公开(公告)号：US20240302568A1

公开(公告)日：2024-09-12

申请号：US18670047

申请日：2024-05-21

申请人： NIL Technology ApS

发明人： Jesper Fly Hansen ,  Villads Egede Johansen ,  Maksim Zalkovskij ,  Brian Bilenberg ,  James Eilertsen

IPC分类号： G02B1/00 ,  B29D11/00 ,  C23C16/04 ,  C23C16/455 ,  G02B5/18

CPC分类号： G02B1/002 ,  B29D11/0074 ,  C23C16/042 ,  G02B5/1857 ,  C23C16/45525 ,  G02B2207/101

摘要： Methods of manufacturing an optical device can include, in some implementations, providing a substrate having a first polymeric layer on a surface of the substrate and a second polymeric layer on the first polymeric layer, forming first openings in the second polymeric layer to define an etch mask composed of material of the second polymeric layer, and etching to form second openings in the first polymeric layer, wherein locations of the second openings are defined by the etch mask. A material is deposited in the second openings to form meta-atoms of a first metastructure, wherein adjacent ones of the meta-atoms are separated from one another by polymeric material of the first polymeric layer. Optical devices including metastructures can be formed, where meta-atoms of the metastructure have a relatively high aspect ratio.

公开(公告)号：US20230194757A1

公开(公告)日：2023-06-22

申请号：US17925941

申请日：2021-05-17

申请人： NIL Technology ApS

发明人： Jesper Fly Hansen ,  Villads Egede Johansen ,  Maksim Zalkovskij ,  Brian Bilenberg ,  James Eilertsen

IPC分类号： G02B1/00 ,  G02B1/18 ,  G02B7/00 ,  G02F1/01

CPC分类号： G02B1/002 ,  G02B1/18 ,  G02B7/003 ,  G02F1/0102 ,  G02B2207/101

摘要： Manufacturing an optical device includes providing a substrate (102) having a polymeric layer (104) on a surface of the substrate, forming openings in the polymeric layer, and depositing a material in the openings to form meta-atoms (114, 214) of a first metastructure. Adjacent ones of the meta-atoms are separated from one another by polymeric material of the polymeric layer. Optical devices that include one or more metastructures in which meta-atoms are separated from one another by polymeric material are described, as are modules that incorporate the optical devices.

公开(公告)号：US20230228910A1

公开(公告)日：2023-07-20

申请号：US18010874

申请日：2021-06-16

申请人： NIL Technology ApS

发明人： Jesper Fly Hansen ,  Villads Egede Johansen ,  Maksim Zalkovskij ,  Brian Bilenberg ,  James Eilertsen

IPC分类号： G02B1/00 ,  B29D11/00 ,  G02B5/18

CPC分类号： G02B1/002 ,  B29D11/0074 ,  G02B5/1857 ,  G02B2207/101

摘要： Methods of manufacturing an optical device can include, in some implementations, providing a substrate having a first polymeric layer on a surface of the substrate and a second polymeric layer on the first polymeric layer, forming first openings in the second polymeric layer to define an etch mask composed of material of the second polymeric layer, and etching to form second openings in the first polymeric layer, wherein locations of the second openings are defined by the etch mask. A material is deposited in the second openings to form meta-atoms of a first metastructure, wherein adjacent ones of the meta-atoms are separated from one another by polymeric material of the first polymeric layer. Optical devices including metastructures can be formed, where meta-atoms of the metastructure have a relatively high aspect ratio.

公开(公告)号：US20230350112A1

公开(公告)日：2023-11-02

申请号：US17923130

申请日：2021-05-07

申请人： NIL Technology ApS

发明人： Brian Bilenberg ,  Tobias Hedegaard Bro

IPC分类号： G02B5/18

CPC分类号： G02B5/1857

摘要： The present disclosure describes techniques for fabricating a multi-level structure. For example, in accordance with some implementations, the disclosure describes techniques for fabricating a multi-level master from which optical elements can be replicated either directly or by way of a sub-master. The disclosure also describes multi-level optical elements and processes for making them.