Damascene Template for Directed Assembly and Transfer of Nanoelements

    公开(公告)号:US20190161883A1

    公开(公告)日:2019-05-30

    申请号:US16243832

    申请日:2019-01-09

    摘要: Damascene templates have two-dimensionally patterned raised metal features disposed on an underlying conductive layer extending across a substrate. The templates are topographically flat overall, and the patterned conductive features establish micron-scale and nanometer-scale patterns for the assembly of nanoelements into nanoscale circuits and sensors. The templates are made using microfabrication techniques together with chemical mechanical polishing. These templates are compatible with various directed assembly techniques, including electrophoresis, and offer essentially 100% efficient assembly and transfer of nanoelements in a continuous operation cycle. The templates can be repeatedly used for transfer of patterned nanoelements thousands of times with minimal or no damage, and the transfer process involves no intermediate processes between cycles. The assembly and transfer processes employed are carried out at room temperature and pressure and are thus amenable to low cost, high-rate device production.

    Damascene template for directed assembly and transfer of nanoelements

    公开(公告)号:US10208394B2

    公开(公告)日:2019-02-19

    申请号:US15180262

    申请日:2016-06-13

    摘要: Damascene templates have two-dimensionally patterned raised metal features disposed on an underlying conductive layer extending across a substrate. The templates are topographically flat overall, and the patterned conductive features establish micron-scale and nanometer-scale patterns for the assembly of nanoelements into nanoscale circuits and sensors. The templates are made using microfabrication techniques together with chemical mechanical polishing. These templates are compatible with various directed assembly techniques, including electrophoresis, and offer essentially 100% efficient assembly and transfer of nanoelements in a continuous operation cycle. The templates can be repeatedly used for transfer of patterned nanoelements thousands of times with minimal or no damage, and the transfer process involves no intermediate processes between cycles. The assembly and transfer processes employed are carried out at room temperature and pressure and are thus amenable to low cost, high-rate device production.

    Damascene Template for Directed Assembly and Transfer of Nanoelements
    3.
    发明申请
    Damascene Template for Directed Assembly and Transfer of Nanoelements 审中-公开
    用于导向装配和转移纳米元件的大马士革模板

    公开(公告)号:US20170009365A1

    公开(公告)日:2017-01-12

    申请号:US15180262

    申请日:2016-06-13

    IPC分类号: C25D13/02 C25D15/00

    摘要: Damascene templates have two-dimensionally patterned raised metal features disposed on an underlying conductive layer extending across a substrate. The templates are topographically flat overall, and the patterned conductive features establish micron-scale and nanometer-scale patterns for the assembly of nanoelements into nanoscale circuits and sensors. The templates are made using microfabrication techniques together with chemical mechanical polishing. These templates are compatible with various directed assembly techniques, including electrophoresis, and offer essentially 100% efficient assembly and transfer of nanoelements in a continuous operation cycle. The templates can be repeatedly used for transfer of patterned nanoelements thousands of times with minimal or no damage, and the transfer process involves no intermediate processes between cycles. The assembly and transfer processes employed are carried out at room temperature and pressure and are thus amenable to low cost, high-rate device production.

    摘要翻译: 镶嵌模板具有二维图案化的凸起金属特征,其设置在跨越衬底延伸的下面的导电层上。 模板在整体上在地形上平坦,并且图案化的导电特征建立了用于将纳米元件组装成纳米尺度电路和传感器的微米级和纳米级图案。 模板使用微加工技术和化学机械抛光制成。 这些模板与各种定向组装技术(包括电泳)兼容,并且在连续的操作循环中提供基本上100%的有效组装和转移纳米元件。 可以重复使用模板,以最小或无损伤的方式传输图案化纳米元件数千次,并且转印过程不涉及循环之间的中间过程。 所采用的组装和转移方法在室温和压力下进行,因此可以实现低成本,高速率的装置生产。

    Damascene template for directed assembly and transfer of nanoelements
    4.
    发明授权
    Damascene template for directed assembly and transfer of nanoelements 有权
    用于定向组装和转移纳米元素的镶嵌模板

    公开(公告)号:US09365946B2

    公开(公告)日:2016-06-14

    申请号:US14356328

    申请日:2012-11-08

    摘要: Damascene templates have two-dimensionally patterned raised metal features disposed on an underlying conductive layer extending across a substrate. The templates are topographically flat overall, and the patterned conductive features establish micron-scale and nanometer-scale patterns for the assembly of nanoelements into nanoscale circuits and sensors. The templates are made using microfabrication techniques together with chemical mechanical polishing. These templates are compatible with various directed assembly techniques, including electrophoresis, and offer essentially 100% efficient assembly and transfer of nanoelements in a continuous operation cycle. The templates can be repeatedly used for transfer of patterned nanoelements thousands of times with minimal or no damage, and the transfer process involves no intermediate processes between cycles. The assembly and transfer processes employed are carried out at room temperature and pressure and are thus amenable to low cost, high-rate device production.

    摘要翻译: 镶嵌模板具有二维图案化的凸起金属特征,其设置在跨越衬底延伸的下面的导电层上。 模板在整体上在地形上平坦,并且图案化的导电特征建立了用于将纳米元件组装成纳米尺度电路和传感器的微米级和纳米级图案。 模板使用微加工技术和化学机械抛光制成。 这些模板与各种定向组装技术(包括电泳)兼容,并且在连续的操作循环中提供基本上100%的有效组装和转移纳米元件。 可以重复使用模板,以最小或无损伤的方式传输图案化纳米元件数千次,并且转印过程不涉及循环之间的中间过程。 所采用的组装和转移方法在室温和压力下进行,因此可以实现低成本,高速率的装置生产。

    Damascene template for directed assembly and transfer of nanoelements

    公开(公告)号:US10815582B2

    公开(公告)日:2020-10-27

    申请号:US16243832

    申请日:2019-01-09

    摘要: Damascene templates have two-dimensionally patterned raised metal features disposed on an underlying conductive layer extending across a substrate. The templates are topographically flat overall, and the patterned conductive features establish micron-scale and nanometer-scale patterns for the assembly of nanoelements into nanoscale circuits and sensors. The templates are made using microfabrication techniques together with chemical mechanical polishing. These templates are compatible with various directed assembly techniques, including electrophoresis, and offer essentially 100% efficient assembly and transfer of nanoelements in a continuous operation cycle. The templates can be repeatedly used for transfer of patterned nanoelements thousands of times with minimal or no damage, and the transfer process involves no intermediate processes between cycles. The assembly and transfer processes employed are carried out at room temperature and pressure and are thus amenable to low cost, high-rate device production.

    Damascene Template for Directed Assembly and Transfer of Nanoelements
    7.
    发明申请
    Damascene Template for Directed Assembly and Transfer of Nanoelements 有权
    用于导向装配和转移纳米元件的大马士革模板

    公开(公告)号:US20140318967A1

    公开(公告)日:2014-10-30

    申请号:US14356328

    申请日:2012-11-08

    IPC分类号: C25D13/00

    摘要: Damascene templates have two-dimensionally patterned raised metal features disposed on an underlying conductive layer extending across a substrate. The templates are topographically flat overall, and the patterned conductive features establish micron-scale and nanometer-scale patterns for the assembly of nanoelements into nanoscale circuits and sensors. The templates are made using microfabrication techniques together with chemical mechanical polishing. These templates are compatible with various directed assembly techniques, including electrophoresis, and offer essentially 100% efficient assembly and transfer of nanoelements in a continuous operation cycle. The templates can be repeatedly used for transfer of patterned nanoelements thousands of times with minimal or no damage, and the transfer process involves no intermediate processes between cycles. The assembly and transfer processes employed are carried out at room temperature and pressure and are thus amenable to low cost, high-rate device production.

    摘要翻译: 镶嵌模板具有二维图案化的凸起金属特征,其设置在跨越衬底延伸的下面的导电层上。 模板在整体上在地形上平坦,并且图案化的导电特征建立了用于将纳米元件组装成纳米尺度电路和传感器的微米级和纳米级图案。 模板使用微加工技术和化学机械抛光制成。 这些模板与各种定向组装技术(包括电泳)兼容,并且在连续的操作循环中提供基本上100%的有效组装和转移纳米元件。 可以重复使用模板,以最小或无损伤的方式传输图案化纳米元件数千次,并且转印过程不涉及循环之间的中间过程。 所采用的组装和转移方法在室温和压力下进行,因此可以实现低成本,高速率的装置生产。