公开(公告)号：US08786658B2

公开(公告)日：2014-07-22

申请号：US13783898

申请日：2013-03-04

申请人： Nobuaki Kubo ,  Toshiaki Tokita ,  Kohji Sakai ,  Naoto Watanabe ,  Tomohiro Nakajima ,  Yorichika Ishiyama

发明人： Nobuaki Kubo ,  Toshiaki Tokita ,  Kohji Sakai ,  Naoto Watanabe ,  Tomohiro Nakajima ,  Yorichika Ishiyama

IPC分类号： B41J15/14 ,  B41J27/00

CPC分类号： G03G15/04036 ,  G03G15/0435 ,  G03G21/1666

摘要： An exposure device to expose an exposure element includes a light source; an optical system to guide light emitted from the light source to the exposure element; and an optical housing, configured with a plurality of plates, to support the light source and the optical system. At least one of the plurality of plates configuring the optical housing is formed with a plurality of grooves on each of a first face and a second face with a given pitch on the one of the plurality of plates, the first face and the second face being opposite faces with each other. The plurality of grooves are arranged by shifting the center of each of grooves formed on the first face and the center of each of grooves formed on the second face.

摘要翻译： 用于曝光曝光元件的曝光装置包括光源; 用于将从光源发射的光引导到曝光元件的光学系统; 以及配置有多个板的光学壳体，以支撑光源和光学系统。 构成光学壳体的多个板中的至少一个在多个板之一上形成有在第一面和第二面中的每一个上具有给定间距的多个槽，第一面和第二面是 相反的面对面。 多个凹槽通过使形成在第一面上的每个凹槽的中心和形成在第二面上的每个凹槽的中心偏移而布置。

公开(公告)号：US20130250029A1

公开(公告)日：2013-09-26

申请号：US13783898

申请日：2013-03-04

申请人： Nobuaki KUBO ,  Toshiaki Tokita ,  Kohji Sakai ,  Naoto Watanabe ,  Tomohiro Nakajima ,  Yorichika Ishiyama

发明人： Nobuaki KUBO ,  Toshiaki Tokita ,  Kohji Sakai ,  Naoto Watanabe ,  Tomohiro Nakajima ,  Yorichika Ishiyama

IPC分类号： B41J2/435

CPC分类号： G03G15/04036 ,  G03G15/0435 ,  G03G21/1666

摘要： An exposure device to expose an exposure element includes a light source; an optical system to guide light emitted from the light source to the exposure element; and an optical housing, configured with a plurality of plates, to support the light source and the optical system. At least one of the plurality of plates configuring the optical housing is formed with a plurality of grooves on each of a first face and a second face with a given pitch on the one of the plurality of plates, the first face and the second face being opposite faces with each other. The plurality of grooves are arranged by shifting the center of each of grooves formed on the first face and the center of each of grooves formed on the second face.

摘要翻译： 用于曝光曝光元件的曝光装置包括光源; 用于将从光源发射的光引导到曝光元件的光学系统; 以及配置有多个板的光学壳体，以支撑光源和光学系统。 构成光学壳体的多个板中的至少一个在多个板之一上形成有在第一面和第二面的每一个上具有给定间距的多个槽，第一面和第二面为 相反的面对面。 多个凹槽通过使形成在第一面上的每个凹槽的中心和形成在第二面上的每个凹槽的中心偏移而布置。

公开(公告)号：US09625711B2

公开(公告)日：2017-04-18

申请号：US13718514

申请日：2012-12-18

申请人： Naoto Watanabe ,  Toshiaki Tokita ,  Kohji Sakai ,  Nobuaki Kubo ,  Masayuki Muranaka

发明人： Naoto Watanabe ,  Toshiaki Tokita ,  Kohji Sakai ,  Nobuaki Kubo ,  Masayuki Muranaka

IPC分类号： G02B26/12 ,  B41J2/47

CPC分类号： B41J2/473 ,  B41J2/471 ,  G02B26/123 ,  G02B26/127 ,  G02B26/129 ,  G03G15/043 ,  G03G15/505

摘要： An optical scanning apparatus includes a light source, an optical deflector having a rotary polygon mirror to deflect a light beam from the light source, a scanning optical system configured to focus the light beam deflected by the optical deflector on a target surface, a sync detecting sensor configured to determine a write start timing on the target surface, and a processing unit configured to correct detection data of the sync detecting sensor based on a measured value of a time needed for one revolution of the rotary polygon mirror.

公开(公告)号：US08922863B2

公开(公告)日：2014-12-30

申请号：US13608216

申请日：2012-09-10

申请人： Toshiaki Tokita ,  Nobuaki Kubo ,  Naoto Watanabe ,  Kohji Sakai

发明人： Toshiaki Tokita ,  Nobuaki Kubo ,  Naoto Watanabe ,  Kohji Sakai

IPC分类号： G02B26/08 ,  B41J2/47 ,  G03G15/043 ,  G02B26/12 ,  G02B3/00 ,  G02B5/30

CPC分类号： B41J2/473 ,  G02B3/0075 ,  G02B5/3058 ,  G02B26/123 ,  G03G15/0435

摘要： An optical scanning device separately scanning plural scan target surfaces in a first direction with light includes: a light source unit configured to emit first and second light beams mutually different in polarization state; an optical deflector configured to rotate around an axis parallel to a second direction perpendicular to the first direction, and deflect the emitted light beams; an imaging optical element provided on respective optical paths of the deflected light beams; a polarization adjustment element provided on the optical paths of the light beams transmitted through the imaging optical element, and configured to correct respective changes in polarization state of the light beams occurring during the transmission of the light beams through the imaging optical element; and a polarization separation element provided on the optical paths of the light beams emitted from the polarization adjustment element, and configured to separate the light beams from each other.

摘要翻译： 利用光分别在第一方向上扫描多个扫描目标表面的光学扫描装置包括：光源单元，被配置为发射极化状态彼此不同的第一和第二光束; 光学偏转器，被配置为围绕平行于与第一方向垂直的第二方向的轴线旋转，并偏转发射的光束; 设置在偏转光束的相应光路上的成像光学元件; 偏振调节元件，设置在通过成像光学元件透射的光束的光路上，并且被配置为校正在通过成像光学元件的光束透射期间发生的光束的偏振状态的变化; 以及偏振分离元件，设置在从偏振调节元件发射的光束的光路上，并且被配置为将光束彼此分离。

公开(公告)号：US08848009B2

公开(公告)日：2014-09-30

申请号：US13624182

申请日：2012-09-21

申请人： Naoto Watanabe ,  Toshiaki Tokita ,  Kohji Sakai ,  Nobuaki Kubo

发明人： Naoto Watanabe ,  Toshiaki Tokita ,  Kohji Sakai ,  Nobuaki Kubo

IPC分类号： B41J2/385 ,  B41J2/435 ,  B41J15/14 ,  B41J27/00 ,  G02B26/08 ,  G02B26/10 ,  G02B26/12 ,  B41J2/47 ,  G02B27/00

CPC分类号： G02B26/123 ,  B41J2/473 ,  G02B27/0018

摘要： An optical scanning device scanning scan target surfaces in a first direction with light includes: a light source emitting first and second light beams corresponding to two of the scan target surfaces; an optical deflector including a reflection surface on which the emitted first and second light beams are obliquely incident while being separated from each other in a second direction perpendicular to the first direction, and deflecting the first and second light beams; a scanning lens disposed on respective optical paths of the deflected first and second light beams; and a branching optical element transmitting therethrough most of the first light beam transmitted through the scanning lens, and reflecting most of the second light beam transmitted through the scanning lens. The deflected first and second light beams intersect between the optical deflector and the branching optical element, when projected on a plane perpendicular to the first direction.

摘要翻译： 用光扫描第一方向的扫描目标表面的光扫描装置包括：发射对应于两个扫描目标表面的第一和第二光束的光源; 光偏转器，其包括反射面，发射的第一光束和第二光束在垂直于第一方向的第二方向上彼此分离并倾斜入射，并且偏转第一和第二光束; 设置在偏转的第一和第二光束的相应光路上的扫描透镜; 以及分支光学元件，透射通过扫描透镜的第一光束的大部分，并且反射透过扫描透镜的大部分第二光束。 当投影在垂直于第一方向的平面上时，偏转的第一和第二光束在光学偏转器和分支光学元件之间相交。

公开(公告)号：US09925798B2

公开(公告)日：2018-03-27

申请号：US15440907

申请日：2017-02-23

申请人： Naoto Watanabe ,  Toshiaki Tokita ,  Kohji Sakai ,  Nobuaki Kubo ,  Masayuki Muranaka

发明人： Naoto Watanabe ,  Toshiaki Tokita ,  Kohji Sakai ,  Nobuaki Kubo ,  Masayuki Muranaka

IPC分类号： B41J2/47 ,  G02B26/12 ,  G03G15/043 ,  G03G15/00

CPC分类号： B41J2/473 ,  B41J2/471 ,  G02B26/123 ,  G02B26/127 ,  G02B26/129 ,  G03G15/043 ,  G03G15/505

摘要： An optical scanning apparatus includes a light source, an optical deflector having a rotary polygon mirror to deflect a light beam from the light source, a scanning optical system configured to focus the light beam deflected by the optical deflector on a target surface, a sync detecting sensor configured to determine a write start timing on the target surface, and a processing unit configured to correct detection data of the sync detecting sensor based on a measured value of a time needed for one revolution of the rotary polygon mirror.

公开(公告)号：US20130076851A1

公开(公告)日：2013-03-28

申请号：US13624182

申请日：2012-09-21

申请人： Naoto WATANABE ,  Toshiaki Tokita ,  Kohji Sakai ,  Nobuaki Kubo

发明人： Naoto WATANABE ,  Toshiaki Tokita ,  Kohji Sakai ,  Nobuaki Kubo

IPC分类号： B41J2/435 ,  G02B26/08

CPC分类号： G02B26/123 ,  B41J2/473 ,  G02B27/0018

摘要： An optical scanning device scanning scan target surfaces in a first direction with light includes: a light source emitting first and second light beams corresponding to two of the scan target surfaces; an optical deflector including a reflection surface on which the emitted first and second light beams are obliquely incident while being separated from each other in a second direction perpendicular to the first direction, and deflecting the first and second light beams; a scanning lens disposed on respective optical paths of the deflected first and second light beams; and a branching optical element transmitting therethrough most of the first light beam transmitted through the scanning lens, and reflecting most of the second light beam transmitted through the scanning lens. The deflected first and second light beams intersect between the optical deflector and the branching optical element, when projected on a plane perpendicular to the first direction.

摘要翻译： 用光扫描第一方向的扫描目标表面的光扫描装置包括：发射对应于两个扫描目标表面的第一和第二光束的光源; 光偏转器，其包括反射面，发射的第一光束和第二光束在垂直于第一方向的第二方向上彼此分离并倾斜入射，并且偏转第一和第二光束; 设置在偏转的第一和第二光束的相应光路上的扫描透镜; 以及分支光学元件，透射通过扫描透镜的第一光束的大部分，并且反射透过扫描透镜的大部分第二光束。 当投影在垂直于第一方向的平面上时，偏转的第一和第二光束在光学偏转器和分支光学元件之间相交。

公开(公告)号：US20110316959A1

公开(公告)日：2011-12-29

申请号：US13169942

申请日：2011-06-27

申请人： Kenichiroh SAISHO ,  Toshiaki Tokita ,  Nobuaki Kubo ,  Seizo Suzuki

发明人： Kenichiroh SAISHO ,  Toshiaki Tokita ,  Nobuaki Kubo ,  Seizo Suzuki

IPC分类号： B41J2/435 ,  G02B26/08

CPC分类号： G02B26/123 ,  B41J2/473 ,  G02B26/124 ,  G02B27/283

摘要： An optical scanning device, arranged on one side of at least two to-be-scanned members in a second direction, and the two to-be-scanned members being arranged in a first direction perpendicular to the second, includes: an illuminating system that emits beams including a first beam and a second beam whose polarization directions are different from each other; an optical deflector that deflects the beams; and a scanning optical system that includes a polarization separation element that transmits one of the first and second beams and reflects the other; a first mirror group including reflecting mirrors for guiding the first beam to a to-be-scanned member; and a second mirror group including reflecting mirrors for guiding the second beam to a to-be-scanned member. Last-stage reflecting mirrors in the first and second mirror groups are arranged on one side of the beams deflected by the optical deflector in the second direction.

摘要翻译： 一种光学扫描装置，其布置在沿第二方向的至少两个待扫描构件的一侧上，并且两个被扫描构件沿垂直于第二方向的第一方向布置，包括：照明系统， 发射包括偏振方向彼此不同的第一光束和第二光束的光束; 偏转光束的光学偏转器; 以及扫描光学系统，其包括透射第一和第二光束中的一个并反射另一光束的偏振分离元件; 第一反射镜组，包括用于将第一光束引导到被扫描部件的反射镜; 以及包括用于将第二光束引导到被扫描部件的反射镜的第二反射镜组。 第一和第二反射镜组中的后级反射镜布置在由光学偏转器沿第二方向偏转的光束的一侧上。

公开(公告)号：US08531766B2

公开(公告)日：2013-09-10

申请号：US12826237

申请日：2010-06-29

申请人： Toshiaki Tokita ,  Nobuaki Kubo ,  Kenichiro Saisho

发明人： Toshiaki Tokita ,  Nobuaki Kubo ,  Kenichiro Saisho

IPC分类号： G02B5/30

CPC分类号： G02B26/123 ,  B41J2/473 ,  H04N1/1135 ,  H04N1/12 ,  H04N2201/0082

摘要： A polarization-separation device includes: a beam splitter that includes a beam-separating surface, on which a light beam that contains a first light beam and a second light beam impinges, wherein polarization direction of the first light beam and polarization direction of the second light beam are perpendicular to each other, and incident angle of the first light beam and incident angle of the second beam vary independently while incident into the beam-separating surface; a first polarizer arranged in an optical path of light beams having transmitted through the beam splitter, and allows the first light beam to transmit therethrough; and a second polarizer arranged in an optical path of light beams reflected from the beam splitter, and allows the second light beam to transmit therethrough.

摘要翻译： 偏振分离装置包括：分束器，包括光束分离表面，其上包含第一光束和第二光束的光束照射在其上，其中第一光束的偏振方向和第二光束的偏振方向 光束彼此垂直，并且第一光束的入射角和第二光束的入射角在入射到光束分离表面时独立地变化; 布置在透射通过分束器的光束的光路中并且允许第一光束透射的第一偏振器; 以及布置在从分束器反射的光束的光路中的第二偏振器，并且允许第二光束透射通过。

公开(公告)号：US20110235132A1

公开(公告)日：2011-09-29

申请号：US13053762

申请日：2011-03-22

申请人： Kenichiroh Saisho ,  Toshiaki Tokita ,  Nobuaki Kubo

发明人： Kenichiroh Saisho ,  Toshiaki Tokita ,  Nobuaki Kubo

IPC分类号： H04N1/04 ,  G02B26/10

CPC分类号： G02B26/123 ,  G02B27/283 ,  H04N1/1135

摘要： An optical scanning device includes a light source that emits first and second light beams, and an optical splitter to which the first and second light beams deflected by an optical deflector are incident. Principal rays of the first and second light beams incident to the optical splitter are nonparallel to each other in a plane orthogonal to a main-scanning direction. Transmitted light from the optical splitter out of the first light beam and reflected light from the optical splitter out of the second light beam are guided to corresponding scanning target surfaces, and transmitted light from the optical splitter out of the second light beam and reflected light from the optical splitter out of the first light beam reach none of the scanning target surfaces.

摘要翻译： 光学扫描装置包括发射第一和第二光束的光源和由光学偏转器偏转的第一和第二光束入射的光分路器。 入射到分光器的第一和第二光束的主光线在与主扫描方向正交的平面中彼此不平行。 来自第一光束的分光器的透射光和来自第二光束的光分路器的反射光被引导到相应的扫描目标表面，并且将来自光分路器的光从第二光束和第二光束中反射出来 第一光束中的分光器不到达扫描目标表面。