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公开(公告)号:US10718575B2
公开(公告)日:2020-07-21
申请号:US15851406
申请日:2017-12-21
Applicant: Nokia Technologies Oy
Inventor: Ryan Enright , Ross Lundy , Shenghui Lei , Shreyas Chavan
Abstract: An apparatus and heat transfer system, the apparatus comprising: a substrate; a plurality of nucleation sites provided on the substrate; a nanostructured surface surrounding the nucleation sites arranged to enable coalescence induced droplet jumping; wherein both the plurality of nucleation sites and the nanostructured surface are hydrophobic.
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公开(公告)号:US11823902B2
公开(公告)日:2023-11-21
申请号:US16978961
申请日:2019-03-19
Applicant: Nokia Technologies Oy
Inventor: Ross Lundy , Ryan Enright
IPC: H01L21/027 , H01L21/02 , H01L21/67 , H01L21/66
CPC classification number: H01L21/0271 , H01L21/02118 , H01L21/02282 , H01L21/02318 , H01L21/67248 , H01L22/26
Abstract: An apparatus and method which may be used for fabricating nanoscale devices are disclosed. The apparatus comprises measurement means configured to measure swelling of a block copolymer during solvent vapour annealing of the block copolymer. The apparatus also comprises temperature control means configured to receive a control signal indicative of the swelling of the block copolymer. The temperature control means can then control the temperature of the block copolymer as indicated by the control signal.
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