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公开(公告)号:US20230119602A1
公开(公告)日:2023-04-20
申请号:US18067256
申请日:2022-12-16
发明人: Masakazu FUKUMITSU , Takashi UEDA
摘要: A resonance device that includes a MEMS substrate including a resonator having a vibrating portion, a holding portion configured to hold the vibrating portion, and an isolation groove that surrounds the vibrating portion in a plan view of the resonance device; and an upper lid facing the MEMS substrate with the resonator interposed therebetween and that includes a connection wiring electrically connected to the vibrating portion.