公开(公告)号：US09904176B2

公开(公告)日：2018-02-27

申请号：US15145816

申请日：2016-05-04

Applicant: National Sun Yat-sen University ,  LandMark Optoelectronics Corporation

Inventor： Yung-Jr Hung ,  Wei Lin

IPC: G03B27/52 ,  G03F7/20 ,  G02B26/08 ,  G02B27/10 ,  G02B27/28

CPC classification number: G03F7/70191 ,  G02B26/0816 ,  G02B27/106 ,  G02B27/286 ,  G03F7/70408

Abstract: An interference lithography device is provided with a laser source for providing a laser beam; a base thereon having a beam splitter for dividing the laser beam into a first beam portion and a second beam portion, a beam expander, a first set of reflectors, and a second set of reflectors; a set of lower reflectors; and a sample carrying stage for holding a substrate. The first beam portion and the second beam portion are respectively reflected from the second set of reflectors and then respectively reflected by the set of lower reflectors to form an interference pattern on the substrate.

公开(公告)号：US11313682B1

公开(公告)日：2022-04-26

申请号：US17125949

申请日：2020-12-17

Applicant: NATIONAL SUN YAT-SEN UNIVERSITY

Inventor： Yung-Jr Hung

IPC: G01C19/72 ,  G02B6/27 ,  G02B6/293

Abstract: A silicon photonic integrated circuit is provided, which includes a first optical power splitter, a second optical power splitter, a first grating coupler and a second grating coupler. The first optical power splitter has an input, a first output and a second output, in which the input is configured to receive an inputted beam, and the first output is configured to output a returned beam. The second optical power splitter has an input, a first output and a second output, in which the input is coupled to the second output of the first optical power splitter. The first and second grating couplers are respectively coupled to the first and second outputs of the second optical power splitter, and are configured to optically couple two opposite ends of a fiber coil, respectively.

公开(公告)号：US20170329146A1

公开(公告)日：2017-11-16

申请号：US15586407

申请日：2017-05-04

Applicant: NATIONAL SUN YAT-SEN UNIVERSITY

Inventor： Yung-Jr Hung ,  Han-Jung Chang

IPC: G02B27/09 ,  G02B27/28

CPC classification number: G02B27/0927 ,  G02B27/0944 ,  G02B27/095 ,  G02B27/283

Abstract: A laser interference lithography system with flat-top intensity profile comprises a laser source for emitting a coherent laser beam, a first beam expander for adjusting the coherent laser beam size, a refractive beam shaper for converting a Gaussian intensity profile inherent to the coherent laser beam into a flat-top one and outputting a first collimated laser beam, a second beam expander for receiving the first collimated laser beam and outputting a second collimated laser beam, a sample holder for holding a substrate, and at least one reflector for reflecting the second collimated laser beam to generate a third collimated laser beam. The second and third collimated laser beams are transmitted to the substrate at a predetermined angle to create an interference pattern exposed onto the substrate.

公开(公告)号：US12092872B2

公开(公告)日：2024-09-17

申请号：US17933487

申请日：2022-09-20

Applicant: NATIONAL SUN YAT-SEN UNIVERSITY

Inventor： Yung-Jr Hung ,  Tzu-Hsiang Yen

IPC: G02B6/293

CPC classification number: G02B6/29355 ,  G02B6/2938

Abstract: A waveguide division multiplexer and demultiplexer includes a first-stage Mach-Zehnder interferometer (MZI) and two second-stage MZIs. The first-stage MZI includes two input ends and two output ends, in which one of the inputs is configured to receive an input optical beam with a first center wavelength and a second center wavelength, and the output ends are configured to respectively transmit first-stage output optical beams respectively with the first center wavelength and the second center wavelength. One input terminals of the second-stage MZI are configured to respectively receive the first-stage output optical beams, and one output terminals of the second-stage MZI are configured to transmit second-stage output optical beams with the first and second center wavelengths, respectively. Each second-stage MZI is configured in cross-state condition.

公开(公告)号：US10916915B2

公开(公告)日：2021-02-09

申请号：US16228774

申请日：2018-12-21

Applicant: NATIONAL SUN YAT-SEN UNIVERSITY

Inventor： Yung-Jr Hung ,  Yen-Chieh Wang ,  Ping-Feng Hsieh ,  Wei Lin

IPC: H01S5/12 ,  H01S5/343 ,  H01S5/042 ,  H01S5/028 ,  H01S5/22

Abstract: A distributed feedback (DFB) semiconductor laser device includes an active layer, a first grating layer and a second grating. The first grating layer has a first grating structure with a first grating period. The second grating layer has a second grating structure with a second grating period substantially different from the first grating period. The active layer, the first grating layer and the second grating layer are vertically stacked, and the equivalent grating period of the DFB semiconductor laser device is (2×P1×P2)/(P1+P2), where P1 and P2 respectively represent the first grating period and the second grating period.

公开(公告)号：US10042173B2

公开(公告)日：2018-08-07

申请号：US15586407

申请日：2017-05-04

Applicant: NATIONAL SUN YAT-SEN UNIVERSITY

Inventor： Yung-Jr Hung ,  Han-Jung Chang

IPC: G02B27/09 ,  G02B27/28

Abstract: A laser interference lithography system with flat-top intensity profile comprises a laser source for emitting a coherent laser beam, a first beam expander for adjusting the coherent laser beam size, a refractive beam shaper for converting a Gaussian intensity profile inherent to the coherent laser beam into a flat-top one and outputting a first collimated laser beam, a second beam expander for receiving the first collimated laser beam and outputting a second collimated laser beam, a sample holder for holding a substrate, and at least one reflector for reflecting the second collimated laser beam to generate a third collimated laser beam. The second and third collimated laser beams are transmitted to the substrate at a predetermined angle to create an interference pattern exposed onto the substrate.