Apparatus for measuring surface form
    1.
    发明授权
    Apparatus for measuring surface form 失效
    用于测量表面形状的装置

    公开(公告)号:US06459493B1

    公开(公告)日:2002-10-01

    申请号:US08663742

    申请日:1996-06-14

    IPC分类号: G01B1124

    CPC分类号: G01B11/06

    摘要: A second harmonic generating element radiates a laser beam having a wavelength of 532 nm onto a substrate surface. The laser beam corresponds to the second harmonic beam of a fundamental laser beam having a wavelength of 1064 nm. An emitting optical system emits the laser beam vertically to the substrate surface so that the laser beam is made linear. An observing means has a optical axis Lo oriented in a different direction from a optical axis Li of the emitting optical system and provides a CCD image sensor served as a two-dimensional imaging device located in conjugation with the height or thickness of the substrate surface. The observing means operates to observe a light section image formed by the linear beam fired by the emitting optical system onto the substrate surface. Then, an image processing means precisely measures the form of the surface of an object to be measured as suppressing degrade of an S/N ratio, on the basis of the image data of the light section image observed by the observing means.

    摘要翻译: 二次谐波发生元件将具有532nm波长的激光束辐射到衬底表面上。 激光束对应于波长为1064nm的基本激光束的二次谐波。 发射光学系统将激光束垂直地发射到衬底表面,使得激光束被线性化。 观察装置具有沿与发射光学系统的光轴Li不同的方向定向的光轴Lo,并且提供用作与基板表面的高度或厚度共轭的二维成像装置的CCD图像传感器。 观察装置用于观察由发射光学系统激发的线性光束形成的光线图像到基板表面上。 然后,图像处理装置基于由观察装置观察到的光截面图像的图像数据,精确地测量待测物体的表面的形状,以抑制S / N比的降低。

    Laser light beam generating apparatus
    2.
    发明授权
    Laser light beam generating apparatus 失效
    激光光束发生装置

    公开(公告)号:US5367531A

    公开(公告)日:1994-11-22

    申请号:US24627

    申请日:1993-03-01

    摘要: A laser light beam generating apparatus includes at least one light beam source, first and second reflectors, a non-linear optical crystal element and an actuator. The light beam source emits a light beam. The non-linear optical crystal element is provided between the first reflector and the second reflector. A light beam emitted from the light beam source is incident on the non-linear optical crystal element through the first reflector. The actuator actuates at least one of the first and second reflectors along an optical axis of the light beam emitted from the light beam source.

    摘要翻译: 激光束产生装置包括至少一个光束源,第一和第二反射器,非线性光学晶体元件和致动器。 光束源发射光束。 非线性光学晶体元件设置在第一反射器和第二反射器之间。 从光束源发射的光束通过第一反射器入射在非线性光学晶体元件上。 致动器沿着从光束源发射的光束的光轴致动第一和第二反射器中的至少一个。

    Control circuit for an inverter operable in an individual mode and an
interconnection mode
    3.
    发明授权
    Control circuit for an inverter operable in an individual mode and an interconnection mode 失效
    用于在单独模式和互连模式下可操作的逆变器的控制电路

    公开(公告)号:US5255176A

    公开(公告)日:1993-10-19

    申请号:US731879

    申请日:1991-07-18

    CPC分类号: H02M7/48

    摘要: A control circuit for an inverter for converting DC voltage to AC voltage, operable in an individual mode and an interconnection mode, and including a synchronous compensating circuit in which, when the inverter is operating in a power system synchronous operation mode under control of a synchronous-interconnection control system, a quantity of an instantaneous voltage variation component occurring in the power system is separated, in order to detect respectively, a quantity of the variation of the component in same phase with a reference voltage vector of the output voltage of the inverter, and a quantity of the variation of the component orthogonal to the reference voltage vector. The detected variation quantities are respectively added to the outputs of a voltage adjuster and a phase adjuster in the synchronous-interconnection control system. The circuit is capable of compensating an instantaneous variation of the power system without a decrease of circuit stability.

    3-D image display unit
    6.
    发明授权
    3-D image display unit 有权
    3-D图像显示单元

    公开(公告)号:US07204593B2

    公开(公告)日:2007-04-17

    申请号:US10502733

    申请日:2003-12-02

    IPC分类号: G03B21/00 G02B26/00

    摘要: The three-dimensional image display apparatus of the present invention includes an optical modulator array which modulates the light intensity of an incident light to be an image signal light and an optical deflector array which shifts an image focusing position of each pixel light from the optical modulator array in the direction of an optical axis to form a three-dimensional section image, wherein the optical modulator array is formed of a diffractive type array in which a plurality of light reflective films are driven and correspond to a light of one pixel and the optical reflector array is formed of an array in which a plurality of light reflective films are driven and correspond to a light of one pixel.

    摘要翻译: 本发明的三维图像显示装置包括调制作为图像信号光的入射光的光强度的光学调制器阵列和将来自光学调制器的每个像素光的图像聚焦位置偏移的光学偏转器阵列 在光轴的方向上排列以形成三维截面图像,其中光调制器阵列由衍射型阵列形成,其中多个光反射膜被驱动并对应于一个像素的光,并且光学 反射器阵列由其中多个光反射膜被驱动并对应于一个像素的光的阵列形成。

    Image projector and image projecting method
    7.
    发明申请
    Image projector and image projecting method 失效
    图像投影仪和图像投影方法

    公开(公告)号:US20050128578A1

    公开(公告)日:2005-06-16

    申请号:US10486055

    申请日:2003-06-10

    摘要: In an image projection on a screen, an image projection apparatus improves the safety of entry into a projection region by the human body and does not bring about the increase of complexity of the configuration thereof owing to the improvement of the safety. A monitoring area is regulated on the outside of the projection area (3) of the screen (2). A detection wave such as infrared rays is emitted from a detection wave source (1c) of the image projection apparatus (1). A reflection wave from the monitoring area is detected by reflection wave detection means (1d) such as a CCD sensor. Whether the human body or an obstacle enters the monitoring space, which is surrounded by a detection wave (4) between the main body unit of the image projection apparatus (1) and the screen (2), or not is detected. Once the entry is detected, the intensity of the radiation light traveling toward the projection area (3) is reduced or cut off according to the situation or the degree of the entry.

    摘要翻译: 在屏幕上的图像投影中,图像投影装置提高了人体进入投影区域的安全性,并且由于安全性的提高,不会导致其配置的复杂性的增加。 监视区域在屏幕(2)的投影区域(3)的外侧被调节。 从图像投影装置(1)的检测波源(1C)发射诸如红外线的检测波。 来自监视区域的反射波由诸如CCD传感器的反射波检测装置(1d)检测。 检测人体或障碍物是否进入由图像投影装置(1)的主体单元和屏幕(2)之间的检测波(4)包围的监视空间。 一旦检测到入口,根据情况或进入程度减小或切断朝向投影区域(3)行进的辐射光的强度。

    Disc-shaped recording medium inspection apparatus and method
    8.
    发明授权
    Disc-shaped recording medium inspection apparatus and method 失效
    碟形记录媒体检查装置及方法

    公开(公告)号:US06388744B1

    公开(公告)日:2002-05-14

    申请号:US09533237

    申请日:2000-03-22

    IPC分类号: G01N2100

    CPC分类号: G01N21/9506

    摘要: To inspect a disc-shaped recording medium accurately, promptly and nondestructively, a laser light emitted from a laser generator 4 is irradiated through an optical fiber 8, a rotatable diffusion plate 10 and an objective lens 13 to the surface of a disc 2. A solid-state image sensing device 15 detects a return component of the light, reflected from the surface of the disc 2. A processor 6 processes the output image from the solid-state image sensing device 15 to inspect the configuration of the signal recording surface of the disc 2.

    摘要翻译: 为了准确,及时,非破坏性地检查盘形记录介质,从激光发生器4发出的激光通过光纤8,可旋转漫射板10和物镜13照射到盘2的表面。 固态图像感测装置15检测从盘2的表面反射的光的返回分量。处理器6处理来自固态图像感测装置15的输出图像,以检查信号记录表面的配置 光盘2。

    Optical pickup device
    9.
    发明授权

    公开(公告)号:US5742437A

    公开(公告)日:1998-04-21

    申请号:US555339

    申请日:1995-11-08

    摘要: An optical pickup device for condensing the light from a light source on a signal recording surface by an objective lens and for detecting the return light from the signal recording surface by a light detection unit is disclosed. The optical pickup device is capable of recording and/or reproducing at least two different sorts of optical recording media. The light beam radiated from a light source is condensed by an objective lens. An aperture varying unit varies the size of an aperture of the objective lens depending upon the sorts of the optical recording media. The return light from the optical recording medium is detected by a light detection unit. The size of the aperture of the objective lens for condensing the light from the light source is varied depending upon the difference in substrate thickness of the different sorts of the optical recording media, thus assuring high-quality recording/reproduction for two or more different sorts of optical recording media.

    Image projector and image projecting method
    10.
    发明授权
    Image projector and image projecting method 失效
    图像投影仪和图像投影方法

    公开(公告)号:US07364309B2

    公开(公告)日:2008-04-29

    申请号:US10486055

    申请日:2003-06-10

    IPC分类号: G03B21/14

    摘要: In an image projection on a screen, an image projection apparatus improves the safety of entry into a projection region by the human body and does not bring about the increase of complexity of the configuration thereof owing to the improvement of the safety. A monitoring area is regulated on the outside of the projection area (3) of the screen (2). A detection wave such as infrared rays is emitted from a detection wave source (1c) of the image projection apparatus (1). A reflection wave from the monitoring area is detected by reflection wave detection means (1d) such as a CCD sensor. Whether the human body or an obstacle enters the monitoring space, which is surrounded by a detection wave (4) between the main body unit of the image projection apparatus (1) and the screen (2), or not is detected. Once the entry is detected, the intensity of the radiation light traveling toward the projection area (3) is reduced or cut off according to the situation or the degree of the entry.

    摘要翻译: 在屏幕上的图像投影中,图像投影装置提高了人体进入投影区域的安全性,并且由于安全性的提高,不会导致其配置的复杂性的增加。 监视区域在屏幕(2)的投影区域(3)的外侧被调节。 从图像投影装置(1)的检测波源(1C)发射诸如红外线的检测波。 来自监视区域的反射波由诸如CCD传感器的反射波检测装置(1d)检测。 检测人体或障碍物是否进入由图像投影装置(1)的主体单元和屏幕(2)之间的检测波(4)包围的监视空间。 一旦检测到入口,根据情况或进入程度减小或切断朝向投影区域(3)行进的辐射光的强度。