公开(公告)号：US09983080B2

公开(公告)日：2018-05-29

申请号：US14955073

申请日：2015-12-01

Applicant: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Yih-Hsing Wang ,  Wen-Chueh Pan ,  Ming-June Lin ,  Jen-Chieh Li ,  Tien-Fu Wu ,  Tsan-Tung Chen

IPC: G01L11/00 ,  G01L27/00

CPC classification number: G01L11/006 ,  G01L9/007 ,  G01L9/0076 ,  G01L19/04 ,  G01L27/002

Abstract: A high-temperature gas pressure measuring method includes a pressure measuring gas housing dividing step for dividing a pressure measuring gas housing into a pressure measuring room and a pressure referring room by a metal diaphragm; a gas introducing step for introducing high temperature gas into the pressure measuring room and introducing a reference pressure gas into the pressure referring room; a displacement measuring step for measuring a displacement of the metal diaphragm, wherein the displacement is caused by pressure difference between the two rooms in pressure measuring gas housing; and a pressure determining step for measuring the pressure of a high-temperature and/or corrosive to-measure pressure gas. The method dispenses with any corrosion-resistant and heat-resistant pressure sensing component and thus cuts costs.

公开(公告)号：US20160293789A1

公开(公告)日：2016-10-06

申请号：US15185076

申请日：2016-06-17

Applicant: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Wen-Chueh Pan ,  Tsang-Ming Hsu ,  Jen-Chieh Li ,  Tsan-Tung Chen ,  Chui-Yu Chiu ,  Shih-Shan Wei

IPC: H01L31/18 ,  C23C16/54 ,  C23C16/52 ,  C23C16/46 ,  G01N23/22 ,  C30B25/08 ,  C30B25/02 ,  C30B25/16 ,  C30B29/46 ,  C23C16/06 ,  C30B25/10

CPC classification number: H01L31/18 ,  C23C14/0623 ,  C23C14/562 ,  C23C14/568 ,  C30B25/025 ,  C30B25/08 ,  C30B25/10 ,  C30B25/16 ,  C30B29/46 ,  G01N23/22 ,  H01L31/0322 ,  H01L31/206 ,  Y02E10/541 ,  Y02P70/521

Abstract: The present disclosure relates to a vapor deposition equipment for fabricating CIGS film, in which a Se vapor deposition module, a In/Ga linear vapor deposition module and a Cu linear vapor deposition module are integrated in an identical vacuum chamber, used for fabricating the CIGS absorber layers on a flexible solar cell substrate by an automatic manufacturing process in accordance with an unwinding module, a heating device, a heat reducing device, a speed-controlling roller module, a cooling module, and a winding module. Moreover, in the present disclosure, a film thickness measuring module is used for measures the thickness of the CIGS chalcopyrite crystalline film on the flexible solar cell substrate, and the thickness data of the CIGS chalcopyrite crystalline film would be transmitted to the electromechanical control module for being references of the parameter modulation of following fabricating process, and such way is so-called APC (Advanced Process Control) system.

Abstract translation: 本发明涉及一种用于制造CIGS膜的气相沉积设备，其中Se蒸汽沉积模块，In / Ga线性气相沉积模块和Cu线性气相沉积模块集成在相同的真空室中，用于制造CIGS 通过根据退绕模块，加热装置，减热装置，速度控制辊模块，冷却模块和卷绕模块的自动制造工艺在柔性太阳能电池基板上的吸收层。 此外，在本公开中，膜厚测量模块用于测量柔性太阳能电池基板上的CIGS黄铜矿结晶膜的厚度，并且将CIGS黄铜矿结晶膜的厚度数据传输到机电控制模块 作为以下制造工艺的参数调制的参考，所谓的APC（Advanced Process Control）系统。