公开(公告)号：US20190154594A1

公开(公告)日：2019-05-23

申请号：US16231718

申请日：2018-12-24

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： GILAD BARAK ,  DANNY GROSSMAN ,  DROR SHAFIR ,  YOAV BERLATZKY ,  YANIR HAINICK

IPC: G01N21/956 ,  G01B9/02 ,  G01B11/06 ,  G01N21/88

Abstract: A measurement system for use in measuring parameters of a patterned sample, the system including a broadband light source, an optical system configured as an interferometric system, a detection unit, and a control unit, where the interferometric system defines illumination and detection channels having a sample arm and a reference arm having a reference reflector, and is configured for inducing an optical path difference between the sample and reference arms, the detection unit for detecting a combined light beam formed by a light beam reflected from the reflector and a light beam propagating from a sample's support, and generating measured data indicative of spectral interference pattern formed by spectral interference signatures, and the control unit for receiving the measured data and applying a model-based processing to the spectral interference pattern for determining one or more parameters of the pattern in the sample.