公开(公告)号：US20240297035A1

公开(公告)日：2024-09-05

申请号：US18663177

申请日：2024-05-14

申请人： Hamamatsu Photonics K.K. ,  Energetiq Technology, Inc.

发明人： Matthew Partlow ,  Donald K. Smith ,  Matthew Besen ,  Akinori ASAI

IPC分类号： H01J61/54 ,  H01J61/16 ,  H01J65/00 ,  H01J65/04 ,  H01S3/06 ,  H01S3/091 ,  H01S3/094 ,  H01S3/1115 ,  H01S3/13 ,  H01S3/16

CPC分类号： H01J61/54 ,  H01J61/16 ,  H01J65/00 ,  H01J65/04 ,  H01S3/0602 ,  H01S3/0621 ,  H01S3/0912 ,  H01S3/094038 ,  H01S3/1115 ,  H01S3/1623 ,  H01S3/1643 ,  H01S3/1305

摘要： An electrodeless laser-driven light source includes a laser that generates a CW sustaining light. A pump laser generates pump light. A Q-switched laser crystal receives the pump light generated by the pump laser and generates pulsed laser light at an output in response to the generated pump light. A first optical element projects the pulsed laser light along a first axis to a breakdown region in a gas-filled bulb comprising an ionizing gas. A second optical element projects the CW sustaining light along a second axis to a CW plasma region in the gas-filled bulb comprising the ionizing gas. A detector detects plasma light generated by a CW plasma and generates a detection signal at an output. A controller generates control signals that control the pump light to the Q-switched laser crystal so as to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level.

公开(公告)号：US20240291226A1

公开(公告)日：2024-08-29

申请号：US18571826

申请日：2022-06-02

申请人： Cymer, LLC

发明人： Siyu Chen ,  Spencer Ryan Williams

IPC分类号： H01S3/134 ,  G03F7/00 ,  G03F7/20 ,  H01S3/036 ,  H01S3/13 ,  H01S3/225 ,  H01S3/23

CPC分类号： H01S3/134 ,  H01S3/036 ,  H01S3/1305 ,  H01S3/225 ,  H01S3/2308 ,  H01S3/2366 ,  G03F7/2004 ,  G03F7/70025

摘要： A gas control apparatus includes a control system in communication with a gas discharge chamber. The control system includes a performance monitoring module configured to, during standard mode of operation of the gas discharge chamber and in between performance of gas recovery schemes on the gas discharge chamber that use a gas recovery setting: compare one or more performance parameters of the gas discharge chamber to respective thresholds; determine whether the gas recovery setting needs to be adjusted based on the comparison; and adjust the value for the gas recovery setting based on the determination. The control system includes a gas recovery module configured to perform the gas recovery scheme, the gas recovery module being configured to access the most recently adjusted value for the gas recovery setting from the performance monitoring module when performing the current gas recovery scheme.

公开(公告)号：US20240245289A1

公开(公告)日：2024-07-25

申请号：US18624347

申请日：2024-04-02

申请人： GYRUS ACMI, INC. D/B/A OLYMPUS SURGICAL TECHNOLOGIES AMERICA

发明人： Kurt G. Shelton ,  Masayasu Chida ,  Sergey A. Bukesov ,  Rachel D. Schnakenberg ,  Brian M. Talbot

IPC分类号： A61B1/07 ,  A61B1/05 ,  A61B1/06 ,  A61B5/00 ,  A61B18/00 ,  A61B18/22 ,  A61B18/26 ,  H01S3/10 ,  H01S3/13

CPC分类号： A61B1/07 ,  A61B1/05 ,  A61B1/0638 ,  A61B1/0669 ,  A61B1/0684 ,  A61B5/0071 ,  A61B5/0084 ,  A61B5/7257 ,  A61B18/22 ,  H01S3/10069 ,  H01S3/1305 ,  A61B5/0075 ,  A61B2018/00482 ,  A61B2018/00511 ,  A61B2018/00577 ,  A61B2018/00589 ,  A61B2018/00625 ,  A61B2018/00642 ,  A61B18/26

摘要： Systems, devices, and methods for identifying a target during an endoscopic procedure are disclosed. An endoscopic target identification system includes an endoscope having an endoscopic illumination source, an optical fiber insertable through a working channel of the endoscope and coupled to a non-endoscopic illumination source different from the endoscopic illumination source, and a controller. The controller can send a control signal to the non-endoscopic illumination source to emit a diagnostic beam through the optical fiber when the at least one endoscopic illumination source changes from a first mode to a second mode. The second mode has a lower amount of illumination than the first mode. The controller can determine a composition of a target based on the diagnostic beam incident on the target and light from the diagnostic beam being reflected from the target.

公开(公告)号：US20240204473A1

公开(公告)日：2024-06-20

申请号：US18591069

申请日：2024-02-29

申请人： RAFAEL ADVANCED DEFENSE SYSTEMS LTD.

发明人： Daniel GOLUBCHIK ,  Yehonathan SEGEV ,  David SHWA

IPC分类号： H01S3/13 ,  G01S7/481 ,  H01S3/00 ,  H01S3/067 ,  H01S3/10 ,  H01S3/23 ,  H01S5/40

CPC分类号： H01S3/1307 ,  H01S3/0085 ,  H01S3/067 ,  H01S3/10053 ,  H01S3/2308 ,  H01S3/2383 ,  G01S7/4815 ,  H01S3/06737 ,  H01S3/10092 ,  H01S3/1305 ,  H01S5/4012

摘要： A coherent beam combination (CBC) system (10) includes an array of beam sources (12a, 12b and 12c) generating coherent beams directed towards a target (T). The phase modulators (14a, 14b and 14c) allow adjustment of relative phase offsets of the beams. A detector (16) monitors an intensity of the radiation impinging on an area of the target (T). A controller (18) receives the intensity parameter and controls a phase adjustment of the beams according to a deterministic (i.e., quantitative) measurement of a phase offset of each beam relative to a representative phase of the sum of all the other beams. This is achieved by using interferometric techniques, referred to herein as Target In-the-Loop Interferometry (TILI).

公开(公告)号：US12014918B2

公开(公告)日：2024-06-18

申请号：US18465022

申请日：2023-09-11

申请人： Hamamatsu Photonics K.K. ,  Energetiq Technology, Inc.

发明人： Matthew Partlow ,  Donald K. Smith ,  Matthew Besen ,  Akinori Asai

IPC分类号： H01J61/54 ,  H01J61/16 ,  H01J65/00 ,  H01J65/04 ,  H01S3/06 ,  H01S3/091 ,  H01S3/094 ,  H01S3/1115 ,  H01S3/16 ,  H01S3/13

CPC分类号： H01J61/54 ,  H01J61/16 ,  H01J65/00 ,  H01J65/04 ,  H01S3/0602 ,  H01S3/0621 ,  H01S3/0912 ,  H01S3/094038 ,  H01S3/1115 ,  H01S3/1623 ,  H01S3/1643 ,  H01S3/1305

摘要： A method of generating light with a laser-driven light source includes generating a CW sustaining light and propagating the CW sustaining light to a gas filled bulb comprising an ionizing gas. A pump light is generated. A Q-switched laser crystal is irradiated with the generated pump light, thereby generating pulsed laser light. The pulsed laser light is propagated to the gas filled bulb comprising the ionizing gas so as to generate a CW plasma that emits light. The light generated by the CW plasma in the gas filled bulb is detected. The pump light is controlled so as to extinguish the pulsed laser light after the light generated by the CW plasma is detected.

公开(公告)号：US12009631B1

公开(公告)日：2024-06-11

申请号：US17958317

申请日：2022-09-30

申请人： Arete Associates

发明人： Micah Boyd

IPC分类号： H01S3/115 ,  G02F1/03 ,  H01S3/083 ,  H01S3/10 ,  H01S3/127 ,  H01S3/13 ,  H01S3/136 ,  H01S3/0941

CPC分类号： H01S3/1305 ,  G02F1/0327 ,  H01S3/083 ,  H01S3/10061 ,  H01S3/115 ,  H01S3/127 ,  H01S3/136 ,  H01S3/0941

摘要： Described herein are methods for developing and maintaining pulses that are produced from compact resonant cavities using one or more Q-switches and maintaining the output parameters of these pulses created during repetitive pulsed operation. The deterministic control of the evolution of a Q-switched laser pulse is complicated due to dynamic laser cavity feedback effects and unpredictable environmental inputs. Laser pulse shape control in a compact laser cavity (e.g., length/speed of light

公开(公告)号：US12007696B2

公开(公告)日：2024-06-11

申请号：US17779290

申请日：2020-11-18

申请人： Cymer, LLC

发明人： Matthew Minakais ,  Russell Allen Burdt

IPC分类号： G03F7/20 ,  G03F7/00 ,  H01S3/13

CPC分类号： G03F7/70508 ,  G03F7/70025 ,  G03F7/70041 ,  H01S3/1305 ,  G03F7/70033

摘要： A system includes a laser source configured to generate one or more bursts of laser pulses and a data collection and analysis system. The data collection and analysis system is configured to receive, from the laser source, data associated with the one or more bursts of laser pulses and determine, based on the received data, that the one or more bursts of laser pulses are for external use. The data collection and analysis system is further configured to determine, based on the received data, whether the one or more bursts of laser pulses are for an on-wafer operation or are for a calibration operation.

公开(公告)号：US11980350B2

公开(公告)日：2024-05-14

申请号：US16984456

申请日：2020-08-04

申请人： GYRUS ACMI, INC.

发明人： Kurt G. Shelton ,  Masayasu Chida ,  Sergey A. Bukesov ,  Rachel D. Schnakenberg ,  Brian M. Talbot

IPC分类号： A61B1/00 ,  A61B1/05 ,  A61B1/06 ,  A61B1/07 ,  A61B5/00 ,  A61B18/22 ,  H01S3/10 ,  H01S3/13 ,  A61B18/00 ,  A61B18/26

CPC分类号： A61B1/07 ,  A61B1/05 ,  A61B1/0638 ,  A61B1/0669 ,  A61B1/0684 ,  A61B5/0071 ,  A61B5/0084 ,  A61B5/7257 ,  A61B18/22 ,  H01S3/10069 ,  H01S3/1305 ,  A61B5/0075 ,  A61B2018/00482 ,  A61B2018/00511 ,  A61B2018/00577 ,  A61B2018/00589 ,  A61B2018/00625 ,  A61B2018/00642 ,  A61B18/26

摘要： Systems, devices, and methods for identifying a target during an endoscopic procedure are disclosed. An endoscopic target identification system includes an endoscope having an endoscopic illumination source, an optical fiber insertable through a working channel of the endoscope and coupled to a non-endoscopic illumination source different from the endoscopic illumination source, and a controller. The controller can send a control signal to the non-endoscopic illumination source to emit a diagnostic beam through the optical fiber when the at least one endoscopic illumination source changes from a first mode to a second mode. The second mode has a lower amount of illumination than the first mode. The controller can determine a composition of a target based on the diagnostic beam incident on the target and light from the diagnostic beam being reflected from the target.

公开(公告)号：US11978995B2

公开(公告)日：2024-05-07

申请号：US17467144

申请日：2021-09-03

申请人： Hefei Institutes of Physical Science, Chinese Academy of Sciences

发明人： Qing Zang ,  Jian Zhou

IPC分类号： H01S3/00 ,  H01S3/13

CPC分类号： H01S3/0092 ,  H01S3/1305 ,  H01S3/1306

摘要： The present disclosure provides a laser pulse sequence energy correction system and method. The correction system includes a fundamental frequency light source, a control unit, an energy adjusting unit and a frequency multiplication crystal; the fundamental frequency light source is configured to output a fundamental frequency pulse laser, and the frequency multiplication crystal is configured to convert the fundamental frequency pulse laser into a multiple frequency pulse laser; the control unit prestores an energy-time curve of the multiple frequency pulse laser, and the control unit is configured to control the energy adjusting unit to adjust the intensity of the fundamental frequency pulse laser incident on the frequency multiplication crystal according to the energy-time curve, so that energy of each pulse in the multiple frequency pulse laser is identical. The technical solution of the present disclosure has advantages of simple structure, reliable device, convenient adjustment and the like.

公开(公告)号：US11909177B2

公开(公告)日：2024-02-20

申请号：US17674668

申请日：2022-02-17

申请人： KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION ,  KOALA TECH INC.

发明人： Chihaya Adachi ,  Sangarange Don Atula Sandanayaka ,  Toshinori Matsushima ,  Kou Yoshida ,  Jean-Charles Ribierre ,  Fatima Bencheikh ,  Kenichi Goushi ,  Takashi Fujihara

IPC分类号： H01S5/36 ,  H01S5/12 ,  H01S5/042 ,  H01S3/13

CPC分类号： H01S5/36 ,  H01S3/1305 ,  H01S5/04253 ,  H01S5/1215 ,  H01S5/1231

摘要： Disclosed are a current excitation type organic semiconductor laser containing a pair of electrodes, an organic laser active layer and an optical resonator structure between the pair of electrodes and a laser having an organic layer on a distributed feedback grating structure. The lasers include a continuous-wave laser, a quasi-continuous-wave laser and an electrically driven semiconductor laser diode.