公开(公告)号：US11512943B2

公开(公告)日：2022-11-29

申请号：US16462247

申请日：2016-11-23

Applicant: NOVA LTD.

Inventor： Danny Grossman ,  Shahar Gov ,  Moshe Vanhotsker ,  Guy Engel ,  Elad Dotan

IPC: G01B11/24 ,  H01L21/66 ,  G01N21/95

Abstract: An optical system and method are presented for use in measurements on an upper surface of a layered sample when located in a measurement plane. The optical system is configured as a normal-incidence system having an illumination channel and a collection channel, and comprises an objective lens unit and a light propagation affecting device. The objective lens unit is accommodated in the illumination and collection channels, thereby defining a common optical path for propagation of illuminating light from the illumination channel toward an illuminating region in the measurement plane and for propagation of light returned from measurement plane to the collection channel. The light propagation affecting device comprises an apertured structure located in at least one of the illumination and collection channels, and configured to provide angular obscuration of light propagation path for blocking angular segments associated with light propagation from regions outside the illuminated region.

公开(公告)号：US11994374B2

公开(公告)日：2024-05-28

申请号：US17309318

申请日：2019-11-17

Applicant: NOVA LTD.

Inventor： Elad Dotan ,  Moshe Vanhotsker ,  Shimon Yalov ,  Valery Deich ,  Roi Ringel ,  Beni Shulman ,  Yosi Bar On ,  Shahar Bassan

IPC: G01B11/02 ,  G01B5/00 ,  G01N21/84 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  G03F7/00 ,  H01L21/66

CPC classification number: G01B11/02 ,  G01B5/0004 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G03F7/70625 ,  G03F7/706849 ,  G03F7/706851 ,  H01L22/12 ,  G01N2021/8411 ,  G01N2021/8825

Abstract: A measurement system is presented configured for integration with a processing equipment for applying optical measurements to a structure. The measurement system comprises: a support assembly for holding a structure under measurements in a measurement plane, configured and operable for rotation in a plane parallel to the measurement plane and for movement along a first lateral axis in said measurement plane; an optical system defining illumination and collection light channels of normal and oblique optical schemes and comprising an optical head comprising at least three lens units located in the illumination and collection channels; a holder assembly comprising: a support unit for carrying the optical head, and a guiding unit for guiding a sliding movement of the support unit along a path extending along a second lateral axis perpendicular to said first lateral axis; and an optical window arrangement comprising at least three optical windows made in a faceplate located between the optical head at a certain distance from the measurement plane. The optical windows are aligned with the illumination and collection channels for, respectively, propagation of illuminating light from the optical head and propagation of light returned from an illuminated region to the optical head, in accordance with the normal and oblique optical schemes.