公开(公告)号：US09553560B2

公开(公告)日：2017-01-24

申请号：US14508458

申请日：2014-10-07

申请人： PIEDEK TECHNICAL LABORATORY

发明人： Hirofumi Kawashima

IPC分类号： H03H9/215 ,  H03B5/32 ,  H03H9/21 ,  H03H3/02 ,  H03H9/05 ,  H03H9/10 ,  H04R17/00 ,  H04R31/00 ,  H01L41/22 ,  H01L41/04 ,  H03H3/04

CPC分类号： H03H9/21 ,  H01L41/04 ,  H01L41/22 ,  H03B5/32 ,  H03H3/02 ,  H03H9/0547 ,  H03H9/1021 ,  H03H9/215 ,  H03H2003/026 ,  H03H2003/0492 ,  H04R17/00 ,  H04R31/00 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/4908 ,  Y10T29/49128 ,  Y10T29/49133 ,  Y10T29/49135

摘要： In a quartz crystal unit, the unit comprising a case, a quartz crystal tuning fork resonator and a lid, the resonator having a tuning fork base, and first and second tuning fork tines, each of the first and second tuning fork tines having a first side surface and a second side surface opposite the first side surface, the first side surface of the first tuning fork tine confronting the second side surface of the second tuning fork tine; at least one groove having a plurality of surfaces including a first surface being formed in at least one of first and second main surfaces of each of the first and second tuning fork tines so that only the first surface of the at least one groove is directly opposite the first side surface of the corresponding tuning fork tine and a width of the at least one groove is greater than or equal to a distance in the width direction of the at least one groove measured from an outer edge of the at least one groove to an outer edge of the corresponding one of the first and second tuning fork tines and less than 0.07 mm.

摘要翻译： 在石英晶体单元中，所述单元包括壳体，石英音叉谐振器和盖子，所述谐振器具有音叉基座，以及第一和第二音叉尖齿，所述第一和第二音叉尖端中的每一个具有第一 与第一侧面相对的第二侧面，与第二音叉齿的第二侧面相对的第一音叉尖的第一侧面; 具有多个表面的至少一个凹槽包括第一表面，所述第一表面形成在所述第一和第二音叉齿中的每一个的第一和第二主表面中的至少一个中，使得仅所述至少一个凹槽的所述第一表面直接相对 相应的音叉齿的第一侧表面和至少一个凹槽的宽度大于或等于从至少一个凹槽的外边缘测量的至少一个凹槽的宽度方向上的距离， 第一和第二音叉尖齿中相应的一个的外边缘小于0.07mm。

公开(公告)号：US09203135B2

公开(公告)日：2015-12-01

申请号：US14051966

申请日：2013-10-11

申请人： PIEDEK TECHNICAL LABORATORY

发明人： Hirofumi Kawashima

IPC分类号： H04R17/00 ,  H01P11/00 ,  H03B5/36 ,  H03H9/05 ,  H03H9/10 ,  H03H9/215 ,  H03H3/04

CPC分类号： H01P11/008 ,  H03B5/36 ,  H03H9/0547 ,  H03H9/1021 ,  H03H9/215 ,  H03H2003/0492 ,  H04R17/00 ,  Y10T29/42

摘要： In a method for manufacturing a quartz crystal resonator, the method comprising the steps of: forming a quartz crystal tuning fork resonator having a quartz crystal tuning fork base, and first and second quartz crystal tuning fork tines; forming at least one groove in at least one of opposite main surfaces of each of the first and second quartz crystal tuning fork tines so that a width of the at least one groove is greater than a distance in the width direction of the at least one groove measured from an outer edge of the at least one groove to an outer edge of the corresponding one of the first and second quartz crystal tuning fork tines; and forming a metal film on at least one of the opposite main surfaces of the first and second quartz crystal tuning fork tines so that an oscillation frequency of the quartz crystal tuning fork resonator is lower than 32.768 kHz.

摘要翻译： 在制造石英晶体谐振器的方法中，该方法包括以下步骤：形成具有石英晶体音叉基座的石英音叉谐振器，以及第一和第二石英晶体音叉; 在所述第一和第二石英音叉齿中的每一个的至少一个相对的主表面中形成至少一个凹槽，使得所述至少一个凹槽的宽度大于所述至少一个凹槽的宽度方向上的距离 从所述至少一个凹槽的外边缘到所述第一和第二石英晶体音叉中的对应的一个的外边缘测量; 并且在所述第一和第二石英音叉叉齿的至少一个相对的主表面上形成金属膜，使得所述石英音叉谐振器的振荡频率低于32.768kHz。

公开(公告)号：US08918971B2

公开(公告)日：2014-12-30

申请号：US13177898

申请日：2011-07-07

申请人： Junya Fukuda

发明人： Junya Fukuda

IPC分类号： H01L21/52 ,  H03H3/02 ,  H01L21/78 ,  H01L21/50 ,  H03H3/04 ,  H03H9/10 ,  H01L27/146 ,  H01L51/56 ,  H01L23/055 ,  H03H9/21 ,  H03H9/24

CPC分类号： H01L21/52 ,  H01L21/50 ,  H01L21/78 ,  H01L23/055 ,  H01L27/14618 ,  H01L27/14632 ,  H01L51/56 ,  H01L2224/13 ,  H03H3/02 ,  H03H3/04 ,  H03H9/1021 ,  H03H9/21 ,  H03H9/2494 ,  H03H2003/026 ,  H03H2003/0492 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49126 ,  Y10T29/49798

摘要： A method of manufacturing packages having contents sealed therein, including: a step of forming cavities in a plurality of package forming areas on a first wafer; a step of bonding the first wafer and a second wafer while arranging the contents in the cavities; and a step of irradiating a bonded wafer member with a laser and separating the packages into pieces, characterized in that dummy cavities are formed on an outside of the package forming area in an outermost periphery of the first wafer in the cavity forming step.

摘要翻译： 一种制造密封在其中的内容物的方法，包括：在第一晶片上的多个封装形成区域中形成空腔的步骤; 在将所述内容物排列在所述空腔中的同时，接合所述第一晶片和第二晶片的步骤; 以及利用激光照射接合的晶片构件并将封装分离成片的步骤，其特征在于，在所述空腔形成步骤中，在所述第一晶片的最外周的所述封装形成区域的外侧形成虚设空腔。

公开(公告)号：US08633775B2

公开(公告)日：2014-01-21

申请号：US13035519

申请日：2011-02-25

申请人： Yumi Yamaguchi ,  Kazuyoshi Sugama

发明人： Yumi Yamaguchi ,  Kazuyoshi Sugama

IPC分类号： H03H9/24 ,  H01L41/053 ,  H03B5/32

CPC分类号： H03H3/04 ,  H03H9/1021 ,  H03H9/215 ,  H03H2003/026 ,  H03H2003/0492

摘要： Provided is a method of manufacturing a piezoelectric vibrator of the invention, the piezoelectric vibrator including a tuning fork type piezoelectric vibrating reed including a pair of vibration arm portions, a package that accommodates the piezoelectric vibrating reed, and a pair of regulation films that is formed along a longitudinal direction of the vibration arm portions corresponding to each of the pair of vibration arm portions, the piezoelectric vibrator being capable of regulating a degree of vacuum in the package more than a certain level by irradiating the regulation films with a laser to evaporate a part of the regulation films. The method includes a gettering process of irradiating a laser in symmetrical positions via a center axis of the pair of vibration arm portions in the pair of regulation films.

摘要翻译： 提供本发明的压电振动器的制造方法，所述压电振子包括具有一对振动臂部的音叉型压电振动片，容纳所述压电振动片的封装以及形成的一对调节膜 沿着与所述一对振动臂部中的每一个对应的振动臂部的纵向方向，压电振动器能够通过用激光照射调节膜来将包装中的真空度调节到一定程度以上，从而蒸发 部分调节膜。 该方法包括通过一对调节膜中的一对振动臂部的中心轴在对称位置照射激光的吸气处理。

公开(公告)号：US08436515B2

公开(公告)日：2013-05-07

申请号：US12842643

申请日：2010-07-23

申请人： Junya Fukuda

发明人： Junya Fukuda

IPC分类号： H01L41/053

CPC分类号： H03H3/04 ,  G04F5/063 ,  G04R20/10 ,  H03H9/1021 ,  H03H9/21 ,  H03H2003/026 ,  H03H2003/0492 ,  Y10T29/42

摘要： Provide a highly efficient manufacturing method of a piezoelectric vibrator and to provide a piezoelectric vibrator manufactured by this manufacturing method. A method for manufacturing a piezoelectric vibrator 1 including: a base board 2 and a lid board 3 which are superimposed on each other so as to form a cavity therebetween; a piezoelectric vibrating reed 4 which is accommodated in the cavity and bonded to the base board; a bonding film 35 which is formed on the entire surface of the lid board on the opposite side to the base board so as to bond both boards to each other at a portion thereof being in contact with the base board, wherein the piezoelectric vibrating reed includes a pair of vibrating arms 10 and 11 and a weight metal film 21 formed on a tip end of each of the vibrating arms, wherein the bonding film is formed of a material which is capable of absorbing surrounding gas by being activated with laser irradiation, and wherein the method includes a laser irradiation step of simultaneously irradiating the weight metal film and the bonding film with a laser beam.

摘要翻译： 提供压电振动器的高效制造方法，并提供通过该制造方法制造的压电振动器。 一种制造压电振动器1的方法，包括：基板2和盖板3，它们彼此重叠以在它们之间形成空腔; 压电振动片4，其容纳在空腔中并结合到基板; 接合膜35，其形成在与基板相反的一侧的盖板的整个表面上，以便在与基板接触的部分处将两个板彼此接合，其中压电振动片包括 一对振动臂10和11以及形成在每个振动臂的前端的重量金属膜21，其中接合膜由能够通过激光照射激活而吸收周围气体的材料形成;以及 其特征在于，所述方法包括用激光束同时照射所述重量金属膜和所述接合膜的激光照射工序。

公开(公告)号：US08330560B2

公开(公告)日：2012-12-11

申请号：US12452655

申请日：2008-07-23

申请人： Hideryo Matsudo

发明人： Hideryo Matsudo

IPC分类号： H03H9/02 ,  H01L41/08

CPC分类号： H03H9/215 ,  H03H3/04 ,  H03H9/0519 ,  H03H2003/0478 ,  H03H2003/0492

摘要： The invention relates to a tuning-fork type crystal resonator in which the frequency adjustment accuracy is increased, and a frequency adjustment method thereof. In a tuning-fork type crystal resonator having a tuning-fork shaped piece of quartz crystal in which a pair of tuning fork arms extend from a tuning fork base, and a frequency adjustment method thereof, there is provided a first frequency adjustment step for adjusting an oscillation frequency by forming inclined surfaces spanning from outer peripheral surfaces surrounding the pair of tuning fork arms toward distal end surfaces, by using a femtosecond laser irradiated in a direction from the outer peripheral surfaces toward the distal end surfaces, or in a direction from the distal end surfaces toward the outer peripheral surfaces.

摘要翻译： 本发明涉及一种频率调节精度提高的音叉型晶体谐振器及其频率调节方法。 在具有音叉形状的石英晶片的音叉型晶体谐振器中，其中一对音叉臂从音叉基座延伸，并且其频率调节方法设置有第一频率调节步骤，用于调节 通过使用从外周表面朝向远端表面的方向照射的飞秒激光，或者沿着从所述远端表面的方向照射的飞秒激光，通过形成从包围所述一对音叉臂的外周表面朝向远端表面的倾斜表面的振荡频率 远端面朝向外周面。

公开(公告)号：US08122587B2

公开(公告)日：2012-02-28

申请号：US12386297

申请日：2009-04-16

申请人： Hirofumi Kawashima

发明人： Hirofumi Kawashima

IPC分类号： H04R31/00

CPC分类号： H03B5/32 ,  H03H3/02 ,  H03H9/0547 ,  H03H9/1021 ,  H03H9/21 ,  H03H9/215 ,  H03H2003/026 ,  H03H2003/0492 ,  H04R17/00 ,  H04R31/00 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/4908 ,  Y10T29/49133 ,  Y10T29/49135

摘要： A method for manufacturing a quartz crystal unit comprises the steps of adjusting an oscillation frequency of a quartz crystal tuning fork resonator that is vibratable in a flexural mode of an inverse phrase and that has first and second quartz crystal tuning fork tines, forming at least one groove in each of two of opposite main surfaces of each of first and second quartz crystal tuning fork tines, disposing an electrode on a surface of the at least one groove formed in each of two of the opposite main surfaces and each of two of opposite side surfaces of each of the first and second quartz crystal tuning fork tines so that the electrodes of the grooves of the first quartz crystal tuning fork tine are connected to the electrodes of the side surfaces of the second quartz crystal tuning fork tine and the electrodes of the grooves of the second quartz crystal tuning fork tine are connected to the electrodes of the side surfaces of the first quartz crystal tuning fork tine, the quartz crystal tuning fork resonator having a series resistance R1 of a fundamental mode of vibration less than a series resistance R2 of a second overtone mode of vibration, mounting the quartz crystal tuning fork resonator on a mounting portion of a case, and connecting a lid to the case to cover an open end of the case.

摘要翻译： 一种制造石英晶体单元的方法包括以下步骤：调节以相反短语的弯曲模式振动的石英晶体音叉谐振器的振荡频率，并且具有第一和第二石英晶体音叉，形成至少一个 在第一和第二石英晶体叉齿中的每一个的两个相对的主表面中的每一个中的凹槽中，将电极设置在形成在两个相对主表面中的每一个中的至少一个凹槽的表面上，并且两个相对侧中的每一个 第一和第二石英晶体音叉中的每一个的表面叉齿，使得第一石英晶体音叉齿的槽的电极连接到第二石英晶体音叉的侧面的电极和 第二石英晶体音叉的沟槽连接到第一石英晶体音叉的侧表面的电极，石英晶体 具有基本振动模式的串联电阻R1​​小于第二泛音振动模式的串联电阻R2的固定音叉谐振器，将石英音叉谐振器安装在壳体的安装部分上，并将盖连接到 案件覆盖案件的开放端。

公开(公告)号：US20110223363A1

公开(公告)日：2011-09-15

申请号：US13113433

申请日：2011-05-23

申请人： Takeshi Sugiyama

发明人： Takeshi Sugiyama

IPC分类号： B32B1/02 ,  B65B1/04

CPC分类号： H03H3/04 ,  H01L23/055 ,  H01L2924/0002 ,  H03H9/1021 ,  H03H9/215 ,  H03H2003/026 ,  H03H2003/0492 ,  Y10T428/13 ,  H01L2924/00

摘要： A wafer is provided that is stacked on and anodically bonded to another wafer to form a plurality of package products each having a cavity in which an operation piece is contained between the wafers. In a portion of the wafer located inward with respect to the outer circumference of a product area in which a plurality of concave portions are formed each of which will be part of the cavity when stacked on the another wafer, a depressed area or through hole is formed having a plane area larger than that of one of the concave portions.

摘要翻译： 提供晶片，其堆叠在其上并阳极结合到另一个晶片，以形成多个封装产品，每个封装产品具有在晶片之间容纳操作件的空腔。 在晶片的位于其中形成多个凹部的产品区域的外周的内部的部分中，当堆叠在另一个晶片上时，其中的每一个将成为空腔的一部分，凹陷区域或通孔是 形成为具有大于其中一个凹部的平面面积的平面面积。

公开(公告)号：US20110204985A1

公开(公告)日：2011-08-25

申请号：US13030449

申请日：2011-02-18

申请人： Akinori YAMADA ,  Shuhei YOSHIDA

发明人： Akinori YAMADA ,  Shuhei YOSHIDA

IPC分类号： H03B5/32

CPC分类号： H01L41/02 ,  A63F13/08 ,  A63F2300/204 ,  G04F5/06 ,  G06F1/1616 ,  H03B28/00 ,  H03H3/02 ,  H03H9/19 ,  H03H9/215 ,  H03H2003/026 ,  H03H2003/0492

摘要： A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference.

摘要翻译： 提供了能够改善耐冲击性的谐振元件。 石英晶体振子元件是通过蚀刻相对于石英晶体的晶轴以预定角度切割的Z板形成的谐振器元件。 石英晶体振子元件包括基座，从基座沿Y轴方向延伸的一对谐振臂，以及在X轴方向上开槽基部形成的正X轴槽口和负X轴槽口 。 正X轴槽口通过从X轴的负侧朝向正侧切开基座而形成，使得正X轴槽口的宽度随着接近外圆周而增加。

公开(公告)号：US20110191996A1

公开(公告)日：2011-08-11

申请号：US13066422

申请日：2011-04-14

申请人： Hirofumi Kawashima

发明人： Hirofumi Kawashima

IPC分类号： H01L41/22

CPC分类号： H03H9/215 ,  H03B5/36 ,  H03H9/0547 ,  H03H9/1021 ,  H03H2003/0492 ,  H04R17/00 ,  Y10T29/42 ,  Y10T29/43 ,  Y10T29/435 ,  Y10T29/49002 ,  Y10T29/49004 ,  Y10T29/49005 ,  Y10T29/4913 ,  Y10T29/49155 ,  Y10T29/49156 ,  Y10T29/49169

摘要： A method for manufacturing a quartz crystal unit comprises the steps of disposing at least one metal film on each of two opposite surfaces of a quartz crystal wafer, disposing a resist on the at least one metal film, etching the quartz crystal wafer to form a quartz crystal tuning fork resonator having a quartz crystal tuning fork base, and first and second quartz crystal tuning fork tines, forming an electrode on each of two opposite side surfaces of each of the first and second quartz crystal tuning fork tines so that the quartz crystal tuning fork resonator vibrates in a flexural mode of an inverse phase, removing the resist disposed on the at least one metal film before the forming step of the electrode, mounting the quartz crystal tuning fork resonator on a mounting portion of a case by a conductive adhesive or a solder, and adjusting an oscillation frequency of the quartz crystal tuning fork resonator after the mounting step.

摘要翻译： 一种制造石英晶体单元的方法包括以下步骤：在石英晶片的两个相对表面的每一个上设置至少一个金属膜，在至少一个金属膜上设置抗蚀剂，蚀刻石英晶片以形成石英 具有石英音叉基座的晶体音叉谐振器，以及第一和第二石英晶体音叉齿，在第一和第二石英晶体音叉的每个的两个相对的侧表面中的每一个上形成电极，使得石英晶体调谐 叉谐振器以反相的弯曲模式振动，在电极的形成步骤之前去除设置在至少一个金属膜上的抗蚀剂，通过导电粘合剂将石英晶体音叉谐振器安装在壳体的安装部分上，或 并且在安装步骤之后调整石英音叉谐振器的振荡频率。