摘要:
A plasma processing system provided with a vacuum chamber for accommodating a substrate and for generation of plasma in a space in the front of the same, an antenna provided at the vacuum chamber, and a high frequency power source for supplying high frequency power to the antenna. The antenna emits high frequency power, generates plasma inside the vacuum chamber, and processes the surface of the substrate by the plasma. In the plasma processing system, the antenna has a disk-shaped conductor plate having a predetermined thickness. A coaxial waveguide having a folded portion is formed around the disk-shaped conductor plate. The folded portion of the waveguide is provided with a short-circuit 3 dB directional coupler having an impedance matching function. The antenna having the above structure prevents the generation of a standing wave in the high frequency wave propagation path from the high frequency power source to the vacuum chamber and generates high density plasma by supply of a large power. Due to this, processing of a large area substrate becomes possible.
摘要:
A plasma generating apparatus and processing method, which generate high-density plasma, even in the central portion of the plasma generating zone. The apparatus comprises rectangular electrodes, a rectangular fistulous discharge electrode which surrounds the plasma generating zone, and a vacuum chamber of rectangular cross-section. Permanent magnets surround the discharge electrode, produce predetermined magnetic lines of force with portions which extend approximately parallel to the central axis of discharge electrode. A pair of parallel plate electrodes define the extension of the plasma generating zone in the direction of the central axis of the discharge electrode. The apparatus is configured such that the magnetic lines of force passing through the central portion of the plasma generating zone do not intersect with the electrodes.
摘要:
An image forming apparatus using system including at least one image forming apparatus having a touch panel and an office supply information server that is connected to the image forming apparatuses via a network is provided. The image forming apparatus includes: a part for sending order information to the office supply information server; and a part for receiving information from the office supply information server, the office supply information server includes: a server information sending part for sending information to the image forming apparatus; and a client information receiving part for receiving information input from the touch panel of the image forming apparatus, and the image forming apparatus orders an office supply from the office supply information server.
摘要:
This invention provides monoglycerides containing a conjugated fatty acid, and a process for producing the above described conjugated fatty acid containing monoglycerides in which all kinds of lipases can be used as catalysts.This invention relate to monoglycerides containing a conjugated fatty acid (preferably in an amount of 50% or more of fatty acids).This invention also relates to a process for producing the conjugated fatty acid containing monoglycerides, in which the conjugated fatty acid containing a free fatty acid and glycerol are subjected to the reaction of esterification, or of esterification and glycerolysis in the presence of lipase as a catalyst.
摘要:
A novel lipase characterized in that at least 95% of its original activity is maintained after being treated at a temperature of 30.degree. to 80.degree. C. for 15 minutes, which may be produced by cultivating Rhizopus chinensis FERM BP-936 in a culture medium and recovering the produced enzyme from the medium.