公开(公告)号：US20240022234A1

公开(公告)日：2024-01-18

申请号：US18476865

申请日：2023-09-28

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Viktor PLESSKI ,  Soumya YANDRAPALLI ,  Robert B. HAMMOND ,  Bryant GARCIA ,  Patrick TURNER ,  Jesson JOHN ,  Ventsislav YANTCHEV

IPC: H03H9/56 ,  H03H9/02 ,  H03H9/13 ,  H03H9/17 ,  H03H3/02

CPC classification number: H03H9/568 ,  H03H9/02228 ,  H03H9/02031 ,  H03H9/132 ,  H03H9/174 ,  H03H9/562 ,  H03H3/02 ,  H03H9/176 ,  H03H9/02015 ,  H03H9/02062 ,  H03H9/564 ,  H03H9/02039 ,  H03H2003/023 ,  H10N30/877

Abstract: Filter devices are disclosed. A filter device includes a piezoelectric plate comprising a supported portion, a first diaphragm, and a second diaphragm. The supported portion is attached to a substrate and the first and second diaphragms spans respective cavities in the substrate. A first interdigital transducer (IDT) has interleaved fingers on the first diaphragm. A second interdigital transducer (IDT) has interleaved fingers on the second diaphragm. A first dielectric layer is between the interleaved fingers of the first IDT, and a second dielectric layer is between the interleaved fingers of the second IDT. A thickness of the first dielectric layer is greater than a thickness of the second dielectric layer. The piezoelectric plate and the first and second IDTs are configured such that radio frequency signals applied to first and second IDTs excite primary shear acoustic modes in the respective diaphragms.

公开(公告)号：US20240380376A1

公开(公告)日：2024-11-14

申请号：US18783009

申请日：2024-07-24

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Viktor PLESSKI ,  Soumya YANDRAPALLI ,  Robert B. HAMMOND ,  Bryant GARCIA ,  Patrick TURNER ,  Jesson JOHN ,  Ventsislav YANTCHEV

IPC: H03H9/02 ,  H03H3/02 ,  H03H3/04 ,  H03H9/13 ,  H03H9/17 ,  H03H9/56

Abstract: An acoustic resonator is provided that includes a piezoelectric plate and an interdigital transducer (IDT) including interleaved fingers on the piezoelectric plate. The piezoelectric plate and the IDT are configured such that a radio frequency signal applied to the IDT excites a shear primary acoustic mode within the piezoelectric plate. The acoustic resonator further includes a front-side dielectric layer on the piezoelectric plate between the fingers of the IDT, wherein a resonance frequency of the acoustic resonator device has an inverse dependence on a thickness of the front-side dielectric layer.

公开(公告)号：US20250070753A1

公开(公告)日：2025-02-27

申请号：US18941877

申请日：2024-11-08

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Viktor PLESSKI ,  Soumya YANDRAPALLI ,  Robert B. HAMMOND ,  Bryant GARCIA ,  Patrick TURNER ,  Jesson JOHN ,  Ventsislav YANTCHEV

IPC: H03H9/56 ,  H03H3/02 ,  H03H9/02 ,  H03H9/13 ,  H03H9/17 ,  H10N30/87

Abstract: A filter device is provided that includes a substrate; a piezoelectric layer coupled to the substrate either directly or via one or more intermediate layers; a first interdigital transducer (IDT) of a first bulk acoustic resonator device on the piezoelectric layer and having interleaved fingers over a first cavity the first bulk acoustic resonator device; a second IDT of a second bulk acoustic resonator device on the piezoelectric layer and having interleaved fingers over a second cavity of the second bulk acoustic resonator device; a first dielectric layer having a first thickness disposed between the interleaved fingers of the first IDT; and a second dielectric layer having a second thickness disposed between the interleaved fingers of the second IDT. The first thickness is greater than the second thickness.

公开(公告)号：US20230344414A1

公开(公告)日：2023-10-26

申请号：US18330809

申请日：2023-06-07

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Ventsislav YANTCHEV ,  Viktor PLESSKI ,  Bryant GARCIA

IPC: H03H9/56 ,  H03H9/02 ,  H03H9/13 ,  H03H9/17

CPC classification number: H03H9/568 ,  H03H9/02228 ,  H03H9/02031 ,  H03H9/132 ,  H03H9/174 ,  H03H9/562 ,  H03H9/176 ,  H03H9/02015 ,  H03H9/02062 ,  H03H9/564 ,  H03H9/02039 ,  H03H2003/023

Abstract: Acoustic resonator devices, filters, and methods are disclosed. An acoustic resonator includes a substrate, a lithium niobate plate having front and back surfaces, wherein Euler angles of the lithium niobate plate are [0°, β, 0°], where β is greater than or equal to 0° and less than or equal to 60°, and an acoustic Bragg reflector between the surface of the substrate and the back surface of the lithium niobate plate. An interdigital transducer (IDT) is formed on the front surface of the piezoelectric plate. At least one finger of the IDT is disposed in a groove in the lithium niobate plate.

公开(公告)号：US20230336141A1

公开(公告)日：2023-10-19

申请号：US18340481

申请日：2023-06-23

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Tetsuya KIMURA ,  Ventsislav YANTCHEV ,  Patrick TURNER ,  Robert B. HAMMOND ,  Viktor PLESSKI ,  Soumya YANDRAPALLI ,  Bryant GARCIA ,  Jesson JOHN

IPC: H03H9/02 ,  H03H9/17 ,  H03H9/13

CPC classification number: H03H9/02157 ,  H03H9/02102 ,  H03H9/173 ,  H03H9/132 ,  H03H9/02015

Abstract: An acoustic wave device is provided that includes a cavity in a substrate, an overlapping region in which portions of adjacent first and second interdigitated electrodes oppose each other, a first gap region between a first busbar and the overlapping region and that includes the first interdigitated electrodes but not the second interdigitated electrodes, and a second gap region between a second busbar and the overlapping region and that includes the second interdigitated electrodes but not the first interdigitated electrodes. A ratio d/p is about 0.5 or less, where d is a thickness of the piezoelectric layer and p is a distance between centers of adjacent first and second interdigitated electrodes. A first wall of the cavity is located under the first busbar or the first gap region, and a second wall of the cavity is located under the second busbar or the second gap region.

公开(公告)号：US20250125783A1

公开(公告)日：2025-04-17

申请号：US18989375

申请日：2024-12-20

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Viktor PLESSKI ,  Julius KOSKELA

IPC: H03H9/02 ,  H03H9/205 ,  H03H9/56

Abstract: An acoustic resonator device is provided that includes a piezoelectric layer; and an interdigital transducer (IDT) at a surface of the piezoelectric layer, the IDT comprising interleaved fingers. At least one interleaved finger of the interleaved fingers comprises a first layer and a second layer over the first layer, wherein the first layer is between the piezoelectric layer and the second layer. Moreover, a shape of the second layer varies with respect to at least one other interleaved finger of the interleaved fingers. A thickness of the first layer is less than a thickness of the second layer.

公开(公告)号：US20250088167A1

公开(公告)日：2025-03-13

申请号：US18960226

申请日：2024-11-26

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Kuan ZHANG ,  James R. COSTA ,  Andrew KAY ,  Greg DYER ,  Viktor PLESSKI ,  Soumya YANDRAPALLI ,  Robert B. HAMMOND ,  Bryant GARCIA ,  Patrick TURNER ,  Jesson JOHN ,  Ventsislav YANTCHEV

IPC: H03H9/02 ,  H03H3/02 ,  H03H3/04 ,  H03H9/13 ,  H03H9/17 ,  H03H9/56

Abstract: Acoustic filters, resonators and methods are disclosed. An acoustic filter device includes a substrate; a piezoelectric layer attached to the substrate, wherein at least a portion of the piezoelectric layer is disposed over a cavity of the acoustic resonator device; and an interdigital transducer (IDT) on a surface of the piezoelectric layer, the IDT including interleaved fingers extending at least over the portion of the piezoelectric layer disposed over the cavity. The cavity has at least one rounded corner, and a portion of interleaved fingers extend from at least one busbar. Moreover, at least a portion of the rounded corner of the cavity is under the at least one busbar in a plan view of the piezoelectric layer.

公开(公告)号：US20240063772A1

公开(公告)日：2024-02-22

申请号：US18498887

申请日：2023-10-31

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Viktor PLESSKI ,  Julius Koskela

IPC: H03H9/02 ,  H03H9/205 ,  H03H9/56

CPC classification number: H03H9/02157 ,  H03H9/205 ,  H03H9/02228 ,  H03H9/568 ,  H03H9/02015

Abstract: There is disclosed acoustic resonators and filter devices. An acoustic resonator device includes a piezoelectric plate, and an interdigital transducer (IDT) formed on a front surface of the piezoelectric plate. The IDT includes interleaved fingers. At least one of the interleaved fingers includes a first layer adjacent the piezoelectric plate and a second layer over the first layer, wherein a width of the first layer is constant, and wherein a width of the second layer varies along a length of the at least one interleaved finger.

公开(公告)号：US20240030892A1

公开(公告)日：2024-01-25

申请号：US18478406

申请日：2023-09-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Bryant GARCIA ,  Robert B. HAMMOND ,  Patrick TURNER ,  Viktor PLESSKI ,  Ventsislav YANTCHEV ,  Neal FENZI

IPC: H03H9/17 ,  H03H9/54 ,  H03H9/02

CPC classification number: H03H9/171 ,  H03H9/54 ,  H03H9/02 ,  H03H9/13

Abstract: Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern including an interdigital transducer (IDT), fingers of the IDT on the diaphragm. A thickness of the interleaved fingers is greater than or equal to 0.85 times a thickness of the piezoelectric plate and less than or equal to 2.5 times the thickness of the piezoelectric plate. The IDT comprises a first portion having a first pitch and a first mark and a second portion having a second pitch and a second mark not equal to the first pitch and first mark.

公开(公告)号：US20240291461A1

公开(公告)日：2024-08-29

申请号：US18656141

申请日：2024-05-06

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Viktor PLESSKI ,  Bryant GARCIA ,  Julius KOSKELA ,  Patrick TURNER

IPC: H03H9/02 ,  H03H3/04 ,  H03H9/13 ,  H03H9/54

CPC classification number: H03H9/02338 ,  H03H3/04 ,  H03H9/02228 ,  H03H9/02559 ,  H03H9/132 ,  H03H9/547

Abstract: There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a single-crystal piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The piezoelectric plate and the IDT are configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the diaphragm.