公开(公告)号：US10444004B2

公开(公告)日：2019-10-15

申请号：US15782683

申请日：2017-10-12

申请人： Mitutoyo Corporation

发明人： Kazuhiko Kawasaki

IPC分类号： G01B9/02

摘要： The phase shift interferometer is configured to measure the shapes of measurement objects by acquiring a plurality of images of interference fringes while shifting the phases of the interference fringes. The interference fringes are provided with a phase difference of 90° relative to each other utilizing polarization of light. Images of the interference fringes are captured by two respective cameras while, in accordance with a conventional phase shift method, mechanically displacing a reference surface or a reference optical path to shift the phases. The phases of the interference fringes are calculated independently from the respective images acquired by the cameras and an average of the two phase calculation results is calculated.

公开(公告)号：US10161805B2

公开(公告)日：2018-12-25

申请号：US15943429

申请日：2018-04-02

申请人： Mitutoyo Corporation

发明人： Kazuhiko Kawasaki

IPC分类号： G01J9/04 ,  H01S3/13

摘要： To measure the frequency of a laser, the frequency of a beat signal that is generated by the interference between an optical frequency comb, used as the reference of measurement, and the laser to be measured is measured. In such a laser frequency measurement using the optical frequency comb, at least one of a repetition frequency and a CEO frequency of the optical frequency comb is changed so that the frequency of the beat signal becomes a predetermined value, and the frequency of the beat signal is measured, so that the frequency of the laser is measured. This allows measurement of the frequency of laser having large frequency variation and low stability.

公开(公告)号：US20180224335A1

公开(公告)日：2018-08-09

申请号：US15943429

申请日：2018-04-02

申请人： Mitutoyo Corporation

发明人： Kazuhiko Kawasaki

IPC分类号： G01J9/04 ,  H01S3/13

CPC分类号： G01J9/04 ,  G02F2203/54 ,  H01S3/1305

摘要： To measure the frequency of a laser, the frequency of a beat signal that is generated by the interference between an optical frequency comb, used as the reference of measurement, and the laser to be measured is measured. In such a laser frequency measurement using the optical frequency comb, at least one of a repetition frequency and a CEO frequency of the optical frequency comb is changed so that the frequency of the beat signal becomes a predetermined value, and the frequency of the beat signal is measured, so that the frequency of the laser is measured. This allows measurement of the frequency of laser having large frequency variation and low stability.

公开(公告)号：US10088291B2

公开(公告)日：2018-10-02

申请号：US15190912

申请日：2016-06-23

申请人： MITUTOYO CORPORATION

发明人： Kazuhiko Kawasaki ,  Shinpei Matsuura

IPC分类号： G01B9/02 ,  G01B11/24

摘要： An instantaneous phase-shift interferometer uses a light source having a coherence length shorter than a difference in optical path length between the light reflected from a reference surface and the light reflected from a measured surface. A beam from the light source is split and, using an adjustable delay optical path, a first beam is delayed to cause a difference in optical path length and is superimposed on the same optical axis as a second beam, after which the reference beam and the measurement beam are generated. The optical path length of the delay optical path is changed during adjustment, a plurality of interference fringe images are individually captured, and at least one of a bias, amplitude, and phase shift amount of the interference fringes obtained in each of the interference fringe images is calculated. A shape of a measured object is measured based on bias calculation results, amplitude calculation results, and phase shift amount calculation results.

公开(公告)号：US09995634B2

公开(公告)日：2018-06-12

申请号：US14791825

申请日：2015-07-06

申请人： MITUTOYO CORPORATION

发明人： Kazuhiko Kawasaki

IPC分类号： G01J9/04 ,  H01S3/13

CPC分类号： G01J9/04 ,  G02F2203/54 ,  H01S3/1305

摘要： To measure the frequency of a laser, the frequency of a beat signal that is generated by the interference between an optical frequency comb, used as the reference of measurement, and the laser to be measured is measured. In such a laser frequency measurement using the optical frequency comb, at least one of a repetition frequency and a CEO frequency of the optical frequency comb is changed so that the frequency of the beat signal becomes a predetermined value, and the frequency of the beat signal is measured, so that the frequency of the laser is measured. This allows measurement of the frequency of laser having large frequency variation and low stability.

公开(公告)号：US20180128593A1

公开(公告)日：2018-05-10

申请号：US15782683

申请日：2017-10-12

申请人： Mitutoyo Corporation

发明人： Kazuhiko Kawasaki

IPC分类号： G01B9/02

CPC分类号： G01B9/02079 ,  G01B9/0201 ,  G01B2290/30

摘要： The phase shift interferometer is configured to measure the shapes of measurement objects by acquiring a plurality of images of interference fringes while shifting the phases of the interference fringes. The interference fringes are provided with a phase difference of 90° relative to each other utilizing polarization of light. Images of the interference fringes are captured by two respective cameras while, in accordance with a conventional phase shift method, mechanically displacing a reference surface or a reference optical path to shift the phases. The phases of the interference fringes are calculated independently from the respective images acquired by the cameras and an average of the two phase calculation results is calculated.

公开(公告)号：US20160011055A1

公开(公告)日：2016-01-14

申请号：US14791825

申请日：2015-07-06

申请人： MITUTOYO CORPORATION

发明人： Kazuhiko Kawasaki

IPC分类号： G01J9/02

CPC分类号： G01J9/04 ,  G02F2203/54 ,  H01S3/1305

摘要： To measure the frequency of a laser, the frequency of a beat signal that is generated by the interference between an optical frequency comb, used as the reference of measurement, and the laser to be measured is measured. In such a laser frequency measurement using the optical frequency comb, at least one of a repetition frequency and a CEO frequency of the optical frequency comb is changed so that the frequency of the beat signal becomes a predetermined value, and the frequency of the beat signal is measured, so that the frequency of the laser is measured. This allows measurement of the frequency of laser having large frequency variation and low stability.

摘要翻译： 为了测量激光的频率，测量由用作测量参考的光学频率梳与被测量的激光之间的干涉产生的拍频信号的频率。 在使用光频梳的这种激光频率测量中，改变光频梳的重复频率和CEO频率中的至少一个，使得拍频信号的频率变为预定值，并且拍频信号的频率 被测量，从而测量激光的频率。 这允许测量具有大频率变化和低稳定性的激光器的频率。