公开(公告)号：US5886786A

公开(公告)日：1999-03-23

申请号：US942638

申请日：1997-10-02

申请人： Motonori Kanaya ,  Kazuyoshi Yamasaki ,  Toshikazu Akaogi

发明人： Motonori Kanaya ,  Kazuyoshi Yamasaki ,  Toshikazu Akaogi

IPC分类号： G01B9/02

CPC分类号： G01B9/0209 ,  G01B11/2441 ,  G01B9/02064

摘要： A subject positioning device for an interferometer includes a positioning mechanism for positioning a test surface within an axial extent of interference positions in the object beam path, which is less than double of a thickness of the subject, and at least one positioning lens placed between a beam splitter and the axial extent of interference positions in the object beam path with a focal point located within the axial extent of interference positions.

摘要翻译： 用于干涉仪的被摄体定位装置包括定位机构，用于将物体光束路径内的干涉位置的轴向范围内的测试表面定位，所述干涉位置小于被检体的厚度的两倍，并且至少一个位于 分束器和目标光束路径中的干涉位置的轴向范围，其中焦点位于干涉位置的轴向范围内。

公开(公告)号：US5995222A

公开(公告)日：1999-11-30

申请号：US775193

申请日：1996-12-30

申请人： Motonori Kanaya ,  Kazuyoshi Yamasaki ,  Toshikazu Akaogi

发明人： Motonori Kanaya ,  Kazuyoshi Yamasaki ,  Toshikazu Akaogi

IPC分类号： G01B9/02

CPC分类号： G01B9/0209 ,  G01B11/2441 ,  G01B9/02064

摘要： A subject positioning device for an interferometer includes a positioning mechanism for positioning a test surface within an axial extent of interference positions in the object beam path, which is less than double of a thickness of the subject, and at least one positioning lens placed between a beam splitter and the axial extent of interference positions in the object beam path with a focal point located within the axial extent of interference positions.

公开(公告)号：US5663796A

公开(公告)日：1997-09-02

申请号：US612789

申请日：1996-03-11

申请人： Motonori Kanaya ,  Kazuyoshi Yamasaki

发明人： Motonori Kanaya ,  Kazuyoshi Yamasaki

IPC分类号： G01B11/00 ,  G01B11/25 ,  G01B11/30 ,  G01B11/24

CPC分类号： G01B11/254

摘要： In an optical apparatus utilizing moire fringes to inspect surface irregularities of a test object, a single light beam forms a light beam network in an optical sensor (28) such that the test object can be two-dimensionally detected, thereby preventing the test object from abnormally approaching a moire grating (12). The light beam is reflected between a pair of mirrors (50, 52) a plurality of times within an identical plane and then the optical sensor (28) detects the intensity of the light beam. The optical sensor (28) is disposed such that the light beam network is positioned directly below the moire grating (12). Accordingly, a test object (2) abnormally approaching the moire grating (12) can be two-dimensionally detected by the light beam network, thereby improving the accuracy in detection.

摘要翻译： 在使用莫尔条纹来检查被测物体的表面凹凸的光学装置中，单个光束在光学传感器（28）中形成光束网络，使得可以二维检测测试对象，从而防止测试对象 异常接近莫尔光栅（12）。 光束在相同平面内的多个反射镜（50,52）之间反射，然后光学传感器（28）检测光束的强度。 光传感器（28）被布置成使得光束网络直接位于莫尔光栅（12）的正下方。 因此，可以通过光束网络二维地检测异常接近莫尔光栅（12）的测试对象（2），从而提高检测精度。