公开(公告)号：US20240019460A1

公开(公告)日：2024-01-18

申请号：US18352291

申请日：2023-07-14

Applicant: NHK Spring Co., Ltd.

Inventor： Osamu Ito ,  Kazuya Soma ,  Hajime Arai

IPC: G01R1/04 ,  G01R1/073

CPC classification number: G01R1/045 ,  G01R1/07335 ,  G01R1/06772

Abstract: A probe holder includes: a first layered member including members layered over one another; and a second layered member bonded to the first layered member and including members layered over one another. Each of the first and second layered members includes: a first member made of a material having a low dielectric constant; a second member provided on one of surfaces of the first member and having higher hardness than the first member; and a third member provided on the other surface of the first member and having higher hardness than the first member. The probe holder further includes a holder hole formed by bonding the third members of the first and second layered members, the holder hole penetrating the probe holder in a direction in which the first and second layered members are layered, and having a stepped hole shape having a smaller diameter in the second members.