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公开(公告)号：US08323519B2
公开(公告)日：2012-12-04
申请号：US12142541
申请日：2008-06-19
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645
摘要： A method for manufacturing a liquid discharge head including a flow path forming member to form a flow path communicating with a discharge port for discharging liquids includes forming an organic material layer on a substrate, applying a soluble resin on the organic material layer to form a resin layer, patterning the resin layer to form a pattern with a shape of the flow path, forming a cover layer as the flow path forming member on the pattern, forming the discharge port to expose a part of the pattern from the cover layer, eluting the pattern from the discharge port to form the flow path, irradiating a substance sticking to a surface of the flow path forming member on which the discharge port is formed with ultraviolet light, wherein the substance contains at least the organic material, and removing the sticking substance.
摘要翻译： 一种液体排出头的制造方法，包括流路形成部件，以形成与排出液体的排出口连通的流路，包括在基板上形成有机材料层，在有机材料层上涂布可溶性树脂，形成树脂 层，图案化树脂层以形成具有流动路径形状的图案，在图案上形成作为流路形成构件的覆盖层，形成排出口以从覆盖层暴露部分图案，洗脱 从排出口形成图案以形成流路，用紫外线照射粘附到形成有排出口的流路形成部件的表面的物质，其中该物质至少含有有机材料，并除去粘着物质 。
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公开(公告)号：US20080317971A1
公开(公告)日：2008-12-25
申请号：US12142541
申请日：2008-06-19
IPC分类号： C08J7/18
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645
摘要： A method for manufacturing a liquid discharge head including a flow path forming member to form a flow path communicating with a discharge port for discharging liquids includes forming an organic material layer on a substrate, applying a soluble resin on the organic material layer to form a resin layer, patterning the resin layer to form a pattern with a shape of the flow path, forming a cover layer as the flow path forming member on the pattern, forming the discharge port to expose a part of the pattern from the cover layer, eluting the pattern from the discharge port to form the flow path, irradiating a substance sticking to a surface of the flow path forming member on which the discharge port is formed with ultraviolet light, wherein the substance contains at least the organic material, and removing the sticking substance.
摘要翻译： 一种液体排出头的制造方法，包括流路形成部件，以形成与排出液体的排出口连通的流路，包括在基板上形成有机材料层，在有机材料层上涂布可溶性树脂，形成树脂 层，图案化树脂层以形成具有流动路径形状的图案，在图案上形成作为流路形成构件的覆盖层，形成排出口以从覆盖层露出图案的一部分， 从排出口形成图案以形成流路，用紫外线照射粘附到形成有排出口的流路形成部件的表面的物质，其中该物质至少含有有机材料，并除去粘着物质 。
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公开(公告)号：US20090225136A1
公开(公告)日：2009-09-10
申请号：US12394939
申请日：2009-02-27
申请人： Kenji Fujii , Yoshinori Tagawa , Hiroyuki Murayama , Taichi Yonemoto , Mitsunori Toshishige , Keiji Watanabe
发明人： Kenji Fujii , Yoshinori Tagawa , Hiroyuki Murayama , Taichi Yonemoto , Mitsunori Toshishige , Keiji Watanabe
CPC分类号： B41J2/1404 , B41J2/14129 , B41J2/14145 , B41J2002/14403 , B41J2202/11
摘要： An ink jet recording head includes an ejection outlet for ejecting ink; an energy generating element, provided on a silicon substrate, for generating energy for ejecting the ink from the ejection outlet; an ink flow passage, provided correspondingly to the energy generating element, communicating with the ejection outlet; a through hole passing through the silicon substrate; and an ink supply port for supplying the ink supplied into the through hole to the ink flow passage. The ink supply port is formed with an extended member which contacts a bottom of a flow passage wall constituting the ink flow passage and extends into an opening of the through hole.
摘要翻译： 喷墨记录头包括用于喷射墨的喷射出口; 设置在硅基板上的能量产生元件，用于产生用于从喷射出口喷射墨水的能量; 相对于所述能量产生元件设置的与所述喷射出口连通的油墨流动通道; 穿过硅衬底的通孔; 以及用于将供应到通孔中的墨水供应到墨水流动通道的供墨口。 供墨口形成有延伸构件，该延伸构件接触构成油墨流动通道的流动通道壁的底部并延伸到通孔的开口中。
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公开(公告)号：US20100147793A1
公开(公告)日：2010-06-17
申请号：US12635083
申请日：2009-12-10
申请人： Tadanobu Nagami , Junichi Kobayashi , Takeshi Terada , Makoto Watanabe , Hiroyuki Abo , Mitsunori Toshishige , Yoshinori Tagawa , Shuji Koyama , Kenji Fujii , Masaki Ohsumi , Jun Yamamuro , Hiroyuki Murayama , Yoshinobu Urayama , Taichi Yonemoto
发明人： Tadanobu Nagami , Junichi Kobayashi , Takeshi Terada , Makoto Watanabe , Hiroyuki Abo , Mitsunori Toshishige , Yoshinori Tagawa , Shuji Koyama , Kenji Fujii , Masaki Ohsumi , Jun Yamamuro , Hiroyuki Murayama , Yoshinobu Urayama , Taichi Yonemoto
IPC分类号： G11B5/127
CPC分类号： B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1639 , Y10T29/49401
摘要： The present invention provides a method for producing a liquid discharge head including a silicon substrate having, on a first surface, energy generating elements, and a supply port penetrating the substrate from the first surface to a second surface, which is a rear surface of the first surface of the substrate. The method includes the steps of: preparing the silicon substrate having a sacrifice layer at a portion on the first surface where the ink supply port is to be formed and an etching mask layer having a plurality of openings on the second surface, the volume of a portion of the sacrifice layer at a position corresponding to a portion between two adjacent said openings being smaller than the volume of a portion of the sacrifice layer at a position corresponding to the opening; etching the silicon substrate from the plurality of openings and etching the sacrifice layer.
摘要翻译： 本发明提供了一种液体排出头的制造方法，该液体排出头包括硅基板，该第一表面在第一表面上具有能量产生元件和从第一表面穿过该基板的供给口， 基片的第一表面。 该方法包括以下步骤：在要形成供墨口的第一表面上的一部分制备具有牺牲层的硅衬底和在第二表面上具有多个开口的蚀刻掩模层， 牺牲层的与相邻的两个开口之间的部分相对应的位置处的部分比对应于开口的位置处的牺牲层的一部分的体积小; 从多个开口蚀刻硅衬底并蚀刻牺牲层。
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公开(公告)号：US08329047B2
公开(公告)日：2012-12-11
申请号：US12635083
申请日：2009-12-10
申请人： Tadanobu Nagami , Junichi Kobayashi , Takeshi Terada , Makoto Watanabe , Hiroyuki Abo , Mitsunori Toshishige , Yoshinori Tagawa , Shuji Koyama , Kenji Fujii , Masaki Ohsumi , Jun Yamamuro , Hiroyuki Murayama , Yoshinobu Urayama , Taichi Yonemoto
发明人： Tadanobu Nagami , Junichi Kobayashi , Takeshi Terada , Makoto Watanabe , Hiroyuki Abo , Mitsunori Toshishige , Yoshinori Tagawa , Shuji Koyama , Kenji Fujii , Masaki Ohsumi , Jun Yamamuro , Hiroyuki Murayama , Yoshinobu Urayama , Taichi Yonemoto
IPC分类号： G01D15/00
CPC分类号： B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1639 , Y10T29/49401
摘要： The present invention provides a method for producing a liquid discharge head including a silicon substrate having, on a first surface, energy generating elements, and a supply port penetrating the substrate from the first surface to a second surface, which is a rear surface of the first surface of the substrate. The method includes the steps of: preparing the silicon substrate having a sacrifice layer at a portion on the first surface where the ink supply port is to be formed and an etching mask layer having a plurality of openings on the second surface, the volume of a portion of the sacrifice layer at a position corresponding to a portion between two adjacent said openings being smaller than the volume of a portion of the sacrifice layer at a position corresponding to the opening; etching the silicon substrate from the plurality of openings and etching the sacrifice layer.
摘要翻译： 本发明提供了一种液体排出头的制造方法，该液体排出头包括硅基板，该第一表面在第一表面上具有能量产生元件和从第一表面穿过该基板的供给口， 基片的第一表面。 该方法包括以下步骤：在要形成供墨口的第一表面上的一部分制备具有牺牲层的硅衬底和在第二表面上具有多个开口的蚀刻掩模层， 牺牲层的与相邻的两个开口之间的部分相对应的位置处的部分比对应于开口的位置处的牺牲层的一部分的体积小; 从多个开口蚀刻硅衬底并蚀刻牺牲层。
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公开(公告)号：US08047632B2
公开(公告)日：2011-11-01
申请号：US12394939
申请日：2009-02-27
申请人： Kenji Fujii , Yoshinori Tagawa , Hiroyuki Murayama , Taichi Yonemoto , Mitsunori Toshishige , Keiji Watanabe
发明人： Kenji Fujii , Yoshinori Tagawa , Hiroyuki Murayama , Taichi Yonemoto , Mitsunori Toshishige , Keiji Watanabe
CPC分类号： B41J2/1404 , B41J2/14129 , B41J2/14145 , B41J2002/14403 , B41J2202/11
摘要： An ink jet recording head includes an ejection outlet for ejecting ink; an energy generating element, provided on a silicon substrate, for generating energy for ejecting the ink from the ejection outlet; an ink flow passage, provided correspondingly to the energy generating element, communicating with the ejection outlet; a through hole passing through the silicon substrate; and an ink supply port for supplying the ink supplied into the through hole to the ink flow passage. The ink supply port is formed with an extended member which contacts a bottom of a flow passage wall constituting the ink flow passage and extends into an opening of the through hole.
摘要翻译： 喷墨记录头包括用于喷射墨的喷射出口; 设置在硅基板上的能量产生元件，用于产生用于从喷射出口喷射墨水的能量; 相对于所述能量产生元件设置的与所述喷射出口连通的油墨流动通道; 穿过硅衬底的通孔; 以及用于将供应到通孔中的墨水供应到墨水流动通道的供墨口。 供墨口形成有延伸构件，该延伸构件接触构成油墨流动通道的流动通道壁的底部并延伸到通孔的开口中。
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公开(公告)号：US20090007428A1
公开(公告)日：2009-01-08
申请号：US12145428
申请日：2008-06-24
申请人： Taichi Yonemoto , Junichi Kobayashi , Yoshinori Tagawa , Hideo Tamura , Hiroyuki Murayama , Kenji Fujii , Keiji Watanabe
发明人： Taichi Yonemoto , Junichi Kobayashi , Yoshinori Tagawa , Hideo Tamura , Hiroyuki Murayama , Kenji Fujii , Keiji Watanabe
IPC分类号： B21D53/76
CPC分类号： B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1645 , B41J2002/14475 , Y10T29/42 , Y10T29/49401
摘要： A method of manufacturing a liquid discharge head including a plurality of passages on a substrate, the passages communicating with a plurality of discharge ports configured to discharge liquid. The method includes the step of forming first to fourth patterns, the first pattern having a shape of one passage of the passages, the second pattern having a shape of other passage of the passages, the third pattern being formed near the first pattern, the fourth pattern being formed near the second pattern, the first to fourth patterns being formed on the substrate. The method also includes coating the substrate with a cover layer covering the first to fourth patterns, removing the first pattern to form the one passage, and removing the second pattern to form the other passage.
摘要翻译： 一种制造在基板上具有多个通道的排液头的方法，所述通道与多个配置成排出液体的排出口连通。 该方法包括形成第一至第四图案的步骤，第一图案具有通道的一个通道的形状，第二图案具有通道的另一通道的形状，第三图案形成在第一图案附近，第四图案 图案形成在第二图案附近，第一至第四图案形成在基板上。 该方法还包括用覆盖第一至第四图案的覆盖层涂覆基板，移除第一图案以形成一个通道，以及移除第二图案以形成另一通道。
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公开(公告)号：US08091233B2
公开(公告)日：2012-01-10
申请号：US12145428
申请日：2008-06-24
申请人： Taichi Yonemoto , Junichi Kobayashi , Yoshinori Tagawa , Hideo Tamura , Hiroyuki Murayama , Kenji Fujii , Keiji Watanabe
发明人： Taichi Yonemoto , Junichi Kobayashi , Yoshinori Tagawa , Hideo Tamura , Hiroyuki Murayama , Kenji Fujii , Keiji Watanabe
CPC分类号： B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1645 , B41J2002/14475 , Y10T29/42 , Y10T29/49401
摘要： A method of manufacturing a liquid discharge head including a plurality of passages on a substrate, the passages communicating with a plurality of discharge ports configured to discharge liquid. The method includes the step of forming first, second, third, and fourth members, the first member having a shape of one passage, the second member having a shape of another member, the third member being formed near the first member, the fourth member being formed near the second member, the first to fourth members being formed on a surface of the substrate. The method also includes coating the substrate with a cover layer covering the first to fourth members, removing the first member to form the one passage, and removing the second member to form the another passage.
摘要翻译： 一种制造在基板上具有多个通道的排液头的方法，所述通道与多个配置成排出液体的排出口连通。 该方法包括形成第一，第二，第三和第四构件的步骤，第一构件具有一个通道的形状，第二构件具有另一构件的形状，第三构件形成在第一构件附近，第四构件 在第二构件附近形成，第一至第四构件形成在基板的表面上。 该方法还包括用覆盖第一至第四构件的覆盖层涂覆基板，移除第一构件以形成一个通道，并且移除第二构件以形成另一通道。
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公开(公告)号：US08148049B2
公开(公告)日：2012-04-03
申请号：US11680821
申请日：2007-03-01
申请人： Hiroyuki Murayama , Junichi Kobayashi , Yoshinori Tagawa , Kenji Fujii , Hideo Tamura , Taichi Yonemoto , Keiji Watanabe
发明人： Hiroyuki Murayama , Junichi Kobayashi , Yoshinori Tagawa , Kenji Fujii , Hideo Tamura , Taichi Yonemoto , Keiji Watanabe
IPC分类号： G03C5/00
CPC分类号： B41J2/1604 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1639 , B41J2/1645 , B41J2002/14475
摘要： A manufacturing method of an ink jet recording head includes steps of forming a liquid flow path mold material of a soluble resin on a substrate on which an energy generating element is formed, the energy generating element being configured to generate energy for use in discharging ink; forming a coating resin layer of a negative photosensitive resin on the substrate on which the mold material is formed; exposing and developing the coating resin layer to form an ink discharge port in the coating resin layer; and dissolving and removing the mold material to form a liquid flow path. During the exposing of the coating resin layer, a total amount of exposure energy per unit area applied to an exposure region other than a region of the coating resin layer positioned above the mold material is greater than that of exposure energy per unit area applied to the region of the coating resin layer positioned above the mold material.
摘要翻译： 喷墨记录头的制造方法包括以下步骤：在其上形成有能量产生元件的基板上形成可溶性树脂的液体流路模具材料，所述能量产生元件被配置为产生用于排出墨水的能量; 在其上形成有模具材料的基板上形成负型感光性树脂的涂布树脂层; 曝光和显影涂层树脂层以在涂布树脂层中形成墨水排出口; 并溶解和去除模具材料以形成液体流动路径。 在涂布树脂层的曝光期间，施加到位于模具材料上方的涂布树脂层以外的曝光区域的单位面积的曝光能量的总量大于施加到模具材料的每单位面积的曝光能量的总量 涂覆树脂层的位于模具材料上方的区域。
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公开(公告)号：US20070252872A1
公开(公告)日：2007-11-01
申请号：US11738782
申请日：2007-04-23
申请人： Kenji Fujii , Junichi Kobayashi , Yoshinori Tagawa , Hideo Tamura , Hiroyuki Murayama , Keiji Watanabe , Taichi Yonemoto , Isamu Horiuchi , Aya Yoshihira , Masamichi Yoshinari , Jun Kawai , Tamaki Sato
发明人： Kenji Fujii , Junichi Kobayashi , Yoshinori Tagawa , Hideo Tamura , Hiroyuki Murayama , Keiji Watanabe , Taichi Yonemoto , Isamu Horiuchi , Aya Yoshihira , Masamichi Yoshinari , Jun Kawai , Tamaki Sato
IPC分类号： B41J2/05
CPC分类号： B41J2/1603 , B41J2/1404 , B41J2/1629 , B41J2/1631 , B41J2/1635 , B41J2/1639 , B41J2/1645 , B41J2002/14403 , Y10T29/49401
摘要： The ink jet head producing method includes: forming a first flow path forming member in a portion constituting a flow path side wall, which constitutes at least a partitioning portion between flow paths on a substrate; forming a pattern as a mold for the flow path; wherein the pattern is formed over the substrate and a portion of the first flow path forming member, constituting a flow path side wall, and a portion constituting the flow path side wall is covered with the pattern and another portion is not covered with the pattern; forming a second flow path forming member on the first flow path forming member and the pattern; wherein the second flow path forming member is formed by a material corresponding to the first flow path forming member; forming the discharge port in the second flow path forming member; and forming the flow path by removing the pattern.
摘要翻译： 喷墨头的制造方法包括：在构成流路侧壁的部分上形成第一流路形成部件，其至少构成在基板上的流路之间的分隔部; 形成作为流路的模具的图案; 其中所述图案形成在所述基板上，并且构成流路侧壁的所述第一流路形成部件的一部分和构成所述流路侧壁的部分被所述图案覆盖，并且所述另一部分未被所述图案覆盖; 在第一流路形成构件和图案上形成第二流路形成构件; 其中所述第二流路形成部件由与所述第一流路形成部件对应的材料形成; 在第二流路形成构件中形成排出口; 并通过去除图案形成流路。
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