公开(公告)号：US12123792B2

公开(公告)日：2024-10-22

申请号：US17934214

申请日：2022-09-22

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Inventor： Théo Miani ,  Marc Sansa Perna

IPC: G01L1/18 ,  G01F1/28 ,  G01P15/097 ,  G01P15/08

CPC classification number: G01L1/183 ,  G01F1/28 ,  G01P15/097 ,  G01P2015/0817 ,  G01P2015/0831

Abstract: A force sensor including a support, a test body, two strain gauges, mechanical transmission means between the test body and the strain gauges so that a movement of the test body applies a strain onto the strain gauges in a first direction of the plane of the sensor, the transmission means being hinged relative to the support about a second direction in the plane of the sensor, the test body being accommodated within a first volume, the strain gauges being accommodated within a second volume, insulated by sealed insulation means. The sensor includes a sacrificial layer, a nanometric layer, a protective layer and a micrometric layer. The test body and at least one portion of the support are formed in the substrate, the sealed insulation means are partially formed by the nanometric layer and by the sacrificial layer, and the strain gauges are formed in the nanometric layer.

公开(公告)号：US11937511B2

公开(公告)日：2024-03-19

申请号：US18109180

申请日：2023-02-13

Applicant: Apple Inc.

Inventor： Majid Khan ,  Roberto M. Ribeiro ,  Savas Gider

IPC: H10N30/20 ,  G01L1/16 ,  G01L1/18 ,  G01L9/00 ,  G01L19/00 ,  G01S3/781 ,  H10N30/00 ,  H10N30/88

CPC classification number: H10N30/88 ,  G01L1/167 ,  G01L1/183 ,  G01L9/0055 ,  G01L19/0092 ,  G01S3/781 ,  H10N30/1071 ,  H10N30/2047 ,  B81B2201/0264 ,  B81B2201/032

Abstract: Aspects of the subject disclosure include a pressure-sensing device consisting of a housing including a membrane and one or more piezoresistive elements disposed on the membrane to sense a displacement due to a deflection of the membrane. A first set of electrodes is disposed over the membrane, and a second set of electrodes is disposed on a permeable port of the device at a distance from the membrane. The first and second sets of electrodes form an electrostatic actuator to exert a repulsive force onto the membrane to reduce the deflection of the membrane.

公开(公告)号：US20170059420A1

公开(公告)日：2017-03-02

申请号：US15248756

申请日：2016-08-26

Applicant: Commissariat a L'Energie Atomique et aux Energies Alternatives ,  POLITECNICO DI MILANO

Inventor： Patrice REY ,  Guillaume JOURDAN ,  Philippe ROBERT ,  Giacomo LANGFELDER ,  Antonio F. LONGONI ,  Stefano DELLEA

IPC: G01L1/18 ,  G01C19/5607 ,  G01P15/12

CPC classification number: G01L1/183 ,  G01C19/5607 ,  G01C19/5755 ,  G01P15/123 ,  G01P2015/0814 ,  G01P2015/0817 ,  G01P2015/0857

Abstract: Piezoresistive detection resonant device comprising a substrate, a mobile par configured to move with respect the substrate, suspension elements suspending the mobile part to the substrate, a piezoresistive detection device to detect the motions of the mobile part, said piezoresistive detection device comprising at least one strain gauge, wherein the piezoresistive detection resonant device also comprises a folded spring with at least two spring arms, connected to the mobile part and configured to be deformed by the motion of the mobile part, the at least one gauge being suspended between the substrate and the folded spring in such manner that the deformation of the gauge is reduced compared to the motion of the mobile part.

Abstract translation: 压阻检测共振装置，包括基板，被配置为相对于基板移动的移动配件，将移动部件悬置于基板的悬架元件，压阻检测装置，用于检测移动部件的运动，所述压阻检测装置包括至少一个 应变计，其中所述压阻检测谐振装置还包括具有至少两个弹簧臂的折叠弹簧，所述弹簧臂连接到所述可移动部件并且被配置为通过所述可移动部件的运动而变形，所述至少一个量规悬挂在所述基板和 折叠的弹簧以与移动部件的运动相比减小量规的变形的方式。

公开(公告)号：US20120000288A1

公开(公告)日：2012-01-05

申请号：US13254298

申请日：2010-03-08

Applicant: Akira Matsuura ,  Hideo Ohkoshi ,  Tsutomu Nakanishi ,  Takashi Kawai

Inventor： Akira Matsuura ,  Hideo Ohkoshi ,  Tsutomu Nakanishi ,  Takashi Kawai

IPC: G01N29/12

CPC classification number: G01L1/183

Abstract: A physical quantity sensor includes a deformable body in which strain occurs in response to a stress applied thereto, a vibrator vibrating with a frequency according to the strain or with an amplitude according to the strain, and a processor processing a signal output from the vibrator. The vibrator is mounted to the deformable body such that the strain transmits to the vibrator. The processor is bonded to the deformable body such that the strain does not substantially transmit to the processor. This physical quantity sensor can stably detects strain and tension acting on an object.

Abstract translation: 物理量传感器包括响应于施加的应力而发生应变的变形体，根据应变的频率或根据应变的幅度振动的振动器，以及处理从振动器输出的信号的处理器。 振动器安装到变形体上，使得应变传递到振动器。 处理器被结合到可变形体，使得该应变基本上不传送到处理器。 该物理量传感器可以稳定地检测作用在物体上的应变和张力。

公开(公告)号：US20080314148A1

公开(公告)日：2008-12-25

申请号：US12214627

申请日：2008-06-20

Applicant: Philippe Robert

Inventor： Philippe Robert

IPC: G01P15/12 ,  G01L1/22

CPC classification number: B81B3/0086 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0264 ,  B81B2201/0271 ,  G01C19/574 ,  G01C19/5755 ,  G01C19/5769 ,  G01L1/183 ,  G01P15/0802 ,  G01P15/097 ,  H03H9/02259

Abstract: This invention relates to a resonant device with detection in the piezo-resistive plane made using surface technologies on a bulk, which comprises a resonator connected to this bulk by at least one embedded portion, means of exciting this resonator and detection means comprising at least one suspended beam type strain gauge made from piezo-resistive material, in which each strain gauge has a common plane with the resonator, and is connected to this resonator at a point situated outside of this at least one embedded portion to increase the stress observed by this strain gauge.

Abstract translation: 本发明涉及一种谐振装置，其在使用体上的表面技术制成的压电平面中具有检测功能，该谐振装置包括通过至少一个嵌入部分连接到该体的谐振器，激励该谐振器的装置和包括至少一个 由压电材料制成的悬挂梁式应变计，其中每个应变计具有与谐振器的公共平面，并且在位于该至少一个嵌入部分外部的点处连接到该谐振器，以增加由该观测到的应力 应变计。

公开(公告)号：US20040011144A1

公开(公告)日：2004-01-22

申请号：US10416369

申请日：2003-05-12

Inventor： Claudio Cavalloni ,  Marco Gnielka ,  Martin Haueis

IPC: G01L001/04

CPC classification number: G01L9/0019 ,  G01L1/183

Abstract: A sensor to reduce the loads due to different thermal expansions between a chip containing the sensing element, said chip preferably consisting of silicon, and the housing, typically made of steel, which can falsify the measuring results. The chip includes central and lateral fixations, which are mechanically decoupled from each other and are arranged on that end of the sensing element where the force application occurs.

Abstract translation: 一种传感器，用于减少由于包含感测元件的芯片，所述芯片优选由硅构成的芯片与通常由钢制成的壳体之间的不同热膨胀的负载，这可能会损坏测量结果。 芯片包括中心和侧向固定，它们彼此机械地分离并且布置在感测元件的施加力的地方。

公开(公告)号：US06458698B2

公开(公告)日：2002-10-01

申请号：US09908112

申请日：2001-07-17

Applicant: Ilan Golecki ,  Margaret Eagan

Inventor： Ilan Golecki ,  Margaret Eagan

IPC: H01L2144

CPC classification number: B81C1/00666 ,  B81C2201/017 ,  G01L1/183 ,  G01P15/0802 ,  G01P15/097 ,  G01P2015/0828 ,  H01L21/28506 ,  H01L21/2855 ,  H01L21/32051

Abstract: A method of forming a thin film metallization layer having a predetermined residual stress and a predetermined sheet resistance and force measuring devices formed using the methods.

Abstract translation: 一种形成具有预定残余应力的薄膜金属化层和预定的薄层电阻的方法以及使用这些方法形成的力测量装置。

公开(公告)号：US20020011637A1

公开(公告)日：2002-01-31

申请号：US09855113

申请日：2001-05-14

Inventor： Terje Kvisteroey ,  Jacobsen Henrik

IPC: H01L029/82

CPC classification number: G01P21/00 ,  G01F1/28 ,  G01L1/183 ,  G01P15/097 ,  G01P2015/0828

Abstract: A sensor formed from a semiconductor material. The device comprises a support frame, a sensing element; and means for vibrating the sensing element at a frequency corresponding generally to a first resonant frequency vibration mode. Error detection means detects the resonant frequency vibration mode, the output of the error detection means being indicative of existence or otherwise an expected response of the resonant frequency vibration mode to the excitation. Means for detecting the deformation of the sensing element provides an output indicative of the parameter to be sensed, the deformation detecting means and error detection means being formed from the same elements.

Abstract translation: 由半导体材料形成的传感器。 该装置包括支撑框架，感测元件; 以及用于以大致对应于第一谐振频率振动模式的频率振动所述感测元件的装置。 误差检测装置检测谐振频率振动模式，误差检测装置的输出表示谐振频率振动模式对激励的存在或预期的响应。 用于检测感测元件的变形的装置提供指示要被感测的参数的输出，变形检测装置和误差检测装置由相同的元件形成。

公开(公告)号：US06173612B1

公开(公告)日：2001-01-16

申请号：US09187288

申请日：1998-11-05

Applicant: Ilan Golecki ,  Margaret Eagan

Inventor： Ilan Golecki ,  Margaret Eagan

IPC: G01P1510

CPC classification number: G01P15/097 ,  G01L1/183 ,  G01P15/0802 ,  G01P2015/0828

Abstract: Described are various improved methods of forming electronic devices, electro-mechanical devices, force-sensing devices, and accelerometers. Also described are various improved electronic devices, electro-mechanical devices, force-sensing devices, and accelerometers. The device comprises a plurality of vibrating beams joined with a support portion and configured for movement relative to the support portion. A layer of electrically conductive material is disposed over at least some of the surface of the moveable portion and support portion, the layer comprising an inert or a noble material having a Young's modulus which is greater than that of elemental gold. Alternatively, the layer may comprise an inert material having a coefficient of expansion which is less than that of elemental gold.

Abstract translation: 描述了形成电子装置，机电装置，力感测装置和加速度计的各种改进的方法。 还描述了各种改进的电子设备，机电装置，力感测装置和加速度计。 该装置包括多个与支撑部分结合的振动梁，并被配置为相对于支撑部分移动。 一层导电材料设置在可移动部分和支撑部分的至少一些表面上，该层包括具有大于元素金的杨氏模量的惰性或贵金属。 或者，该层可以包括具有小于元素金的膨胀系数的惰性材料。

公开(公告)号：US5834333A

公开(公告)日：1998-11-10

申请号：US957401

申请日：1997-10-23

Applicant: James D. Seefeldt ,  Michael F. Mattes

Inventor： James D. Seefeldt ,  Michael F. Mattes

IPC: G01L1/10 ,  G01L1/18 ,  G01L9/00 ,  G01P15/08 ,  H01L29/84 ,  H01L21/00 ,  H01L21/76

CPC classification number: G01P15/0802 ,  G01L1/183 ,  G01L9/0019 ,  G01L9/0045

Abstract: A method of forming apparatus including a force transducer on a silicon substrate having an upper surface, the silicon substrate including a dopant of one of the n-type or the p-type, the force transducer including a cavity having spaced end walls and a beam supported in the cavity, the beam extending between the end walls of the cavity, the method including the steps of: (a) implanting in the substrate a layer of a dopant of said one of the n-type or the p-type; (b) depositing an epitaxial layer on the upper surface of the substrate, the epitaxial layer including a dopant of the other of the n-type or the p-type; (c) implanting a pair of spaced sinkers through the epitaxial layer and into electrical connection with said layer, each of the sinkers including a dopant of the one of the n-type or the p-type; (d) anodizing the substrate to form porous silicon of the sinkers and the layer; (e) oxidizing the porous silicon to form silicon dioxide; and (f) etching the silicon dioxide to form the cavity and beam.