公开(公告)号：US08557164B2

公开(公告)日：2013-10-15

申请号：US12581666

申请日：2009-10-19

申请人： Naozumi Nabeshima ,  Toru Yamane ,  Takumi Suzuki ,  Masahiko Kubota ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai

发明人： Naozumi Nabeshima ,  Toru Yamane ,  Takumi Suzuki ,  Masahiko Kubota ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai

IPC分类号： B29C33/76

CPC分类号： B41J2/1404 ,  B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1645 ,  Y10T29/49401

摘要： A liquid discharge head includes a substrate having an energy generating element configured to generate energy required to discharge liquid, a discharge port configured to discharge the liquid and provided in an opposed relationship to the energy generating element, a wall member defining a chamber adapted to store the energy required to discharge liquid the energy being generated by the energy generating element, a discharge portion defining a fluid path connecting the chamber and the discharge port, a supply path facilitating supplying the liquid into the chamber, and a pair of hollow portions provided in the wall member, wherein the hollow portions oppose each other and sandwich at least the entire discharge port in a direction from the discharge port to the substrate, and the hollow portions are independent of the chamber.

摘要翻译： 液体排出头包括具有能量产生元件的基板，该能量产生元件被配置为产生排出液体所需的能量，排出端口，其构造成排出液体并以与该能量产生元件相对的关系提供;壁构件，其限定适于存储的室 由能量产生元件产生的能量排出液体所需的能量，限定连接腔室和排放口的流体路径的排出部分，便于将液体供应到腔室中的供应路径以及设置在腔室中的一对中空部分 所述壁构件，其中所述中空部分彼此相对并且在从所述排出口到所述基板的方向上至少夹着所述排出口的整个排出口，并且所述中空部分与所述室独立。

公开(公告)号：US07625069B2

公开(公告)日：2009-12-01

申请号：US11549871

申请日：2006-10-16

申请人： Naozumi Nabeshima ,  Toru Yamane ,  Takumi Suzuki ,  Masahiko Kubota ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai

发明人： Naozumi Nabeshima ,  Toru Yamane ,  Takumi Suzuki ,  Masahiko Kubota ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai

IPC分类号： B41J2/05

CPC分类号： B41J2/1404 ,  B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1645 ,  Y10T29/49401

摘要： A liquid discharge head includes a substrate having an energy generating element configured to generate energy required to discharge liquid, a discharge port configured to discharge the liquid and provided in an opposed relationship to the energy generating element, a wall member defining a chamber adapted to store the energy required to discharge liquid the energy being generated by the energy generating element, a discharge portion defining a fluid path connecting the chamber and the discharge port, a supply path facilitating supplying the liquid into the chamber, and a pair of hollow portions provided in the wall member, wherein the hollow portions oppose each other and sandwich at least the entire discharge port in a direction from the discharge port to the substrate, and the hollow portions are independent of the chamber.

摘要翻译： 液体排出头包括具有能量产生元件的基板，该能量产生元件被配置为产生排出液体所需的能量，排出端口，其构造成排出液体并以与该能量产生元件相对的关系提供;壁构件，其限定适于存储的室 由能量产生元件产生的能量排出液体所需的能量，限定连接腔室和排放口的流体路径的排出部分，便于将液体供应到腔室中的供应路径以及设置在腔室中的一对中空部分 所述壁构件，其中所述中空部分彼此相对并且在从所述排出口到所述基板的方向上至少夹着所述排出口的整个排出口，并且所述中空部分与所述室独立。

公开(公告)号：US20100037460A1

公开(公告)日：2010-02-18

申请号：US12581666

申请日：2009-10-19

申请人： Naozumi Nabeshima ,  Toru Yamane ,  Takumi Suzuki ,  Masahiko Kubota ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai

发明人： Naozumi Nabeshima ,  Toru Yamane ,  Takumi Suzuki ,  Masahiko Kubota ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai

IPC分类号： B21D53/76

CPC分类号： B41J2/1404 ,  B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1645 ,  Y10T29/49401

摘要： A liquid discharge head includes a substrate having an energy generating element configured to generate energy required to discharge liquid, a discharge port configured to discharge the liquid and provided in an opposed relationship to the energy generating element, a wall member defining a chamber adapted to store the energy required to discharge liquid the energy being generated by the energy generating element, a discharge portion defining a fluid path connecting the chamber and the discharge port, a supply path facilitating supplying the liquid into the chamber, and a pair of hollow portions provided in the wall member, wherein the hollow portions oppose each other and sandwich at least the entire discharge port in a direction from the discharge port to the substrate, and the hollow portions are independent of the chamber.

摘要翻译： 液体排出头包括具有能量产生元件的基板，该能量产生元件被配置为产生排出液体所需的能量，排出端口，其构造成排出液体并以与该能量产生元件相对的关系提供;壁构件，其限定适于存储的室 由能量产生元件产生的能量排出液体所需的能量，限定连接腔室和排放口的流体路径的排出部分，便于将液体供应到腔室中的供应路径以及设置在腔室中的一对中空部分 所述壁构件，其中所述中空部分彼此相对并且在从所述排出口到所述基板的方向上至少夹着所述排出口的整个排出口，并且所述中空部分与所述室独立。

公开(公告)号：US20070091151A1

公开(公告)日：2007-04-26

申请号：US11549871

申请日：2006-10-16

申请人： Naozumi Nabeshima ,  Toru Yamane ,  Takumi Suzuki ,  Masahiko Kubota ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai

发明人： Naozumi Nabeshima ,  Toru Yamane ,  Takumi Suzuki ,  Masahiko Kubota ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai

IPC分类号： B41J2/045

CPC分类号： B41J2/1404 ,  B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1645 ,  Y10T29/49401

摘要： A liquid discharge head includes a substrate having an energy generating element configured to generate energy required to discharge liquid, a discharge port configured to discharge the liquid and provided in an opposed relationship to the energy generating element, a wall member defining a chamber adapted to store the energy required to discharge liquid the energy being generated by the energy generating element, a discharge portion defining a fluid path connecting the chamber and the discharge port, a supply path facilitating supplying the liquid into the chamber, and a pair of hollow portions provided in the wall member, wherein the hollow portions oppose each other and sandwich at least the entire discharge port in a direction from the discharge port to the substrate, and the hollow portions are independent of the chamber.

摘要翻译： 液体排出头包括具有能量产生元件的基板，该能量产生元件被配置为产生排出液体所需的能量，排出端口，其构造成排出液体并以与该能量产生元件相对的关系提供;壁构件，其限定适于存储的室 由能量产生元件产生的能量排出液体所需的能量，限定连接腔室和排放口的流体路径的排出部分，便于将液体供应到腔室中的供应路径以及设置在腔室中的一对中空部分 所述壁构件，其中所述中空部分彼此相对并且在从所述排出口到所述基板的方向上至少夹着所述排出口的整个排出口，并且所述中空部分与所述室独立。

公开(公告)号：US08017307B2

公开(公告)日：2011-09-13

申请号：US10568341

申请日：2005-06-27

申请人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Hiroe Ishikura ,  Akihiko Okano

发明人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Hiroe Ishikura ,  Akihiko Okano

IPC分类号： G03F7/20

CPC分类号： B41J2/1603 ,  B41J2/1404 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1639 ,  B41J2/1645 ,  B41J2202/11 ,  G03F7/095 ,  Y10T29/49401

摘要： A method for manufacturing a minute structure comprises a step of forming an ionizing radiation decomposing type positive type resist layer including a methyl isopropenyl ketone as a first positive type photosensitive material layer, a step of forming an ionizing radiation decomposing type positive type resist layer including a photosensitive material of a copolymer as a second positive type photosensitive material layer to be sensitized by an ionizing radiation of a second wavelength range on the first positive type photosensitive material layer, a step of forming a desired pattern in the above-mentioned second positive type photosensitive material layer, and development using a developing solution, and then, a step of forming a desired pattern in the above-mentioned first positive type photosensitive material layer to form a convex shape pattern.

摘要翻译： 微细结构体的制造方法包括形成电离辐射分解型正型抗蚀剂层的步骤，该电离辐射分解型正型抗蚀剂层包括甲基异丙烯基酮作为第一正型感光材料层，形成电离辐射分解型正型抗蚀剂层的步骤包括 作为通过第一正型感光材料层上的第二波长范围的电离辐射致敏的作为第二正型感光材料层的共聚物的感光材料，在上述第二正型感光材料层中形成所需图案的步骤 材料层和使用显影溶液的显影，然后，在上述第一正型感光材料层中形成所需图案以形成凸形图案的步骤。

公开(公告)号：US07629111B2

公开(公告)日：2009-12-08

申请号：US10576249

申请日：2005-06-27

申请人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

发明人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

IPC分类号： B41J2/16

CPC分类号： B41J2/1639 ,  B41J2/1603 ,  B41J2/1631 ,  B41J2002/14475 ,  G03F7/038

摘要： A method for manufacturing a liquid discharge head includes the steps of depositing a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid, forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer, forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer formed on the solid layer, and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, a cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic anhydride and methacrylate ester.

摘要翻译： 一种制造液体排出头的方法包括以下步骤：在其上布置能量产生元件的衬底上沉积用于形成流路的固体层，以产生用于排出液体的能量，在衬底上形成固体 层，用于涂覆固体层的涂层，在固体层上形成的涂层中，通过光刻工艺形成用于排出液体的排出口，并除去固体层，形成连通的流路 能量元件和排出口，由此用于涂层的材料含有可阳离子聚合的化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂，由此形成与部分的边界的固体层的材料 其中形成涂层的排出口包含甲基丙烯酸酐和甲基丙烯酸酯的共聚物。

公开(公告)号：US20060277755A1

公开(公告)日：2006-12-14

申请号：US10565658

申请日：2005-06-27

申请人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

发明人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

IPC分类号： B21D53/76

CPC分类号： G03F7/038 ,  B41J2/1603 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2002/14475 ,  Y10T29/49401

摘要： According to the present invention, a method for manufacturing a liquid discharge head includes the steps of: forming a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid; forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer; forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer deposited on the solid layer; and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer are formed contains a copolymer of methacrylic acid and methacrylate ester.

摘要翻译： 根据本发明，液体排出头的制造方法包括以下步骤：在其上布置能量产生元件以产生用于排出液体的能量的基板上形成用于形成流路的固体层; 在固体固体层的基板上形成用于涂覆固体层的涂层; 形成用于通过光刻工艺在沉积在固体层上的涂层中排出液体的排出口; 并且除去固体层以形成与能量元件和排出口连通的流路，由此用于涂层的材料含有阳离子可聚合化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂， 与形成涂层的排出口的部分形成边界的固体层包含甲基丙烯酸和甲基丙烯酸酯的共聚物。

公开(公告)号：US08227043B2

公开(公告)日：2012-07-24

申请号：US10565658

申请日：2005-06-27

申请人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

发明人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

IPC分类号： B05D1/36 ,  B05D7/00

CPC分类号： G03F7/038 ,  B41J2/1603 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2002/14475 ,  Y10T29/49401

摘要： A method for manufacturing a liquid discharge head includes the steps of: forming a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid; forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer; forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer deposited on the solid layer; and removing the solid layer to form a flow path that communicates with the energy element and the discharge port. A material used for the coating layer contains a cationically polymerizable chemical compound, a cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic acid and methacrylate ester.

摘要翻译： 一种液体排出头的制造方法，其特征在于，包括以下步骤：在基板上形成固体层，所述基板上配置能量产生元件，以产生用于排出液体的能量; 在固体固体层的基板上形成用于涂覆固体层的涂层; 形成用于通过光刻工艺在沉积在固体层上的涂层中排出液体的排出口; 并且去除固体层以形成与能量元件和排出口连通的流路。 用于涂层的材料包含阳离子可聚合化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂，并且与形成涂层的排出口的部分形成边界的固体层的材料包含 甲基丙烯酸和甲基丙烯酸酯的共聚物。

公开(公告)号：US20070099121A1

公开(公告)日：2007-05-03

申请号：US10576249

申请日：2005-06-27

申请人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

发明人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

IPC分类号： G03C5/00

CPC分类号： B41J2/1639 ,  B41J2/1603 ,  B41J2/1631 ,  B41J2002/14475 ,  G03F7/038

摘要： According to the present invention, a method for manufacturing a liquid discharge head includes the steps of depositing a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid, forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer, forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer formed on the solid layer, and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, cationic photopolymerization initiator and a inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic anhydride and methacrylate ester.

摘要翻译： 根据本发明，一种液体排出头的制造方法包括以下步骤：在其上布置能量产生元件的基板上沉积形成流路的固体层，以产生用于排出液体的能量， 在固体层安装的基板上，涂布固体层的涂层，通过光刻工艺形成用于排出液体的排出口，在固体层上形成的涂层中去除固体层 形成与能量元件和排出口连通的流路，由此用于涂层的材料含有阳离子聚合化学化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂，由此形成固体层的材料 与形成涂层的排出口的部分的边界包含甲基丙烯酸酐的共聚物 甲基丙烯酸酯和甲基丙烯酸酯。

公开(公告)号：US20070011875A1

公开(公告)日：2007-01-18

申请号：US10568341

申请日：2005-06-27

申请人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kani ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Hiroe Ishikura ,  Akihiko Okano

发明人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kani ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Hiroe Ishikura ,  Akihiko Okano

IPC分类号： B21D53/76

CPC分类号： B41J2/1603 ,  B41J2/1404 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1639 ,  B41J2/1645 ,  B41J2202/11 ,  G03F7/095 ,  Y10T29/49401

摘要： A method for manufacturing a minute structure comprises a step of forming an ionizing radiation decomposing type positive type resist layer including a methyl isopropenyl ketone as a first positive type photosensitive material layer, a step of forming an ionizing radiation decomposing type positive type resist layer including a photosensitive material of a copolymer as a second positive type photosensitive material layer to be sensitized by an ionizing radiation of a second wavelength range on the first positive type photosensitive material layer, a step of forming a desired pattern in the above-mentioned second positive type photosensitive material layer, and development using a developing solution, and then, a step of forming a desired pattern in the above-mentioned first positive type photosensitive material layer to form a convex shape pattern.

摘要翻译： 微细结构体的制造方法包括形成电离辐射分解型正型抗蚀剂层的步骤，该电离辐射分解型正型抗蚀剂层包括甲基异丙烯基酮作为第一正型感光材料层，形成电离辐射分解型正型抗蚀剂层的步骤包括 作为通过第一正型感光材料层上的第二波长范围的电离辐射致敏的作为第二正型感光材料层的共聚物的感光材料，在上述第二正型感光材料层中形成所需图案的步骤 材料层和使用显影溶液的显影，然后，在上述第一正型感光材料层中形成所需图案以形成凸形图案的步骤。