公开(公告)号：US20240383127A1

公开(公告)日：2024-11-21

申请号：US18689560

申请日：2022-08-03

Applicant: NISSIN ION EQUIPMENT CO., LTD.

Inventor： Masatoshi ONODA ,  Daiki TAKASHIMA

IPC: B25J5/02 ,  B25J9/10 ,  B25J11/00 ,  H01L21/67 ,  H01L21/677

Abstract: A substrate transfer device includes a shaft member rotationally movable about a rotation axis, a first swing member coupled to a holder for holding a substrate, a first support member supporting the first swing member to be linearly displaced, a second swing member having a linearly moving part linearly displaceable, and a second support member supporting the second swing member to be linearly displaced The first support member is rotationally moved about the rotation axis integrally with the second support member together with the second swing member being linearly displaced with respect to the second support member in a manner interlocked with a linear movement of the linearly moving part, and the first swing member is linearly displaced with respect to the first support member via the shaft member, such that the holder is linearly displaced.