Abstract:
A polishing pad for use in chemically mechanically polishing a semiconductor substrate enhances the uniformity of the rate at which material is removed from the surface of the semiconductor substrate, thereby ensuring the reproducibility of the chemical mechanical polishing process. The polishing pad has main grooves that divide an upper portion of the pad into a plurality of cells. At least one of the cells includes a land portion and a grooved portion substantially enclosed by the land portion. A respective slurry hole extends through the pad to the grooved portion such that slurry supplied through the slurry hole feeds into the grooved portion but is impeded by the land portion from flowing outwardly of the cell.
Abstract:
A computer system and a control method thereof, the computer system includes a host unit which includes a plurality of lines, a plurality of memory units to which power is selectively supplied, a power supply which supplies power to the plurality of memory units, a graphic processor which connects with the host unit through the plurality of lines and accesses the plurality of memory unit, and a controller which controls supply of power to the plurality of memory units on the basis of an operation mode of the host unit, controls whether to use the plurality of lines in transmitting data in accordance with the supply of power to the plurality of memory units, and controls the graphic processor not to access the memory units receiving no power among the plurality of memory units.
Abstract:
A computer system and a control method thereof reduce power to devices not in use. The system typically includes a device unit; a switching unit which switches supply of power to the device unit; and a control unit which checks whether or not the device unit is in use, and controls the switching unit to prevent power from being supplied to the device unit if the device unit is not in use. Wasteful power consumed by devices which are not in use is minimized. In addition, if a user wants to reuse a device with supply of power cut off, it is possible to reuse the device by resuming the supply of power to the device in a simple manner.