公开(公告)号：US06183097B2

公开(公告)日：2001-02-06

申请号：US09348321

申请日：1999-07-08

申请人： Mohammed T. A. Saif ,  Noel C. MacDonald

发明人： Mohammed T. A. Saif ,  Noel C. MacDonald

IPC分类号： G02B7182

CPC分类号： G01P15/0802 ,  G01P15/0894 ,  H01H1/0036 ,  H01H2003/463 ,  Y10S977/70 ,  Y10S977/724

摘要： A micromechanical micromotion amplifier has an integrated structure formed primarily of silicon and comprises a plurality of long slender flexible beams which are connected in a predetermined manner. The beams are released from a silicon substrate for movement with respect to fixed points of reference upon the substrate. Each beam thereby has a fixed end and a relatively moveable free end. Compressive axial force induced by axial movement, applied to the moveable end of a beam, will cause that beam to deform or buckle. Buckling occurs transversely in-plane due to a high aspect ratio profile of each beam. The amount of lateral or transverse movement of a beam due to buckling is relatively large in relation to the applied axial force or axial movement which causes it. By arranging these beams in cooperating perpendicular pairs as micromotion amplifier stages, an input axial force/movement applied to the moveable free end of a first beam generates a transverse motion or buckling movement of that beam.

摘要翻译： 微机电微动力放大器具有主要由硅形成的整体结构，并且包括以预定方式连接的多个长细长柔性梁。 光束从硅衬底释放，以相对于衬底上的固定参考点移动。 因此，每个梁具有固定端和相对可移动的自由端。 由轴向运动引起的压缩轴向力，施加到梁的可移动端，将导致梁变形或弯曲。 由于每个光束的高纵横比轮廓，因此弯曲发生在平面内。 由于屈曲而导致的梁的横向或横向运动的量相对于所引起的所施加的轴向力或轴向运动相对较大。 通过将这些光束配置为协作的垂直对作为微型放大器级，施加到第一光束的可移动自由端的输入轴向力/运动产生该光束的横向运动或屈曲运动。

公开(公告)号：US06309077B1

公开(公告)日：2001-10-30

申请号：US09669972

申请日：2000-09-25

申请人： Mohammed T. A. Saif ,  Noel C. MacDonald

发明人： Mohammed T. A. Saif ,  Noel C. MacDonald

IPC分类号： G02B7182

CPC分类号： G01P15/0802 ,  G01P15/0894 ,  H01H1/0036 ,  H01H2003/463 ,  Y10S977/70 ,  Y10S977/724

摘要： A micromechanical micromotion amplifier has an integrated structure formed primarily of silicon and comprises a plurality of long slender flexible beams which are released from a silicon substrate for movement with respect to fixed points of reference upon the substrate. By arranging these beams in cooperating perpendicular pairs as micromotion amplifier stages, an input axial force/movement applied to a moveable free end of a first beam generates a transverse motion or buckling movement which in turn, translates or induces buckling movement in the connected second beam. The resultant output buckling of the second beam is an order of magnitude greater than the initial movement applied as an input to the first beam. Thus, beam pairs can be arranged as micromotion amplifier stages to amplify minute amounts of movement. Beam pairs or stages can also be cascaded to form integrated devices capable of producing greatly increased measurable effects in response to minute amounts of input. Such devices are useful as highly sensitive integrated micro-sensors for measuring a wide variety of parameters such as temperature, pressure, humidity, impact or acceleration. Such devices may also form the basis of highly sensitive micro-switches.

摘要翻译： 微机电微动力放大器具有主要由硅形成的整体结构，并且包括从硅衬底释放的多个长细长的柔性梁，用于相对于衬底上的固定参考点移动。 通过将这些光束配置为协作的垂直对作为微动力放大器级，施加到第一光束的可移动自由端的输入轴向力/运动产生横向运动或屈曲运动，其进而平移或引起所连接的第二光束中的屈曲运动 。 第二光束的合成输出屈曲比作为第一光束的输入的初始移动大一个数量级。 因此，波束对可以被布置为微运动放大器级以放大微小的运动量。 光束对或阶段也可以级联以形成能够响应于微小量的输入而产生大大增加的可测量效果的集成器件。 这样的器件可用作用于测量各种参数（如温度，压力，湿度，冲击或加速度）的高灵敏度集成微传感器。 这样的设备也可以形成高灵敏度的微型开关的基础。