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    Method of manufacturing recognition sensor
    2.
    发明授权
    Method of manufacturing recognition sensor 有权
    识别传感器的制造方法

    公开(公告)号：US07360293B2

    公开(公告)日：2008-04-22

    申请号：US11102269

    申请日：2005-04-07

    申请人： Norio Sato ,  Katsuyuki Machida ,  Hakaru Kyuragi ,  Satoshi Shigematsu ,  Hiroki Morimura ,  Hiromu Ishii ,  Toshishige Shimamura

    发明人： Norio Sato ,  Katsuyuki Machida ,  Hakaru Kyuragi ,  Satoshi Shigematsu ,  Hiroki Morimura ,  Hiromu Ishii ,  Toshishige Shimamura

    IPC分类号： G01R3/00

    CPC分类号： G06K9/0002 ,  Y10T29/49002 ,  Y10T29/49007 ,  Y10T29/49117 ,  Y10T29/4913

    摘要： A method of manufacturing a surface shape recognition sensor. A sacrificial film is formed on an interlevel dielectric to cover a lower electrode while keeping an upper portion of a support electrode exposed. An upper electrode is formed on the sacrificial film and support electrode. The sacrificial film is selectively removed and a protective film is formed on the upper electrode. A photosensitive resin film having photosensitivity is formed on the protective film. A plurality of projections are formed in a region of the protective film above a capacitive detection element. In this manner a plurality of capacitive detection elements each having the lower electrode and upper electrode are formed.

    摘要翻译： 一种制造表面形状识别传感器的方法。 牺牲膜形成在层间电介质上以覆盖下电极，同时保持支撑电极的上部暴露。 在牺牲膜和支撑电极上形成上电极。 选择性地除去牺牲膜，并在上电极上形成保护膜。 在保护膜上形成具有感光性的感光性树脂膜。 在电容检测元件上方的保护膜的区域中形成有多个突起。 以这种方式形成多个具有下电极和上电极的电容检测元件。

    Surface shape recognition sensor and method of manufacturing the same
    3.
    发明授权
    Surface shape recognition sensor and method of manufacturing the same 有权
    表面形状识别传感器及其制造方法

    公开(公告)号：US07123026B2

    公开(公告)日：2006-10-17

    申请号：US10052640

    申请日：2002-01-18

    申请人： Norio Sato ,  Katsuyuki Machida ,  Hakaru Kyuragi ,  Satoshi Shigematsu ,  Hiroki Morimura ,  Hiromu Ishii ,  Toshishige Shimamura

    发明人： Norio Sato ,  Katsuyuki Machida ,  Hakaru Kyuragi ,  Satoshi Shigematsu ,  Hiroki Morimura ,  Hiromu Ishii ,  Toshishige Shimamura

    IPC分类号： G01R27/06 ,  G01R27/08

    CPC分类号： G06K9/0002 ,  Y10T29/49002 ,  Y10T29/49007 ,  Y10T29/49117 ,  Y10T29/4913

    摘要： A surface shape recognition sensor includes capacitive detection elements, support electrode, protective film, and projections. The detection elements are formed from lower electrodes and a deformable plate-like upper electrode made of a metal. The lower electrodes are insulated and isolated from each other and stationarily laid out on a single plane of an interlevel dielectric formed on a semiconductor substrate. The upper electrode is laid out above the lower electrodes at a predetermined interval and has opening portions. The support electrode is laid out around the lower electrodes while being insulated and isolated from the lower electrodes, and formed to be higher than the lower electrodes to support the upper electrode. The protective film is formed on the upper electrode to close the opening portions. The projections per one pixel are laid out in a region of the protective film above the capacitive detection element.

    摘要翻译： 表面形状识别传感器包括电容性检测元件，支撑电极，保护膜和突起。 检测元件由下电极和由金属制成的可变形的板状上电极形成。 下电极彼此绝缘并隔离并且固定地布置在形成在半导体衬底上的层间电介质的单个平面上。 上电极以预定间隔布置在下电极上方并具有开口部分。 支撑电极围绕下电极布置，同时与下电极绝缘和隔离，并且形成为高于下电极以支撑上电极。 保护膜形成在上电极上以封闭开口部分。 每个像素的突起布置在电容检测元件上方的保护膜的区域中。

    Small shape recognizing capacitive sensor device
    5.
    发明授权
    Small shape recognizing capacitive sensor device 有权

    公开(公告)号：US06556935B2

    公开(公告)日：2003-04-29

    申请号：US09877829

    申请日：2001-06-08

    申请人： Hiroki Morimura ,  Satoshi Shigematsu ,  Katsuyuki Machida ,  Hakaru Kyuragi ,  Toshishige Shimamura

    发明人： Hiroki Morimura ,  Satoshi Shigematsu ,  Katsuyuki Machida ,  Hakaru Kyuragi ,  Toshishige Shimamura

    IPC分类号： G01F2500

    CPC分类号： G06K9/0002

    摘要： A small shape recognizing capacitive sensor device includes detection elements, sensor circuits, and a correction circuit. The detection elements are arranged adjacent to each other. The sensor circuits are connected to the detection elements, respectively. The correction circuit corrects the output signal level of the sensor circuit. The output signal level correction circuit includes a calibration circuit, calibration reference signal generation circuit, and comparison circuit. The calibration circuit is connected to the output side of the sensor circuit. The calibration reference signal generation circuit generates a calibration reference signal. The comparison circuit compares the output from the sensor circuit with the calibration reference signal and supplies the difference output to the calibration circuit as a control signal. The calibration circuit corrects the level of the sensor circuit output on the basis of the control signal such that the difference between the output from the sensor circuit and the calibration reference signal becomes zero.

    Organism recognition system
    6.
    发明申请
    Organism recognition system 失效
    生物识别系统

    公开(公告)号：US20060034493A1

    公开(公告)日：2006-02-16

    申请号：US10520879

    申请日：2004-08-12

    申请人： Toshishige Shimamura ,  Hiroki Morimura ,  Satoshi Shigematsu ,  Norio Sato ,  Masami Urano ,  Katsuyuki Machida

    发明人： Toshishige Shimamura ,  Hiroki Morimura ,  Satoshi Shigematsu ,  Norio Sato ,  Masami Urano ,  Katsuyuki Machida

    IPC分类号： G06K9/00

    CPC分类号： G06K9/0012 ,  A61B5/0531 ,  A61B5/1172 ,  A61B5/6826 ,  A61B5/6838 ,  G06K9/00899

    摘要： A response signal generating unit (3) applies a predetermined supply signal (2S) to a detection element (1) and outputs, as a response signal (3S), a signal which has changed in accordance with the impedance of an object (10) with which the unit is in contact through the detection element (1). A waveform information detection unit (4) detects waveform information corresponding to the impedance of the object (10) on the basis of the response signal (3S) from the response signal generating unit (3), and outputs a detection signal (4S) representing the waveform information. A biometric recognition unit (5) determines on the basis of the detection signal (4S) from the waveform information detection unit (4) whether or not the object (10) is a living body.

    摘要翻译： 响应信号生成单元（3）将预定的供给信号（2S）施加到检测元件（1），并输出根据对象的阻抗而变化的信号作为响应信号（3S） 10），其通过检测元件（1）与单元接触。 波形信息检测单元（4）根据来自响应信号生成单元（3）的响应信号（3 S）检测与物体（10）的阻抗相对应的波形信息，并输出检测信号（4S ）表示波形信息。 生物识别单元（5）根据来自波形信息检测单元（4）的检测信号（4S）确定物体（10）是否为活体。

    Surface shape recognition sensor device
    7.
    发明授权
    Surface shape recognition sensor device 有权
    表面形状识别传感器装置

    公开(公告)号：US07508963B2

    公开(公告)日：2009-03-24

    申请号：US12079818

    申请日：2008-03-28

    申请人： Toshishige Shimamura ,  Hiroki Morimura ,  Satoshi Shigematsu ,  Norio Sato ,  Masami Urano ,  Katsuyuki Machida

    发明人： Toshishige Shimamura ,  Hiroki Morimura ,  Satoshi Shigematsu ,  Norio Sato ,  Masami Urano ,  Katsuyuki Machida

    IPC分类号： G06K9/00

    CPC分类号： G06K9/0002 ,  G06K9/0012

    摘要： A detection element (1A) having a detection electrode (11A) connected to a surface shape detection unit (2) and a detection electrode (12A) connected to a common potential, and a detection element (1B) having a detection electrode (11B) connected to the surface shape detection unit (2) and a detection electrode (12B) connected to a biometric recognition unit (3) are arranged. The surface shape detection unit (2) outputs a signal representing the three-dimensional pattern of the surface shape corresponding to the contact portion to each detection element on the basis of individual capacitances obtained from the detection elements (1A, 1B). The biometric recognition unit (3) determines whether an object (9) is a living body, on the basis of a signal corresponding to the impedance of the object (9) connected between the detection electrode (12B) of the detection element (1B) and the detection electrode (12A) of the detection element (1A).

    摘要翻译： 一种具有连接到表面形状检测单元（2）的检测电极（11A）和与公共电位连接的检测电极（12A）的检测元件（1A）和具有检测电极（11B）的检测元件（1B） 连接到表面形状检测单元（2）和连接到生物识别单元（3）的检测电极（12B）。 表面形状检测单元（2）基于从检测元件（1A，1B）获得的各个电容，将表示与接触部分相对应的表面形状的三维图案的信号输出到每个检测元件。 生物识别单元（3）基于与检测元件（1B）的检测电极（12B）之间连接的物体（9）的阻抗相对应的信号来判定物体（9）是否为活体， 和检测元件（1A）的检测电极（12A）。

    Surface shape recognition sensor device
    8.
    发明申请
    Surface shape recognition sensor device 有权
    表面形状识别传感器装置

    公开(公告)号：US20080187192A1

    公开(公告)日：2008-08-07

    申请号：US12079818

    申请日：2008-03-28

    申请人： Toshishige Shimamura ,  Hiroki Morimura ,  Satoshi Shigematsu ,  Norio Sato ,  Masami Urano ,  Katsuyuki Machida

    发明人： Toshishige Shimamura ,  Hiroki Morimura ,  Satoshi Shigematsu ,  Norio Sato ,  Masami Urano ,  Katsuyuki Machida

    IPC分类号： G06K9/00

    CPC分类号： G06K9/0002 ,  G06K9/0012

    摘要： A detection element (1A) having a detection electrode (11A) connected to a surface shape detection unit (2) and a detection electrode (12A) connected to a common potential, and a detection element (1B) having a detection electrode (11B) connected to the surface shape detection unit (2) and a detection electrode (12B) connected to a biometric recognition unit (3) are arranged. The surface shape detection unit (2) outputs a signal representing the three-dimensional pattern of the surface shape corresponding to the contact portion to each detection element on the basis of individual capacitances obtained from the detection elements (1A, 1B). The biometric recognition unit (3) determines whether an object (9) is a living body, on the basis of a signal corresponding to the impedance of the object (9) connected between the detection electrode (12B) of the detection element (1B) and the detection electrode (12A) of the detection element (1A).

    摘要翻译： 具有连接到表面形状检测单元（2）的检测电极（11A）和与公共电位连接的检测电极（12A）的检测元件（1A）和具有检测元件 连接到表面形状检测单元（2）的电极（11B）和连接到生物识别单元（3）的检测电极（12B）。 表面形状检测单元（2）基于从检测元件（1A，1B）获得的各个电容，将表示与接触部分相对应的表面形状的三维图案的信号输出到每个检测元件。 生物识别单元（3）基于与检测元件（1）的检测电极（12B）之间连接的物体（9）的阻抗相对应的信号来判定物体（9）是活体， B）和检测元件（1A）的检测电极（12A）。

    Surface shape recognition sensor
    9.
    发明授权
    Surface shape recognition sensor 有权
    表面形状识别传感器

    公开(公告)号：US07366332B2

    公开(公告)日：2008-04-29

    申请号：US10528283

    申请日：2004-08-12

    申请人： Toshishige Shimamura ,  Hiroki Morimura ,  Satoshi Shigematsu ,  Norio Sato ,  Masami Urano ,  Katsuyuki Machida

    发明人： Toshishige Shimamura ,  Hiroki Morimura ,  Satoshi Shigematsu ,  Norio Sato ,  Masami Urano ,  Katsuyuki Machida

    IPC分类号： G06K9/00

    CPC分类号： G06K9/0002 ,  G06K9/0012

    摘要： A detection element (1A) having a detection electrode (11A) connected to a surface shape detection unit (2) and a detection electrode (12A) connected to a common potential, and a detection element (1B) having a detection electrode (11B) connected to the surface shape detection unit (2) and a detection electrode (12B) connected to a biometric recognition unit (3) are arranged. The surface shape detection unit (2) outputs a signal representing the three-dimensional pattern of the surface shape corresponding to the contact portion to each detection element on the basis of individual capacitances obtained from the detection elements (1A, 1B). The biometric recognition unit (3) determines whether an object (9) is a living body, on the basis of a signal corresponding to the impedance of the object (9) connected between the detection electrode (12B) of the detection element (1B) and the detection electrode (12A) of the detection element (1A).

    摘要翻译： 具有连接到表面形状检测单元（2）的检测电极（11A）和与公共电位连接的检测电极（12A）的检测元件（1A）和具有检测元件 连接到表面形状检测单元（2）的电极（11B）和连接到生物识别单元（3）的检测电极（12B）。 表面形状检测单元（2）基于从检测元件（1A，1B）获得的各个电容，将表示与接触部分相对应的表面形状的三维图案的信号输出到每个检测元件。 生物识别单元（3）基于与检测元件（1）的检测电极（12B）之间连接的物体（9）的阻抗相对应的信号来判定物体（9）是活体， B）和检测元件（1A）的检测电极（12A）。

    Organism recognition system
    10.
    发明授权
    Organism recognition system 失效
    生物识别系统

    公开(公告)号：US07548636B2

    公开(公告)日：2009-06-16

    申请号：US10520879

    申请日：2004-08-12

    申请人： Toshishige Shimamura ,  Hiroki Morimura ,  Satoshi Shigematsu ,  Norio Sato ,  Masami Urano ,  Katsuyuki Machida

    发明人： Toshishige Shimamura ,  Hiroki Morimura ,  Satoshi Shigematsu ,  Norio Sato ,  Masami Urano ,  Katsuyuki Machida

    IPC分类号： G06K9/00 ,  G06F7/04

    CPC分类号： G06K9/0012 ,  A61B5/0531 ,  A61B5/1172 ,  A61B5/6826 ,  A61B5/6838 ,  G06K9/00899

    摘要： A response signal generating unit (3) applies a predetermined supply signal (2S) to a detection element (1) and outputs, as a response signal (3S), a signal which has changed in accordance with the impedance of an object (10) with which the unit is in contact through the detection element (1). A waveform information detection unit (4) detects waveform information corresponding to the impedance of the object (10) on the basis of the response signal (3S) from the response signal generating unit (3), and outputs a detection signal (4S) representing the waveform information. A biometric recognition unit (5) determines on the basis of the detection signal (4S) from the waveform information detection unit (4) whether or not the object (10) is a living body.

    摘要翻译： 响应信号生成单元（3）向检测元件（1）施加预定的供给信号（2S），作为响应信号（3S）输出根据物体（10）的阻抗而变化的信号， 单元通过检测元件（1）与其接触。 波形信息检测单元（4）根据来自响应信号生成单元（3）的响应信号（3S）检测与物体（10）的阻抗相对应的波形信息，并输出表示 波形信息。 生物识别单元（5）根据来自波形信息检测单元（4）的检测信号（4S）确定物体（10）是否为生物体。