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公开(公告)号:US20240222938A1
公开(公告)日:2024-07-04
申请号:US18289168
申请日:2022-05-04
IPC分类号: H01S5/183
CPC分类号: H01S5/18386 , H01S5/18311 , H01S5/18347 , H01S5/18377
摘要: The manufacture of surface emitting lasers that include an optical metastructure are described. For example, in accordance with some implementations, a method includes providing a sequence of semiconductor layers and processing the sequence of semiconductor layers to form an upper reflector disposed over an active layer, the active layer being disposed over a lower reflector, and the lower reflector layer being disposed over a substrate. The semiconductor layers in which the upper reflector is formed include one or more outer semiconductor layers, and the method includes forming a metastructure in the one or more outer semiconductor layers.