摘要:
The following steps are included: a step of changing crystal states of the specific portion of an resist layer of a master disk having an etching layer and the resist layer formed on the etching layer through exposure, a step of removing the specific portion, a step of removing the portion of the etching layer overlapping the removed portion of the resist layer, a step of forming a conductive film from which the resist layer is removed, a step of performing electroforming by using the conductive film as an electrode, and a step of exfoliating the etching layer from the conductive film.
摘要:
An exposure apparatus of an optical disk master having a laser source, a deflector for deflecting a recording laser beam obtained based on the laser beam of the laser source and an objective lens for focusing the recording laser beam on an optical disk master, has a lens system provided between the laser source and the deflector, which has a first lens for focusing the laser beam and a second lens for adjusting the focused laser beam to a desired beam diameter; and a pinhole placed at a practical focal position of the lens system.
摘要:
An exposure apparatus of an optical disk master having a laser source, a deflector for deflecting a recording laser beam obtained based on the laser beam of the laser source and an objective lens for focusing the recording laser beam on an optical disk master, has a lens system provided between the laser source and the deflector, which has a first lens for focusing the laser beam and a second lens for adjusting the focused laser beam to a desired beam diameter; and a pinhole placed at a practical focal position of the lens system.
摘要:
An exposure apparatus of an optical disk master having a laser source, a deflector for deflecting a recording laser beam obtained based on the laser beam of the laser source and an objective lens for focusing the recording laser beam on an optical disk master, has a lens system provided between the laser source and the deflector, which has a first lens for focusing the laser beam and a second lens for adjusting the focused laser beam to a desired beam diameter; and a pinhole placed at a practical focal position of the lens system.
摘要:
A method for producing a master disk 105 for an optical disk 110 includes a layer forming step of forming a heat-sensitive material layer 102 on a substrate 101, an exposure step of exposing the heat-sensitive material layer 102 partially to a laser beam, and a pit and land pattern forming step of forming a pattern of pits and lands by means of the difference between the etching rates of the exposed portion and the unexposed portion of the heat-sensitive material layer 102. The heat-sensitive material layer 102 includes at least Sb and O. When the composition ratio of O is defined as x (atom %), x is 3 or more and 50 or less.
摘要:
Apparatus and method for exposing an optical disk master having a laser source, a deflector for deflecting a recording laser beam based on the laser beam of the laser source and an objective lens for focusing the recording laser beam on an optical disk master, including a liquid crystal plate provided between the laser source and the deflector, a parallel flat plate provided between the deflector and the objective lens, a photodetector that detects reflected light from the parallel flat plate, and an adjusting device for adjusting a voltage applied to the liquid crystal plate based on information on wavefront fluctuation of the recording laser beam detected by the photodetector.
摘要:
A method for producing an optical recording medium of the present invention includes: a first step of laminating a substrate and a transfer stamper with a not cured ultraviolet-curable resin interposed therebetween, the transfer stamper having, on at least one of surfaces thereof, recesses/projections that provide information to be transferred; a second step of transferring the information to be transferred of the transfer stamper onto a surface of the ultraviolet-curable resin; a third step of detaching the transfer stamper from the ultraviolet-curable resin at an interface therebetween after the ultraviolet-curable resin is cured; and a fourth step of forming a thin film layer on the information-transferred surface of the ultraviolet-curable resin, the thin film layer including at least one of a recording film and a reflection film. In this method, at least one of a weight of the transfer stamper and a viscosity of the ultraviolet-curable resin is set so that a surface roughness of the information-transferred surface of the ultraviolet-curable resin is smaller than a surface roughness of the surface of the transfer stamper on which the information to be transferred is provided.
摘要:
A method for exposing an optical disk master includes rotating a substrate disk coated with a photoresist, focusing a beam on the photoresist for exposure through an objective lens, and exposing the photoresist so as to form tracks on the substrate disk in its circumferential direction. At this time, the beam is deflected at least temporarily by passing through a deflector. The beam is divided into a first beam and a second beam after passing through the deflector, and the first beam is focused on the photoresist. A difference between the current position and the target position of an optical path of the second beam is detected, and the deflection operation of the deflector is corrected based on the difference so that the optical path of the second beam is located at the target position. This method can improve the track pitch accuracy of an optical disk having a narrow track pitch.
摘要:
An exposure apparatus of an optical disk master having a laser source, a deflector for deflecting a recording laser beam obtained based on the laser beam of the laser source and an objective lens for focusing the recording laser beam on an optical disk master, has a lens system provided between the laser source and the deflector, which has a first lens for focusing the laser beam and a second lens for adjusting the focused laser beam to a desired beam diameter; and a pinhole placed at a practical focal position of the lens system.
摘要:
The present invention relates to an optical information recording medium comprising a signal substrate that has at least a signal face formed on one of the faces thereof with a center hole, a center substrate that is placed in a manner so as to seal the center hole and also to be made flat with the signal face of the signal substrate and a transparent layer that is formed on the signal face of the signal substrate and at least one portion of the center substrate, wherein a means used for carrying out a clamping process is provided in the center substrate, and a manufacturing apparatus for such an optical information recording medium.