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公开(公告)号：US20050231887A1
公开(公告)日：2005-10-20
申请号：US11102542
申请日：2005-04-08
申请人： Morteza Zandi , Ara Vartabedian , Brian LaCourse
发明人： Morteza Zandi , Ara Vartabedian , Brian LaCourse
IPC分类号： H01L21/683 , H02H1/00 , H02N13/00
CPC分类号： H01L21/6833 , H02N13/00 , Y10T428/166
摘要： An electrostatic chuck for supporting a semiconductor wafer, including: a chuck body having a dielectric region and an insulating region, the insulating region having a higher electrical resistivity than the dielectric region, an electrode embedded in the chuck body, and a barrier layer provided between dielectric region and the insulating region.
摘要翻译： 一种用于支撑半导体晶片的静电卡盘，包括：具有电介质区域和绝缘区域的卡盘主体，所述绝缘区域具有比所述电介质区域更高的电阻率，嵌入在所述卡盘主体中的电极以及设置在所述卡盘主体之间的阻挡层 电介质区域和绝缘区域。
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公开(公告)号：US07369393B2
公开(公告)日：2008-05-06
申请号：US11102542
申请日：2005-04-08
申请人： Morteza Zandi , Ara Vartabedian , Brian LaCourse
发明人： Morteza Zandi , Ara Vartabedian , Brian LaCourse
IPC分类号： H01L21/683 , H01T23/00
CPC分类号： H01L21/6833 , H02N13/00 , Y10T428/166
摘要： An electrostatic chuck for supporting a semiconductor wafer, including: a chuck body having a dielectric region and an insulating region, the insulating region having a higher electrical resistivity than the dielectric region, an electrode embedded in the chuck body, and a barrier layer provided between dielectric region and the insulating region.
摘要翻译： 一种用于支撑半导体晶片的静电卡盘，包括：具有电介质区域和绝缘区域的卡盘主体，所述绝缘区域具有比所述电介质区域更高的电阻率，嵌入在所述卡盘主体中的电极以及设置在所述卡盘主体之间的阻挡层 电介质区域和绝缘区域。
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公开(公告)号：US06982125B2
公开(公告)日：2006-01-03
申请号：US10327722
申请日：2002-12-23
CPC分类号： C04B35/581 , C04B35/645 , C04B2235/3225 , C04B2235/96 , Y10T279/23
摘要： An electrostatic chuck is provided which includes a ceramic body comprising aluminum nitride (AlN), and at least one electrode in the ceramic body. According to a particular feature of this embodiment, the aluminum nitride has a resistivity ratio ρ10V/ρ500V less than about 5. In this regard, ρ10V represents the resistivity of the electrostatic chuck at 10 applied volts while ρ500V represents the resistivity of the AlN material at 500 applied volts.
摘要翻译： 提供了一种静电卡盘，其包括包括氮化铝（AlN）的陶瓷体和陶瓷体中的至少一个电极。 根据该实施例的特定特征，氮化铝的电阻率比小于约5的电阻率小于10V /小于500V。就此而论， / SUB>表示10个施加电压时静电卡盘的电阻率，而rho <500V 表示500V施加电压时AlN材料的电阻率。
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公开(公告)号：US20090179027A1
公开(公告)日：2009-07-16
申请号：US12317920
申请日：2008-12-29
申请人： Ara Vartabedian , Chuanping Li
发明人： Ara Vartabedian , Chuanping Li
CPC分类号： F23Q7/001 , F23Q2007/004 , Y10T29/49083
摘要： New coaxial ceramic heating elements and methods for manufacture wherein a conductive core region extends into a resistive hot zone at the distal end of the heating element, thereby moving the interface between the core conductive region and the resistive hot zone away from the distal tip of the heating element. Methods comprise bringing together a pre-formed or hardened zone of material with a zone of one or more materials having flow, curing, gelling, drying or otherwise solidifying or hardening the material having flow, and sintering to thereby forming an integral coaxial heating element.
摘要翻译： 新的同轴陶瓷加热元件和制造方法，其中导电芯区域延伸到加热元件的远端处的电阻热区域，从而使芯导电区域和电阻热区域之间的界面远离 加热元件 方法包括将预成形或硬化的材料区域与具有流动，固化，胶凝，干燥或以其它方式固化或硬化具有流动的材料的一种或多种材料的区域结合在一起，并烧结从而形成整体的同轴加热元件。
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公开(公告)号：US20100323124A1
公开(公告)日：2010-12-23
申请号：US12814107
申请日：2010-06-11
IPC分类号： C23C16/458 , H01L21/683 , C23C16/00
CPC分类号： C23C4/18 , C23C28/042 , C23C28/321 , C23C28/322 , C23C28/345 , C23C28/3455 , H01J37/321 , H01J37/32495 , H01L21/6833
摘要： A processing device includes a plurality of walls defining an interior space configured to be exposed to plasma and a surface coating on the interior surface of at least one of the plurality of walls. The surface coating includes pores forming interconnected porosity. The processing device further includes a sealant residing in at least a portion of the pores of the surface coating. In an embodiment, the sealant can be a thermally cured sealant having a cure temperature not greater than about 100° C. In another embodiment, the sealant can be an epoxy sealant having a viscosity of not greater than 500 cP in liquid precursor form. In yet another embodiment, the sealant can be a low shrinkage sealant characterized by a solidification shrinkage of not greater than 8%.
摘要翻译： 处理装置包括限定被配置为暴露于等离子体的内部空间的多个壁和多个壁中的至少一个的内表面上的表面涂层。 表面涂层包括形成互连孔隙的孔。 处理装置还包括位于表面涂层的孔的至少一部分中的密封剂。 在一个实施方案中，密封剂可以是固化温度不大于约100℃的热固化密封剂。在另一个实施方案中，密封剂可以是液体前体形式的粘度不大于500cP的环氧密封剂。 在另一个实施方案中，密封剂可以是低收缩密封剂，其特征在于凝固收缩率不大于8％。
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6.发明申请Ceramic heating elements having open-face structure and methods of fabrication thereof 审中-公开具有开口结构的陶瓷加热元件及其制造方法公开(公告)号：US20090179023A1
公开(公告)日：2009-07-16
申请号：US12317924
申请日：2008-12-29
CPC分类号： H05B3/141 , F23Q7/001 , F23Q2007/004 , H05B2203/027 , Y10T29/49083
摘要： The invention provides new ceramic resistive heating elements and new methods for manufacturing ceramic resistive heating elements wherein the heating element body comprises two or more regions of differing resistivity, and wherein the heating elements are open face. Heating elements such as igniters and glow plugs also are provided obtainable from fabrication methods of the invention.
摘要翻译： 本发明提供了新的陶瓷电阻加热元件和用于制造陶瓷电阻加热元件的新方法，其中加热元件主体包括两个或更多个不同电阻率的区域，并且其中加热元件是开放面。 也可以通过本发明的制造方法提供加热元件，例如点火器和电热塞。
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公开(公告)号：US08334062B1
公开(公告)日：2012-12-18
申请号：US12024522
申请日：2008-02-01
CPC分类号： C04B41/52 , C04B41/009 , C04B41/89 , F05B2230/90 , C04B41/4539 , C04B41/5024 , C04B35/565 , C04B35/584
摘要： The present invention relates generally to a multi-layered article suitable for service in severe environments. The article may be formed of a substrate, such as silicon carbide and/or silicon nitride. The substrate may have a first layer of a mixture of a rare earth silicate and Cordierite. The substrate may also have a second layer of a rare earth silicate or a mixture of a rare earth silicate and cordierite.
摘要翻译： 本发明一般涉及适用于恶劣环境中的服务的多层制品。 制品可以由诸如碳化硅和/或氮化硅的衬底形成。 基底可以具有第一层稀土硅酸盐和堇青石的混合物。 基底也可以具有稀土硅酸盐的第二层或稀土硅酸盐和堇青石的混合物。
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公开(公告)号：US20120315492A1
公开(公告)日：2012-12-13
申请号：US12024522
申请日：2008-02-01
CPC分类号： C04B41/52 , C04B41/009 , C04B41/89 , F05B2230/90 , C04B41/4539 , C04B41/5024 , C04B35/565 , C04B35/584
摘要： The present invention relates generally to a multi-layered article suitable for service in severe environments. The article may be formed of a substrate, such as silicon carbide and/or silicon nitride. The substrate may have a first layer of a mixture of a rare earth silicate and Cordierite. The substrate may also have a second layer of a rare earth silicate or a mixture of a rare earth silicate and cordierite.
摘要翻译： 本发明一般涉及适用于恶劣环境中的服务的多层制品。 制品可以由诸如碳化硅和/或氮化硅的衬底形成。 基底可以具有稀土硅酸盐和堇青石的混合物的第一层。 基底也可以具有稀土硅酸盐的第二层或稀土硅酸盐和堇青石的混合物。
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公开(公告)号：US20090173729A1
公开(公告)日：2009-07-09
申请号：US12317925
申请日：2008-12-29
申请人： Suresh Annavarapu , Ara Vartabedian
发明人： Suresh Annavarapu , Ara Vartabedian
IPC分类号： F23Q7/22
摘要： New ceramic heating elements are provided that have a recessed portion for receiving an electrical lead. Such ceramic heating elements can provide a reduced cross-sectional dimension across element regions that interface with electrical lead(s) as well as a more secure engagement of an electrical lead. Heating elements can be highly useful in a variety of application, including e.g. for fuel ignition for gas cooking appliances as well as vehicular glow plugs.
摘要翻译： 提供了新的陶瓷加热元件，其具有用于接收电引线的凹部。 这种陶瓷加热元件可以提供与电引线相接合的元件区域的减小的横截面尺寸以及电引线的更牢固的接合。 加热元件在各种应用中可以是非常有用的，包括例如 用于燃气烹饪器具以及车辆电热塞的燃料点火。
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