HERMETIC PACKAGE DEVICE AND DEVICE MODULE
    2.
    发明公开

    公开(公告)号:US20240178247A1

    公开(公告)日:2024-05-30

    申请号:US18551178

    申请日:2021-05-12

    IPC分类号: H01L27/146

    CPC分类号: H01L27/14618

    摘要: A hermetic package device comprises a device wafer in which a semiconductor circuit and bonding pads are provided on a mounting surface, a lid wafer arranged to be opposed to the device wafer, and a sealing part that forms an hermetically sealed space in a vacuum atmosphere to house the semiconductor circuit between the device wafer and the lid wafer. A second installation region in which the bonding pads are provided in the mounting surface protrudes relative to the lid wafer, and an outer surface of a portion in the sealing part facing the second installation region is inclined such that a position thereon approaches the second installation region when getting closer from the device wafer toward the lid wafer.