公开(公告)号：US11495726B2

公开(公告)日：2022-11-08

申请号：US16419219

申请日：2019-05-22

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yasuhiro Aida ,  Daiki Murauchi

IPC: H01L41/047 ,  H01L41/08 ,  H01L41/083 ,  H01L41/187 ,  H01L41/09 ,  H01L41/113

Abstract: A piezoelectric element that includes a substrate, a lower electrode layer on the substrate, an intermediate layer on the lower electrode layer, and an upper electrode layer on the intermediate layer. The intermediate layer includes a first piezoelectric layer including an aluminum nitride as a main component thereof and located between the lower electrode layer and the upper electrode layer, a first buffer layer including an aluminum nitride as a main component and located between the first piezoelectric layer and the upper electrode layer, a first intermediate electrode layer located between the first buffer layer and the upper electrode layer, and a second piezoelectric layer located between the first intermediate electrode layer and the upper electrode layer.

公开(公告)号：US20190280181A1

公开(公告)日：2019-09-12

申请号：US16419219

申请日：2019-05-22

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yasuhiro Aida ,  Daiki Murauchi

IPC: H01L41/047 ,  H01L41/08 ,  H01L41/083

Abstract: A piezoelectric element that includes a substrate, a lower electrode layer on the substrate, an intermediate layer on the lower electrode layer, and an upper electrode layer on the intermediate layer. The intermediate layer includes a first piezoelectric layer including an aluminum nitride as a main component thereof and located between the lower electrode layer and the upper electrode layer, a first buffer layer including an aluminum nitride as a main component and located between the first piezoelectric layer and the upper electrode layer, a first intermediate electrode layer located between the first buffer layer and the upper electrode layer, and a second piezoelectric layer located between the first intermediate electrode layer and the upper electrode layer.