Gathering and sampling device and inspection apparatus

    公开(公告)号:US10782211B2

    公开(公告)日:2020-09-22

    申请号:US15858829

    申请日:2017-12-29

    摘要: A sampling device and an inspection apparatus are disclosed. In one aspect, an example gathering and sampling device includes a cylindrical outer housing and an inner housing disposed within the cylindrical outer housing, a cyclone chamber is formed between the cylindrical outer housing and the inner housing to generate a cyclone by injecting a gas flow into the cyclone chamber. The gathering and sampling device further includes an outer chamber body, and a plurality of gas injection orifices formed in the first inner housing end opening of the inner housing and configured to inject a gas towards a substantial center of a circular region defined by an end face of the first outer housing end opening of the cylindrical outer housing.

    GATHERING AND SAMPLING DEVICE AND INSPECTION APPARATUS

    公开(公告)号:US20180188138A1

    公开(公告)日:2018-07-05

    申请号:US15858829

    申请日:2017-12-29

    IPC分类号: G01N1/22

    摘要: A sampling device and an inspection apparatus are disclosed. In one aspect, an example gathering and sampling device includes a cylindrical outer housing and an inner housing disposed within the cylindrical outer housing, a cyclone chamber is formed between the cylindrical outer housing and the inner housing to generate a cyclone by injecting a gas flow into the cyclone chamber. The gathering and sampling device further includes an outer chamber body, and a plurality of gas injection orifices formed in the first inner housing end opening of the inner housing and configured to inject a gas towards a substantial center of a circular region defined by an end face of the first outer housing end opening of the cylindrical outer housing.

    Device for collecting semi-volatile or non-volatile substrate

    公开(公告)号:US10663429B2

    公开(公告)日:2020-05-26

    申请号:US16235340

    申请日:2018-12-28

    摘要: The present disclosure provides a device for collecting semi-volatile or non-volatile substance, including an air nozzle, a front cavity and a collecting body. The air nozzle is configured to eject air to a sample attachment surface. The front cavity has an upper port. The collecting body is sealingly connected to a lower end of the front cavity, inside of which is provided with a cylindrical cavity and a conical cavity arranged vertically coaxially, and bottom of which is provided with a sample outlet. The collecting body is provided with an air intake passage which is non-coplanar with respect to an axis of the cylindrical cavity and is disposed obliquely downward and inward. The collecting body is further provided with an air exhaust passage one end of which is a discharge port connected to the interior of the cylindrical cavity, the other end is connected to an air pump.