公开(公告)号：US20250088167A1

公开(公告)日：2025-03-13

申请号：US18960226

申请日：2024-11-26

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Kuan ZHANG ,  James R. COSTA ,  Andrew KAY ,  Greg DYER ,  Viktor PLESSKI ,  Soumya YANDRAPALLI ,  Robert B. HAMMOND ,  Bryant GARCIA ,  Patrick TURNER ,  Jesson JOHN ,  Ventsislav YANTCHEV

IPC: H03H9/02 ,  H03H3/02 ,  H03H3/04 ,  H03H9/13 ,  H03H9/17 ,  H03H9/56

Abstract: Acoustic filters, resonators and methods are disclosed. An acoustic filter device includes a substrate; a piezoelectric layer attached to the substrate, wherein at least a portion of the piezoelectric layer is disposed over a cavity of the acoustic resonator device; and an interdigital transducer (IDT) on a surface of the piezoelectric layer, the IDT including interleaved fingers extending at least over the portion of the piezoelectric layer disposed over the cavity. The cavity has at least one rounded corner, and a portion of interleaved fingers extend from at least one busbar. Moreover, at least a portion of the rounded corner of the cavity is under the at least one busbar in a plan view of the piezoelectric layer.