公开(公告)号：US20250030399A1

公开(公告)日：2025-01-23

申请号：US18773084

申请日：2024-07-15

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Bryant GARCIA ,  Bryan KIMBRELL ,  John P. KOULAKIS ,  Greg DYER ,  Patrick TURNER

IPC: H03H9/08 ,  H03H3/02 ,  H03H9/02 ,  H03H9/10 ,  H03H9/17 ,  H03H9/56

Abstract: A device may include a substrate that includes a base and an intermediate layer. A device may include a piezoelectric layer supported by the substrate except for a portion of the piezoelectric layer forming a diaphragm that spans a helium filled cavity that extends at least partially in the intermediate layer. A device may include an interdigital transducer (IDT) at a surface of the piezoelectric layer and having interleaved fingers on the diaphragm that have a thickness that is less than 0.5 times a thickness of the diaphragm and greater than 0.2 times the thickness of the diaphragm, wherein one of the base and the intermediate layer of the substrate defines a bottom surface of the helium filled cavity that faces the diaphragm such that a cavity depth is between 1.0 μm to 6.0 μm.