公开(公告)号：US20160139038A1

公开(公告)日：2016-05-19

申请号：US14547908

申请日：2014-11-19

Applicant: NXP B.V.

Inventor： Marten Oldsen ,  Erik Jan Lous ,  Agata Sakic

IPC: G01N21/3504 ,  G01J3/45 ,  G01J3/26

CPC classification number: G01N21/3504 ,  G01J3/26 ,  G01J3/42 ,  G01N21/0303 ,  G01N21/031 ,  G01N21/3577 ,  G01N21/45 ,  G01N21/61 ,  G01N2021/0389 ,  G01N2021/056 ,  G01N2021/451 ,  G02B5/284 ,  G02B5/286

Abstract: One example discloses an interferometer device, including: a first side, having a first reflectivity; a second side, having a second reflectivity; a cavity disposed between the first and second sides, and having an opening configured to receive a substance; an electromagnetic source input region configured to receive an electromagnetic signal; and an electromagnetic detector output region configured to output the electromagnetic signal modulated in response to the substance in the cavity. Another example discloses a method including: fabricating a first side, having a first reflectivity; fabricating a second side, having a second reflectivity and positioned with respect to the first side so as to form a cavity; fabricating an opening configured to receive a substance; fabricating an electromagnetic source input region configured to receive an electromagnetic signal; and fabricating an electromagnetic detector output region configured to output the electromagnetic signal modulated in response to the substance in the cavity.

Abstract translation: 一个实例公开了一种干涉仪装置，包括：第一侧，具有第一反射率; 第二侧，具有第二反射率; 设置在所述第一和第二侧之间的腔，并且具有构造成接收物质的开口; 被配置为接收电磁信号的电磁源输入区域; 以及电磁检测器输出区域，被配置为输出响应于所述空腔中的物质调制的电磁信号。 另一个实例公开了一种方法，包括：制造具有第一反射率的第一侧; 制造第二侧，具有第二反射率并相对于第一侧定位以形成空腔; 制造构造成接收物质的开口; 制造被配置为接收电磁信号的电磁源输入区域; 以及制造电磁检测器输出区域，所述电磁检测器输出区域被配置为输出响应于所述空腔中的物质调制的电磁信号。