公开(公告)号：US20170010315A1

公开(公告)日：2017-01-12

申请号：US15117884

申请日：2015-02-12

Applicant: NHK SPRING CO., LTD.

Inventor： Kohei HIRONAKA ,  Takashi NIDAIRA ,  Tomohiro YONEDA

IPC: G01R31/02 ,  G01R1/073 ,  H01R13/24 ,  G01R31/28

CPC classification number: G01R31/026 ,  G01R1/073 ,  G01R31/26 ,  G01R31/2886 ,  G01R31/2896 ,  H01R13/2435

Abstract: A test unit according to the present invention includes: a first contact probe contacting with an electrode provided on a front surface of one of contact targets, and contacting with an electrode of the other contact target; a second contact probe contacting with an electrode provided on a back surface of the one of contact targets and contacting with an electrode of a substrate; a first probe holder including a suction holder that sucks and holds the one of contact targets, and accommodating and holding therein the first contact probes; a second probe holder accommodating and holding therein the second contact probes; and a base portion, which is layered over the first probe holder and holds the other contact target at a side thereof layered over the first probe holder; and a gap is formed between the other contact target and the first probe holder.

Abstract translation: 根据本发明的测试单元包括：与设置在一个接触靶的前表面上并与另一个接触靶的电极接触的电极接触的第一接触探针; 与设置在所述一个接触靶的背面上的电极接触的第二接触探针，并与基底的电极接触; 第一探针保持器，其包括吸附并保持所述一个接触靶的吸持保持器，以及容纳并保持所述第一接触探针; 第二探针架，容纳并保持在其中的第二接触探针; 以及基部，其分层在所述第一探针保持器上并且将所述另一个接触靶保持在其分层在所述第一探针保持器上的一侧; 并且在另一个接触靶和第一探针保持器之间形成间隙。