公开(公告)号：US20250038734A1

公开(公告)日：2025-01-30

申请号：US18775010

申请日：2024-07-17

Applicant: Murata Manufacturing Co., Ltd.

Inventor： John P. KOULAKIS

IPC: H03H9/13 ,  H03H3/02 ,  H03H9/02 ,  H03H9/17 ,  H03H9/56

Abstract: An acoustic resonator device is provided that a piezoelectric layer; an interdigital transducer on a surface of the piezoelectric layer and including interleaved IDT fingers extending from first and second busbars respectively; and a metal layer disposed between a finger of the interleaved IDT fingers and the piezoelectric layer in a thickness direction that is measured in a direction normal to the surface of the piezoelectric layer. In this aspect, a ratio of a width of the metal layer to a pitch of the interleaved IDT fingers is greater than or equal to 0.45, the width of the metal layer being measured in a width direction that is parallel to the surface of the piezoelectric layer. Moreover, a thickness of the metal layer in the thickness direction is less than one third a thickness of the finger in the thickness direction.

公开(公告)号：US20240022227A1

公开(公告)日：2024-01-18

申请号：US18353979

申请日：2023-07-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： John P. KOULAKIS ,  Greg DYER

IPC: H03H9/02 ,  H03H3/013

CPC classification number: H03H9/02228 ,  H03H9/02015 ,  H03H3/013 ,  H03H9/02086

Abstract: An acoustic resonator is provided that includes a substrate; a piezoelectric layer supported by the substrate; and an interdigital transducer (IDT) at a surface of the piezoelectric layer. The IDT includes a pair of busbars and a plurality of electrode fingers extending from the first and second busbars to be interleaved with each other. The respective widths of at least a portion of the electrode fingers increases in a direction from respective first ends of the first and second busbars to the respective second end of the first and second busbars. Moreover, a pitch of the portion of the electrode fingers decreases in the direction from the respective first ends of the first and second busbar to the respective second ends of the first and second busbars.

公开(公告)号：US20250112617A1

公开(公告)日：2025-04-03

申请号：US18897043

申请日：2024-09-26

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Drew MOROSIN ,  John P. KOULAKIS ,  Garrett WILLIAMS

IPC: H03H9/13 ,  H03H3/02 ,  H03H9/02 ,  H03H9/17

Abstract: An acoustic resonator is provided that includes an interdigital transducer (IDT) at a surface of at least one piezoelectric layer, the IDT including interleaved IDT fingers extending from first and second busbars respectively. Moreover, a ratio of a thickness of the IDT fingers to a thickness of the at least one piezoelectric layer is optimized to minimize unwanted spurs. The mark to pitch ratio of the IDT fingers may also be optimized to minimize spurs during operation.

公开(公告)号：US20250030399A1

公开(公告)日：2025-01-23

申请号：US18773084

申请日：2024-07-15

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Bryant GARCIA ,  Bryan KIMBRELL ,  John P. KOULAKIS ,  Greg DYER ,  Patrick TURNER

IPC: H03H9/08 ,  H03H3/02 ,  H03H9/02 ,  H03H9/10 ,  H03H9/17 ,  H03H9/56

Abstract: A device may include a substrate that includes a base and an intermediate layer. A device may include a piezoelectric layer supported by the substrate except for a portion of the piezoelectric layer forming a diaphragm that spans a helium filled cavity that extends at least partially in the intermediate layer. A device may include an interdigital transducer (IDT) at a surface of the piezoelectric layer and having interleaved fingers on the diaphragm that have a thickness that is less than 0.5 times a thickness of the diaphragm and greater than 0.2 times the thickness of the diaphragm, wherein one of the base and the intermediate layer of the substrate defines a bottom surface of the helium filled cavity that faces the diaphragm such that a cavity depth is between 1.0 μm to 6.0 μm.

公开(公告)号：US20230336142A1

公开(公告)日：2023-10-19

申请号：US18193269

申请日：2023-03-30

Applicant: Murata Manufacturing Co., Ltd.

Inventor： John P. KOULAKIS

IPC: H03H9/02 ,  H03H9/17 ,  H03H9/56

CPC classification number: H03H9/02228 ,  H03H9/174 ,  H03H9/564

Abstract: An acoustic resonator includes a substrate, a piezoelectric plate supported by the substrate, and a diaphragm. The resonator further includes an interdigital transducer (IDT) having interleaved IDT fingers extending from first and second busbars respectively. Overlapping portions of the interleaved IDT fingers define an aperture of the acoustic resonator. The resonator further includes one or more dielectric strips, each of the one or more dielectric strips overlapping at least a portion of the IDT fingers and extending into a gap between a margin of the aperture and a corresponding one of the first busbar or the second busbar. The resonator further includes one or more dummy fingers, each of the dummy fingers extending from one of the first busbar or the second busbar at a position between neighboring IDT fingers and extending into the gap toward one of the one or more dielectric strips.

公开(公告)号：US20230327637A1

公开(公告)日：2023-10-12

申请号：US18194256

申请日：2023-03-31

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Ventsislav YANTCHEV ,  Sean MCHUGH ,  Bryant GARCIA ,  Patrick TURNER ,  John P. KOULAKIS

IPC: H03H9/02 ,  H03H9/17 ,  G01N29/02 ,  G01N29/036

CPC classification number: H03H9/02228 ,  H03H9/02015 ,  H03H9/174 ,  G01N29/022 ,  G01N29/036 ,  G01N2291/0256 ,  G01N2291/0426

Abstract: A bulk acoustic resonator that includes a substrate, a piezoelectric plate, and an interdigital transducer (IDT) formed on the front surface of the piezoelectric plate. The IDT is configured to excite a primary shear acoustic mode within the piezoelectric plate. Also included is a half-lambda dielectric layer on at least one of the front surface or the back surface of the piezoelectric plate, where a thickness of the half-lambda dielectric layer is related to a wavelength of a fundamental shear bulk acoustic wave resonance in the half-lambda dielectric layer. The device further includes an acoustic Bragg reflector sandwiched between the surface of the substrate and the back surface of the piezoelectric plate, the acoustic Bragg reflector configured to reflect the primary acoustic mode. A top layer of the alternating layers of the acoustic Bragg reflector contacts the piezoelectric plate or the half-lambda dielectric layer.