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公开(公告)号：US07341222B1
公开(公告)日：2008-03-11
申请号：US11100592
申请日：2005-04-07
IPC分类号： B64C33/00
CPC分类号： B64C39/028 , B64C2201/025 , B64C2201/127
摘要： A MEMS-based micro-unmanned vehicle includes at least a pair of wings having leading wing beams and trailing wing beams, at least two actuators, a leading actuator beam coupled to the leading wing beams, a trailing actuator beam coupled to the trailing wing beams, a vehicle body having a plurality of fulcrums pivotally securing the leading wing beams, the trailing wing beams, the leading actuator beam and the trailing actuator beam and having at least one anisotropically etched recess to accommodate a lever-fulcrum motion of the coupled beams, and a power source.
摘要翻译： 一种基于MEMS的微型无人驾驶车辆包括至少一对具有前翼梁和后翼梁的机翼，至少两个致动器，连接到前翼梁的前导执动器梁，耦合到后翼梁 具有多个支点的车体，其枢转地固定前翼梁，后翼梁，前导致器梁和拖尾致动器梁，并且具有至少一个各向异性蚀刻的凹部以适应联接梁的杠杆支点运动， 和电源。
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公开(公告)号：US08236611B1
公开(公告)日：2012-08-07
申请号：US12758833
申请日：2010-04-13
IPC分类号： H01L21/00
CPC分类号： H01L21/78
摘要： A method is disclosed for singulating die from a substrate having a sacrificial layer and one or more device layers, with a retainer being formed in the device layer(s) and anchored to the substrate. Deep Reactive Ion Etching (DRIE) etching of a trench through the substrate from the bottom side defines a shape for each die. A handle wafer is then attached to the bottom side of the substrate, and the sacrificial layer is etched to singulate the die and to form a frame from the retainer and the substrate. The frame and handle wafer, which retain the singulated die in place, can be attached together with a clamp or a clip and to form a package for the singulated die. One or more stops can be formed from the device layer(s) to limit a sliding motion of the singulated die.
摘要翻译： 公开了一种用于从具有牺牲层和一个或多个器件层的衬底分离裸片的方法，其中保持器形成在器件层中并固定到衬底。 深层反应离子蚀刻（DRIE）从底侧蚀刻通过衬底的沟槽限定了每个管芯的形状。 然后将手柄晶片附接到基板的底侧，并且牺牲层被蚀刻以对模具进行分割并从保持器和基板形成框架。 将单个模具保持在适当位置的框架和处理晶片可以用夹子或夹子附接在一起并形成用于单个模具的封装。 可以从设备层形成一个或多个止挡件，以限制单模模具的滑动运动。
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公开(公告)号：US07092272B1
公开(公告)日：2006-08-15
申请号：US11389738
申请日：2006-03-27
申请人： Jeffrey C. Gilkey , Michelle A. Duesterhaus , Frank J. Peter , Rosemarie A. Renn , Michael S. Baker
发明人： Jeffrey C. Gilkey , Michelle A. Duesterhaus , Frank J. Peter , Rosemarie A. Renn , Michael S. Baker
IPC分类号： G11C19/00
摘要： A first-in-first-out (FIFO) microelectromechanical memory apparatus (also termed a mechanical memory) is disclosed. The mechanical memory utilizes a plurality of memory cells, with each memory cell having a beam which can be bowed in either of two directions of curvature to indicate two different logic states for that memory cell. The memory cells can be arranged around a wheel which operates as a clocking actuator to serially shift data from one memory cell to the next. The mechanical memory can be formed using conventional surface micromachining, and can be formed as either a nonvolatile memory or as a volatile memory.
摘要翻译： 公开了先进先出（FIFO）微机电存储装置（也称为机械存储器）。 机械存储器利用多个存储器单元，其中每个存储器单元具有可以在两个曲率方向中的任一方向上弯曲的光束，以指示该存储器单元的两种不同的逻辑状态。 存储器单元可以布置在作为时钟执行器的轮周围，以将数据从一个存储器单元串行地移位到下一个存储器单元。 机械存储器可以使用常规的表面微加工形成，并且可以形成为非易失性存储器或易失性存储器。
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公开(公告)号：US07046539B1
公开(公告)日：2006-05-16
申请号：US10979419
申请日：2004-11-02
申请人： Jeffrey C. Gilkey , Michelle A. Duesterhaus , Frank J. Peter , Rosemarie A. Renn , Michael S. Baker
发明人： Jeffrey C. Gilkey , Michelle A. Duesterhaus , Frank J. Peter , Rosemarie A. Renn , Michael S. Baker
摘要： A first-in-first-out (FIFO) microelectromechanical memory apparatus (also termed a mechanical memory) is disclosed. The mechanical memory utilizes a plurality of memory cells, with each memory cell having a beam which can be bowed in either of two directions of curvature to indicate two different logic states for that memory cell. The memory cells can be arranged around a wheel which operates as a clocking actuator to serially shift data from one memory cell to the next. The mechanical memory can be formed using conventional surface micromachining, and can be formed as either a nonvolatile memory or as a volatile memory.
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