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公开(公告)号：US10669630B2
公开(公告)日：2020-06-02
申请号：US14770793
申请日：2014-02-21
发明人： Nozomu Hattori , Naomasa Miyatake , Yasunari Mori
IPC分类号： C23C16/44 , C23C16/455 , H01J37/32 , C23C16/54
摘要： A layer-forming device includes a feeding mechanism that feeds a substrate during layer formation, an injector unit having a plurality of injectors that supplies a layer-forming gas to the substrate, along a feeding passage of the substrate, and a reactant supply unit which generates a reactant. The injector unit supplies the reactant through gaps between the injectors to a layer of the layer-forming component. A substrate opposing surface of the injector includes a layer-forming gas supply slot through which the layer-forming gas is output, first gas exhaust slots that suck an excess gas such as the layer-forming gas, the first gas exhaust slots being provided on both sides of the layer-forming gas supply slot in a feeding direction of the substrate, and inert gas supply slots that supply an inert gas provided on far sides of the respective first gas exhaust slots away from the layer-forming gas supply slot.
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公开(公告)号：US10246776B2
公开(公告)日：2019-04-02
申请号：US14770782
申请日：2014-02-21
发明人： Yasunari Mori , Naomasa Miyatake , Nozomu Hattori
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306 , C23C16/455 , H01J37/32 , C23C16/54
摘要： A layer-forming device that enables highly efficient layer formation and has a simplified configuration includes: a substrate feeding mechanism; a plasma-generating electrode; a space-partitioning wall; and a plurality of injectors. The plasma-generating electrode faces towards a feeding pathway of the substrate, and generates plasma using a reactive gas upon a supply of electric power. The space-partitioning wall is disposed between the feeding pathway and the plasma-generating electrode. A plurality of slit-shaped through-holes, through which radicals, ions generated from the plasma, or a portion of the plasma can pass, are formed at predetermined intervals in the space-partitioning wall. The plurality of injectors are sandwiched between the space-partitioning wall and the feeding pathway, such that each of the injectors is sandwiched between two adjacent through-holes from both sides of the two through-holes in the feeding direction, and the layer-forming gas is supplied toward the substrate through a layer-forming gas supply port.
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公开(公告)号：US20180246148A1
公开(公告)日：2018-08-30
申请号：US15842740
申请日：2017-12-14
发明人： Yasunari Mori
CPC分类号： G01R19/04 , G01R23/02 , G01S13/34 , G01S13/426 , G01S13/888 , G01S13/89 , G01S2007/356
摘要： A data processing method and a measurement device is provided in which an electromagnetic wave radiates toward an object to be measured and measurement data obtained by measuring reflected wave of the electromagnetic wave reflected from the object to be measured is processed. First processing data S(kx, ky, ω) is acquired by performing discrete Fourier transform (DFT) relating to an x-coordinate component and a y-coordinate component on measurement data s(x′, y′, ω). Then, an angular frequency ω is converted into a kz component after extending a range from which a ky component can vary, thereby calculating second processing data S′(kx, ky, kz). Then, the second processing data is subjected to inverse Fourier transform to calculate data f(x, y, z) of reflexibility of the object to be measured. In the extension of the ky component, local maximum value processing and a process of suppressing generation of an aliasing component using a ratio are performed.
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公开(公告)号：US09746555B2
公开(公告)日：2017-08-29
申请号：US14534978
申请日：2014-11-06
发明人： Yasunari Mori , Kyouji Doi , Takayoshi Yumii , Yumi Asano
摘要： The planar antenna has a dielectric substrate; an antenna main body portion including first and second antenna elements on first and second sides, respectively, of the dielectric substrate and functioning as a balanced antenna; a signal line portion including first and second feed lines on the first and second sides, respectively, and a coplanar line on the first side and formed by a signal line and the first ground conductors, the signal line connected to the first feed line; a second ground conductor on the second side and connected to the second feed line; and via holes connecting the first ground conductors to the second ground conductor provided at ends of edges of the first ground conductors facing the end of the signal line where the signal line connects to the first feed line, to allow the first and second feed lines to function as balanced transmission lines.
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