公开(公告)号：US20190288665A1

公开(公告)日：2019-09-19

申请号：US15929139

申请日：2019-06-06

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Ippei HATSUDA

IPC: H03H9/02 ,  H03H9/05 ,  H03H9/10 ,  H03H9/145 ,  H03H9/25 ,  H03H3/10 ,  H03F3/20

Abstract: An acoustic wave device includes a piezoelectric substrate, an IDT electrode provided on the piezoelectric substrate, a support provided on the piezoelectric substrate so as to surround the IDT electrode, and a cover provided on the support. The support has a larger thermal expansion coefficient than the piezoelectric substrate. The IDT electrode is provided in a hollow space that is surrounded by the piezoelectric substrate, the support, and the cover. The support includes an inner surface on a side of the hollow space, and an outer surface on a side opposite to the inner surface, and the support includes a recess provided in at least one of the inner and outer surfaces.

公开(公告)号：US20160294361A1

公开(公告)日：2016-10-06

申请号：US15186619

申请日：2016-06-20

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Takashi YAMANE ,  Hideki IWAMOTO ,  Keiji OKADA ,  Syunsuke KIDO ,  Masanori OTAGAWA ,  Ippei HATSUDA ,  Korekiyo ITO

IPC: H03H9/64 ,  H03H9/02 ,  H01L41/08 ,  H01L41/047 ,  H01L41/18

Abstract: An elastic wave device includes IDT electrodes stacked on a piezoelectric thin film. The IDT electrode includes a plurality of first electrode fingers and a plurality of second electrode fingers. A line connecting the distal ends of the first electrode fingers or the distal ends of the second electrode fingers extends obliquely with respect to a propagation direction of an elastic wave at an oblique angle ν. The oblique angle ν is about 0.4° or more and about 10° or less.

Abstract translation: 弹性波装置包括堆叠在压电薄膜上的IDT电极。 IDT电极包括多个第一电极指和多个第二电极指。 连接第一电极指的末端或第二电极指的远端的线相对于弹性波的倾斜角度v的传播方向倾斜地延伸。 斜角ν为约0.4°以上且约10°以下。