公开(公告)号：US20130135603A1

公开(公告)日：2013-05-30

申请号：US13689071

申请日：2012-11-29

Applicant: NIKON CORPORATION

Inventor： Michael Binnard ,  Scott Coakley ,  Yoichi Arai ,  Rick K. Ingram

IPC: B65G54/02 ,  G03B27/58 ,  H02K41/025

CPC classification number: B65G54/02 ,  G03B27/581 ,  G03F7/70758 ,  H02K1/141 ,  H02K41/025 ,  H02K41/03 ,  H02K2213/03

Abstract: A mover assembly (46) for moving a stage (14) includes an actuator (30) that is coupled to the stage (14). The actuator (30) includes (i) a C-Core (52) having a generally “C” shape and including a first transverse leg (260), a second transverse leg (262) that is spaced apart from the first transverse leg (260), and a connector region (264) that connects the transverse legs (260), (262); (ii) a coil (270) that is wrapped around the first transverse leg (260); and (ii) an I core (250) that is spaced apart a gap (254) from the C-Core (252).

Abstract translation: 用于移动平台（14）的移动器组件（46）包括联接到平台（14）的致动器（30）。 致动器（30）包括（i）具有大致“C”形并且包括第一横向腿部（260）的C形芯体（52），与第一横向腿部间隔开的第二横向腿部（262） 260）和连接横向腿部（260），（262）的连接器区域（264）; （ii）卷绕在第一横向腿部（260）周围的线圈（270）; 和（ii）与C型芯（252）间隔开间隙（254）的I型芯（250）。

公开(公告)号：US20130069449A1

公开(公告)日：2013-03-21

申请号：US13621669

申请日：2012-09-17

Applicant: Nikon Corporation

Inventor： Michel Pharand ,  Michael B. Binnard ,  Shigeru Morimoto ,  Chetan Mahadeswaraswamy ,  Rick K. Ingram ,  Christopher Edward Hatch ,  Alex Ka Tim Poon ,  Gaurav Keswani ,  Derek Coon ,  Yeong-Jun Choi

IPC: H02K15/06 ,  H02K41/02

CPC classification number: H02K41/031 ,  H02K3/24 ,  H02K9/19 ,  H02K9/22 ,  H02K2201/18

Abstract: Coil arrays are disclosed for a planar or linear motor. An exemplary coil array includes multiple coil modules. Each coil module includes at least one coil set, respective electrical circuitry to and from the coil set, at least one respective hydraulic cooling device for the coil set, and respective hydraulic conduitry to and from the cooling device. The coil modules are interchangeably mountable relative to each other in the array such that mounting the coil module to the array produces accompanying hydraulic and electrical connections between the array and coil module, and removing the coil module from the array severs the connections.

Abstract translation: 公开了用于平面或线性电动机的线圈阵列。 示例性线圈阵列包括多个线圈模块。 每个线圈组件包括至少一个线圈组，到线圈组和来自线圈组的相应电路，用于线圈组的至少一个相应的液压冷却装置，以及往返于冷却装置的相应的液压导管。 线圈模块相对于阵列中的彼此可互换地安装，使得将线圈模块安装到阵列上产生阵列和线圈模块之间的伴随的液压和电气连接，并且从阵列中去除线圈模块以切断连接。