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公开(公告)号：US08049417B2
公开(公告)日：2011-11-01
申请号：US12072108
申请日：2008-02-22
IPC分类号： H01J1/62
CPC分类号： H01J61/86 , H01J61/103
摘要： A high brightness excimer light source has an elongated tube containing an excimer-forming gas and electrodes for exciting the gas to form a plasma, and thus create excimers such as a rare gas halogen excimer or a rare gas excimer. Light emitted from the excimer propagating axially along the tube passes out of the tube through an exit device such as a lens or optical fiber at one or both ends of the tube.
摘要翻译： 高亮度准分子光源具有含有准分子成形气体的细长管和用于激发气体以形成等离子体的电极，从而产生稀有气体卤素受激准分子或稀有气体准分子等稀有元素。 从沿着管轴向传播的准分子发射的光在管的一端或两端通过出口装置，例如透镜或光纤。
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公开(公告)号：US08946993B2
公开(公告)日：2015-02-03
申请号：US12992185
申请日：2009-05-15
摘要： Excimers are formed in a high pressure gas by applying a potential between a first electrode (14, 214) and a counter electrode (25, 226) so as to impose an electric field within the gas, or by introducing high energy electrons into the gas using an electron beam. A phosphor for converting the wavelength of radiation emitted from the formed excimers is disposed within the gas and outside a region (62, 162) where the excimers are expected to be formed, so as to avoid degradation of the phosphor.
摘要翻译： 通过在第一电极（14,214）和对电极（25,226）之间施加电位以在气体内施加电场，或者通过将高能电子引入到气体中，在高压气体中形成尖峰 使用电子束。 用于将从所形成的激发器发射的辐射的波长转换的荧光体设置在气体内，并且期望形成激发子的区域（62,162）外，以避免荧光体的劣化。
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公开(公告)号：US20120049767A1
公开(公告)日：2012-03-01
申请号：US13246964
申请日：2011-09-28
IPC分类号： H01J61/16
CPC分类号： H01J61/86 , H01J61/103
摘要： A high brightness excimer light source has an elongated tube containing an excimer-forming gas and electrodes for exciting the gas to form a plasma, and thus create excimers such as a rare gas halogen excimer or a rare gas excimer. Light emitted from the excimer propagating axially along the tube passes out of the tube through an exit device such as a lens or optical fiber at one or both ends of the tube.
摘要翻译： 高亮度准分子光源具有含有准分子成形气体的细长管和用于激发气体以形成等离子体的电极，从而产生稀有气体卤素受激准分子或稀有气体准分子等稀有元素。 从沿着管轴向传播的准分子发射的光在管的一端或两端通过出口装置，例如透镜或光纤。
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公开(公告)号：US20110254449A1
公开(公告)日：2011-10-20
申请号：US12992185
申请日：2009-05-15
摘要： Excimers are formed in a high pressure gas by applying a potential between a first electrode (14, 214) and a counter electrode (25, 226) so as to impose an electric field within the gas, or by introducing high energy electrons into the gas using an electron beam. A phosphor for converting the wavelength of radiation emitted from the formed excimers is disposed within the gas and outside a region (62, 162) where the excimers are expected to be formed, so as to avoid degradation of the phosphor.
摘要翻译： 通过在第一电极（14,214）和对电极（25,226）之间施加电位以在气体内施加电场，或者通过将高能电子引入到气体中，在高压气体中形成尖峰 使用电子束。 用于将从所形成的激发器发射的辐射的波长转换的荧光体设置在气体内，并且期望形成激发子的区域（62,162）外，以避免荧光体的劣化。
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公开(公告)号：US08506342B2
公开(公告)日：2013-08-13
申请号：US13246964
申请日：2011-09-28
CPC分类号： H01J61/86 , H01J61/103
摘要： A high brightness excimer light source has an elongated tube containing an excimer-forming gas and electrodes for exciting the gas to form a plasma, and thus create excimers such as a rare gas halogen excimer or a rare gas excimer. Light emitted from the excimer propagating axially along the tube passes out of the tube through an exit device such as a lens or optical fiber at one or both ends of the tube.
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公开(公告)号：US20090212700A1
公开(公告)日：2009-08-27
申请号：US12072108
申请日：2008-02-22
CPC分类号： H01J61/86 , H01J61/103
摘要： A high brightness excimer light source has an elongated tube containing an excimer-forming gas and electrodes for exciting the gas to form a plasma, and thus create excimers such as a rare gas halogen excimer or a rare gas excimer. Light emitted from the excimer propagating axially along the tube passes out of the tube through an exit device such as a lens or optical fiber at one or both ends of the tube.
摘要翻译： 高亮度准分子光源具有含有准分子成形气体的细长管和用于激发气体以形成等离子体的电极，从而产生稀有气体卤素受激准分子或稀有气体准分子等稀有元素。 从沿着管轴向传播的准分子发射的光在管的一端或两端通过出口装置，例如透镜或光纤。
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