defined by a wall. The package includes a cavity accommodating the tuning-fork type piezoelectric vibrating piece and at least one columnar body situated between the vibrating arms in the cavity.

摘要翻译： 公开了表面安装的压电装置，其中示例性装置包括具有基部的音叉型压电振动片和从基部延伸的一对振动臂。 该装置包括由墙壁限定的包装。 该包装包括容纳音叉型压电振动片的空腔和位于空腔中的振动臂之间的至少一个柱状体。

公开(公告)号：US08203256B2

公开(公告)日：2012-06-19

申请号：US12702844

申请日：2010-02-09

申请人： Takefumi Saito

发明人： Takefumi Saito

IPC分类号： H01L41/04

CPC分类号： H03H9/21 ,  H03H3/02 ,  H03H9/0595 ,  H03H9/1021 ,  H03H9/1035 ,  H03H2003/026 ,  H03H2003/0492 ,  Y10T29/42

摘要： A tuning-fork type crystal vibrating piece (20) is comprised of a base portion (23) comprising a piezoelectric material, a pair of parallel vibrating arms (21) with a designated thickness (D3) and width (W3) extend from the base portion, and a pair of weight portions (28) are formed by enlarging the width (W4) of the distal ends pair of vibrating arms. A cross-section of the pair of weight portions is formed symmetric with a central axis which is center of the pair of vibrating arms, and at least one portion of the pair of weight portions has a thickness which is less than the designated thickness (D3).

摘要翻译： 音叉型水晶振动片（20）由包括压电材料的基部（23）构成，具有指定厚度（D3）和宽度（W3）的一对平行振动臂（21）从底座 通过扩大远端一对振动臂的宽度（W4）形成一对配重部（28）。 一对重量部分的横截面形成为以一对振动臂的中心为中心的中心轴对称，并且该对重量部分的至少一部分具有小于指定厚度的厚度（D3 ）。

公开(公告)号：US20090179524A1

公开(公告)日：2009-07-16

申请号：US12352514

申请日：2009-01-12

申请人： Takefumi Saito

发明人： Takefumi Saito

IPC分类号： H01L41/053 ,  H01L41/22 ,  H01L41/047

CPC分类号： H03H9/1035 ,  H03H3/02 ,  H03H9/0595 ,  Y10T29/42

摘要： Crystal devices are disclosed that include a crystal frame having a crystal vibrating piece and an outer frame. The crystal vibrating piece includes excitation electrodes, and the outer frame supports the crystal vibrating piece. Each device has a base including connection electrodes on a first surface thereof and respective external electrodes on a second surface thereof, wherein the connection electrodes are electrically connected via respective through-holes to respective excitation electrodes and to respective external electrodes. The first surface of the base is bonded to the under-surface of the outer frame, and an upper surface of the outer frame is bonded to a crystal lid. The through-holes have non-circular transverse profiles and are filled with a sealing material such as a metal.

摘要翻译： 公开了包括具有水晶振动片和外框的水晶框的水晶装置。 水晶振动片包括激励电极，外框架支撑晶体振动片。 每个装置具有包括在其第一表面上的连接电极的基座和在其第二表面上的各个外部电极，其中连接电极经由相应的通孔电连接到相应的激励电极和相应的外部电极。 底座的第一表面结合到外框架的下表面，并且外框架的上表面接合到晶体盖。 通孔具有非圆形横截面并且填充有密封材料例如金属。