公开(公告)号：US08257675B2

公开(公告)日：2012-09-04

申请号：US12336017

申请日：2008-12-16

申请人： Noriyuki Agata ,  Shinya Kikugawa ,  Yutaka Shimizu ,  Kazumi Yoshida ,  Masatoshi Nishimoto

发明人： Noriyuki Agata ,  Shinya Kikugawa ,  Yutaka Shimizu ,  Kazumi Yoshida ,  Masatoshi Nishimoto

IPC分类号： C01B33/12

CPC分类号： C03C3/06 ,  C03C2201/02 ,  C03C2201/32 ,  C03C2201/50 ,  C30B7/10 ,  C30B29/18 ,  Y10T117/1008

摘要： An object of the present invention is to provide an artificial quartz member inhibited from suffering the decrease in transmittance in a laser light wavelength region which is caused by long-term irradiation with a laser light having a wavelength of 200 nm or shorter; and a process for producing the artificial quartz member. The invention provides an artificial quartz member for use as an optical element to be irradiated with a laser light having a wavelength of 200 nm or shorter, having an aluminum content of 200 ppb or lower.

摘要翻译： 本发明的目的在于提供一种人造石英部件，该人造石英部件由于长时间照射波长为200nm以下的激光而导致的激光波长区域的透射率降低; 以及人造石英部件的制造方法。 本发明提供一种人造石英部件，其用作要用200ppm或更低的铝含量的波长为200nm或更短的激光照射的光学元件。