Plasma processing system
    1.
    发明授权
    Plasma processing system 失效
    等离子体处理系统

    公开(公告)号:US06376796B2

    公开(公告)日:2002-04-23

    申请号:US09738989

    申请日:2000-12-19

    IPC分类号: B23K902

    CPC分类号: H01J37/32192 H05B7/00

    摘要: A plasma processing system provided with a vacuum chamber for accommodating a substrate and for generation of plasma in a space in the front of the same, an antenna provided at the vacuum chamber, and a high frequency power source for supplying high frequency power to the antenna. The antenna emits high frequency power, generates plasma inside the vacuum chamber, and processes the surface of the substrate by the plasma. In the plasma processing system, the antenna has a disk-shaped conductor plate having a predetermined thickness. A coaxial waveguide having a folded portion is formed around the disk-shaped conductor plate. The folded portion of the waveguide is provided with a short-circuit 3 dB directional coupler having an impedance matching function. The antenna having the above structure prevents the generation of a standing wave in the high frequency wave propagation path from the high frequency power source to the vacuum chamber and generates high density plasma by supply of a large power. Due to this, processing of a large area substrate becomes possible.

    摘要翻译: 一种等离子体处理系统,其具有用于容纳基板的真空室和用于在其前部的空间中产生等离子体,设置在真空室处的天线以及用于向天线提供高频功率的高频电源 。 天线发射高频功率,在真空室内产生等离子体,并通过等离子体处理衬底的表面。 在等离子体处理系统中,天线具有预定厚度的盘状导体板。 在盘形导体板周围形成具有折叠部分的同轴波导。 波导的折叠部分设置有具有阻抗匹配功能的短路3dB定向耦合器。 具有上述结构的天线防止在从高频电源到真空室的高频波传播路径中产生驻波,并通过大功率的供给产生高密度等离子体。 由此,能够对大面积基板进行加工。

    Plasma generating apparatus and semiconductor manufacturing method
    2.
    发明授权
    Plasma generating apparatus and semiconductor manufacturing method 有权
    等离子体发生装置和半导体制造方法

    公开(公告)号:US06380684B1

    公开(公告)日:2002-04-30

    申请号:US09573253

    申请日:2000-05-18

    IPC分类号: H05H146

    CPC分类号: H01J37/32082 H01J37/3266

    摘要: A plasma generating apparatus and processing method, which generate high-density plasma, even in the central portion of the plasma generating zone. The apparatus comprises rectangular electrodes, a rectangular fistulous discharge electrode which surrounds the plasma generating zone, and a vacuum chamber of rectangular cross-section. Permanent magnets surround the discharge electrode, produce predetermined magnetic lines of force with portions which extend approximately parallel to the central axis of discharge electrode. A pair of parallel plate electrodes define the extension of the plasma generating zone in the direction of the central axis of the discharge electrode. The apparatus is configured such that the magnetic lines of force passing through the central portion of the plasma generating zone do not intersect with the electrodes.

    摘要翻译: 即使在等离子体产生区域的中心部分也产生高密度等离子体的等离子体发生装置和处理方法。 该装置包括矩形电极,围绕等离子体生成区域的矩形排出电极和矩形横截面的真空室。 永磁体围绕放电电极,产生预定的磁力线,其部分大致平行于放电电极的中心轴延伸。 一对平行板电极限定等离子体生成区在放电电极的中心轴线方向上的延伸。 该装置被配置成使得通过等离子体产生区的中心部分的磁力线不与电极相交。

    Image forming apparatus using system and office supply information server
    3.
    发明申请
    Image forming apparatus using system and office supply information server 审中-公开
    使用系统和办公用品信息服务器的图像形成装置

    公开(公告)号:US20060168005A1

    公开(公告)日:2006-07-27

    申请号:US10559665

    申请日:2004-06-03

    IPC分类号: G06F15/16

    CPC分类号: G06Q30/06 G06Q10/087

    摘要: An image forming apparatus using system including at least one image forming apparatus having a touch panel and an office supply information server that is connected to the image forming apparatuses via a network is provided. The image forming apparatus includes: a part for sending order information to the office supply information server; and a part for receiving information from the office supply information server, the office supply information server includes: a server information sending part for sending information to the image forming apparatus; and a client information receiving part for receiving information input from the touch panel of the image forming apparatus, and the image forming apparatus orders an office supply from the office supply information server.

    摘要翻译: 提供一种使用系统的图像形成装置,其包括具有触摸面板的至少一个图像形成装置和经由网络连接到图像形成装置的办公室供应信息服务器。 图像形成装置包括:向办公室供应信息服务器发送订单信息的部分; 以及用于从办公室供应信息服务器接收信息的部分,办公室供应信息服务器包括:服务器信息发送部分,用于向图像形成装置发送信息; 以及客户信息接收部分,用于接收从图像形成装置的触摸面板输入的信息,并且图像形成装置从办公室供应信息服务器订购办公室供应。

    Conjugated fatty acid containing monoglycerides and process for producing them
    4.
    发明授权
    Conjugated fatty acid containing monoglycerides and process for producing them 失效
    含有单酸甘油酯的共轭脂肪酸及其制备方法

    公开(公告)号:US07220873B2

    公开(公告)日:2007-05-22

    申请号:US10210207

    申请日:2002-08-02

    IPC分类号: C11C3/00

    摘要: This invention provides monoglycerides containing a conjugated fatty acid, and a process for producing the above described conjugated fatty acid containing monoglycerides in which all kinds of lipases can be used as catalysts.This invention relate to monoglycerides containing a conjugated fatty acid (preferably in an amount of 50% or more of fatty acids).This invention also relates to a process for producing the conjugated fatty acid containing monoglycerides, in which the conjugated fatty acid containing a free fatty acid and glycerol are subjected to the reaction of esterification, or of esterification and glycerolysis in the presence of lipase as a catalyst.

    摘要翻译: 本发明提供含有共轭脂肪酸的单酸甘油酯,以及含有单酸甘油酯的上述共轭脂肪酸的制造方法,其中可以使用各种脂肪酶作为催化剂。 本发明涉及含有共轭脂肪酸的单酸甘油酯(优选为脂肪酸的50%以上的量)。 本发明还涉及含有单酸甘油酯的共轭脂肪酸的制造方法,其中含有游离脂肪酸和甘油的共轭脂肪酸在脂肪酶作为催化剂存在下进行酯化反应或酯化和甘油分解 。

    Heat-resistant lipase
    5.
    发明授权
    Heat-resistant lipase 失效
    耐热脂肪酶

    公开(公告)号:US4665029A

    公开(公告)日:1987-05-12

    申请号:US583188

    申请日:1984-02-24

    IPC分类号: C12N9/20 C12R1/845 C12N1/14

    CPC分类号: C12N9/20 Y10S435/939

    摘要: A novel lipase characterized in that at least 95% of its original activity is maintained after being treated at a temperature of 30.degree. to 80.degree. C. for 15 minutes, which may be produced by cultivating Rhizopus chinensis FERM BP-936 in a culture medium and recovering the produced enzyme from the medium.

    摘要翻译: 一种新型脂肪酶,其特征在于,在30℃〜80℃的温度下处理15分钟后,将其原始活性的至少95%维持在培养基中培养中华根中华根FERM BP-936 并从培养基中回收生成的酶。