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公开(公告)号：US10233559B2
公开(公告)日：2019-03-19
申请号：US15350636
申请日：2016-11-14
发明人： Asli Sirman , Ahmed Busnaina , Cihan Yilmaz , Jun Huang , Sivasubramanian Somu
IPC分类号： C25D13/22 , H05K1/03 , H05K1/09 , H05K3/12 , C25D13/12 , C25D13/04 , C25D13/20 , C09D5/44 , C09D125/06 , B82Y40/00 , H05K1/02 , H01L21/02 , H01L29/06 , B82Y30/00
摘要： A method for high rate assembly of nanoelements into two-dimensional void patterns on a non-conductive substrate surface utilizes an applied electric field to stabilize against forces resulting from pulling the substrate through the surface of a nanoelement suspension. The electric field contours emanating from a conductive layer in the substrate, covered by an insulating layer, are modified by a patterned photoresist layer, resulting in an increased driving force for nanoelements to migrate from a liquid suspension to voids on a patterned substrate having a non-conductive surface. The method can be used for the production of microscale and nanoscale circuits, sensors, and other electronic devices.
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2.发明申请Nanoscale Interconnects Fabricated by Electrical Field Directed Assembly of Nanoelements 有权纳米级互连器件由电场制造，纳米元件组装公开(公告)号：US20150371900A1
公开(公告)日：2015-12-24
申请号：US14837227
申请日：2015-08-27
IPC分类号： H01L21/768 , H01L23/532 , H01L23/522
CPC分类号： H01L21/76879 , B82Y10/00 , B82Y30/00 , C25D13/00 , H01L21/2885 , H01L23/5226 , H01L23/53214 , H01L23/53228 , H01L23/53242 , H01L23/53257 , H01L23/53276 , H01L2221/1094 , H01L2924/0002 , H01L2924/00
摘要： The invention provides a fast, scalable, room temperature process for fabricating metallic nanorods from nanoparticles or fabricating metallic or semiconducting nanorods from carbon nanotubes suspended in an aqueous solution. The assembled nanorods are suitable for use as nanoscale interconnects in CMOS-based devices and sensors. Metallic nanoparticles or carbon nanotubes are assembled into lithographically patterned vias by applying an external electric field. Since the dimensions of nanorods are controlled by the dimensions of vias, the nanorod dimensions can be scaled down to the low nanometer range. The aqueous assembly process is environmentally friendly and can be used to make nanorods using different types of metallic particles as well as semiconducting and metallic nanotubes.
摘要翻译： 本发明提供了用于从纳米颗粒制造金属纳米棒的快速，可扩展的室温工艺，或者从悬浮在水溶液中的碳纳米管制造金属或半导体纳米棒。 组装的纳米棒适合用作基于CMOS的器件和传感器中的纳米级互连。 通过施加外部电场将金属纳米颗粒或碳纳米管组装成光刻图案化的通孔。 由于纳米棒的尺寸由通孔的尺寸控制，纳米棒尺寸可以缩小到低纳米范围。 水性组合方法是环境友好的，并且可以用于制备使用不同类型的金属颗粒以及半导体和金属纳米管的纳米棒。
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公开(公告)号：US20140227722A1
公开(公告)日：2014-08-14
申请号：US14201006
申请日：2014-03-07
发明人： Asanterabi Malima , Ahmed Busnaina , Salome Siavoshi , Sivasubramanian Somu , Cihan Yilmaz , Tiziana Musacchio , Jaydev Upponi , Vladimir Torchilin
IPC分类号： G01N33/574
CPC分类号： G01N33/574 , G01N33/5438 , Y10T428/2457 , Y10T428/24612 , Y10T428/24942
摘要： Nanosubstrates as biosensors, methods of making such nanosubstrates, and methods of using such nanosubstrates to detect biomarkers are described.
摘要翻译： 描述了作为生物传感器的纳米基质，制备这种纳米基质的方法，以及使用这种纳米基质来检测生物标志物的方法。
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公开(公告)号：US11220756B2
公开(公告)日：2022-01-11
申请号：US16131658
申请日：2018-09-14
IPC分类号： C25D13/18 , C25D13/12 , C25D13/22 , C25D5/02 , C25D13/02 , C25D3/48 , B23K31/00 , B81C1/00 , H01L21/768 , H01L21/288
摘要： A variety of homogeneous or layered hybrid nanostructures are fabricated by electric field-directed assembly of nanoelements. The nanoelements and the fabricated nanostructures can be conducting, semi-conducting, or insulating, or any combination thereof. Factors for enhancing the assembly process are identified, including optimization of the electric field and combined dielectrophoretic and electrophoretic forces to drive assembly. The fabrication methods are rapid and scalable. The resulting nanostructures have electrical and optical properties that render them highly useful in nanoscale electronics, optics, and biosensors.
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公开(公告)号：US20190211467A1
公开(公告)日：2019-07-11
申请号：US16358324
申请日：2019-03-19
发明人： Asli Sirman , Ahmed Busnaina , Cihan Yilmaz , Jun Huang , Sivasubramanian Somu
IPC分类号： C25D13/22 , H05K1/09 , C25D13/04 , C09D5/44 , H05K3/12 , C25D13/20 , C09D125/06 , B82Y40/00 , H05K1/02 , C25D13/12 , H05K1/03
CPC分类号： C25D13/22 , B82Y30/00 , B82Y40/00 , C09D5/4407 , C09D5/4488 , C09D125/06 , C25D13/04 , C25D13/12 , C25D13/20 , H01L21/0243 , H01L21/0259 , H01L21/02628 , H01L29/0665 , H05K1/0213 , H05K1/0306 , H05K1/092 , H05K3/1258 , Y10S977/882 , Y10S977/892
摘要： A method for high rate assembly of nanoelements into two-dimensional void patterns on a non-conductive substrate surface utilizes an applied electric field to stabilize against forces resulting from pulling the substrate through the surface of a nanoelement suspension. The electric field contours emanating from a conductive layer in the substrate, covered by an insulating layer, are modified by a patterned photoresist layer, resulting in an increased driving force for nanoelements to migrate from a liquid suspension to voids on a patterned substrate having a non-conductive surface. The method can be used for the production of microscale and nanoscale circuits, sensors, and other electronic devices.
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公开(公告)号：US20190161883A1
公开(公告)日：2019-05-30
申请号：US16243832
申请日：2019-01-09
发明人： Ahmed Busnaina , Hanchul Cho , Sivasubramanian Somu , Jun Huang
摘要： Damascene templates have two-dimensionally patterned raised metal features disposed on an underlying conductive layer extending across a substrate. The templates are topographically flat overall, and the patterned conductive features establish micron-scale and nanometer-scale patterns for the assembly of nanoelements into nanoscale circuits and sensors. The templates are made using microfabrication techniques together with chemical mechanical polishing. These templates are compatible with various directed assembly techniques, including electrophoresis, and offer essentially 100% efficient assembly and transfer of nanoelements in a continuous operation cycle. The templates can be repeatedly used for transfer of patterned nanoelements thousands of times with minimal or no damage, and the transfer process involves no intermediate processes between cycles. The assembly and transfer processes employed are carried out at room temperature and pressure and are thus amenable to low cost, high-rate device production.
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公开(公告)号：US10208394B2
公开(公告)日：2019-02-19
申请号：US15180262
申请日：2016-06-13
发明人： Ahmed Busnaina , Hanchul Cho , Sivasubramanian Somu , Jun Huang
摘要： Damascene templates have two-dimensionally patterned raised metal features disposed on an underlying conductive layer extending across a substrate. The templates are topographically flat overall, and the patterned conductive features establish micron-scale and nanometer-scale patterns for the assembly of nanoelements into nanoscale circuits and sensors. The templates are made using microfabrication techniques together with chemical mechanical polishing. These templates are compatible with various directed assembly techniques, including electrophoresis, and offer essentially 100% efficient assembly and transfer of nanoelements in a continuous operation cycle. The templates can be repeatedly used for transfer of patterned nanoelements thousands of times with minimal or no damage, and the transfer process involves no intermediate processes between cycles. The assembly and transfer processes employed are carried out at room temperature and pressure and are thus amenable to low cost, high-rate device production.
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8.发明授权Nanoscale interconnects fabricated by electrical field directed assembly of nanoelements 有权通过纳米元件的电场定向组装制造的纳米级互连公开(公告)号：US09548242B2
公开(公告)日：2017-01-17
申请号：US14837227
申请日：2015-08-27
IPC分类号： H01L21/768 , H01L21/288 , H01L23/532 , C25D13/00 , H01L23/522 , B82Y10/00 , B82Y30/00
CPC分类号： H01L21/76879 , B82Y10/00 , B82Y30/00 , C25D13/00 , H01L21/2885 , H01L23/5226 , H01L23/53214 , H01L23/53228 , H01L23/53242 , H01L23/53257 , H01L23/53276 , H01L2221/1094 , H01L2924/0002 , H01L2924/00
摘要： The invention provides a fast, scalable, room temperature process for fabricating metallic nanorods from nanoparticles or fabricating metallic or semiconducting nanorods from carbon nanotubes suspended in an aqueous solution. The assembled nanorods are suitable for use as nanoscale interconnects in CMOS-based devices and sensors. Metallic nanoparticles or carbon nanotubes are assembled into lithographically patterned vias by applying an external electric field. Since the dimensions of nanorods are controlled by the dimensions of vias, the nanorod dimensions can be scaled down to the low nanometer range. The aqueous assembly process is environmentally friendly and can be used to make nanorods using different types of metallic particles as well as semiconducting and metallic nanotubes.
摘要翻译： 本发明提供了用于从纳米颗粒制造金属纳米棒的快速，可扩展的室温工艺，或者从悬浮在水溶液中的碳纳米管制造金属或半导体纳米棒。 组装的纳米棒适合用作基于CMOS的器件和传感器中的纳米级互连。 通过施加外部电场将金属纳米颗粒或碳纳米管组装成光刻图案化的通孔。 由于纳米棒的尺寸由通孔的尺寸控制，纳米棒尺寸可以缩小到低纳米范围。 水性组合方法是环境友好的，并且可以用于制备使用不同类型的金属颗粒以及半导体和金属纳米管的纳米棒。
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公开(公告)号：US20150137371A1
公开(公告)日：2015-05-21
申请号：US14570020
申请日：2014-12-15
IPC分类号： H01L23/532 , C25D13/00 , H01L21/768
CPC分类号： H01L21/76879 , B82Y10/00 , B82Y30/00 , C25D13/00 , H01L21/2885 , H01L23/5226 , H01L23/53214 , H01L23/53228 , H01L23/53242 , H01L23/53257 , H01L23/53276 , H01L2221/1094 , H01L2924/0002 , H01L2924/00
摘要： The invention provides a fast, scalable, room temperature process for fabricating metallic nanorods from nanoparticles or fabricating metallic or semiconducting nanorods from carbon nanotubes suspended in an aqueous solution. The assembled nanorods are suitable for use as nanoscale interconnects in CMOS-based devices and sensors. Metallic nanoparticles or carbon nanotubes are assembled into lithographically patterned vias by applying an external electric field. Since the dimensions of nanorods are controlled by the dimensions of vias, the nanorod dimensions can be scaled down to the low nanometer range. The aqueous assembly process is environmentally friendly and can be used to make nanorods using different types of metallic particles as well as semiconducting and metallic nanotubes.
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公开(公告)号：US10815582B2
公开(公告)日：2020-10-27
申请号：US16243832
申请日：2019-01-09
发明人： Ahmed Busnaina , Hanchul Cho , Sivasubramanian Somu , Jun Huang
摘要： Damascene templates have two-dimensionally patterned raised metal features disposed on an underlying conductive layer extending across a substrate. The templates are topographically flat overall, and the patterned conductive features establish micron-scale and nanometer-scale patterns for the assembly of nanoelements into nanoscale circuits and sensors. The templates are made using microfabrication techniques together with chemical mechanical polishing. These templates are compatible with various directed assembly techniques, including electrophoresis, and offer essentially 100% efficient assembly and transfer of nanoelements in a continuous operation cycle. The templates can be repeatedly used for transfer of patterned nanoelements thousands of times with minimal or no damage, and the transfer process involves no intermediate processes between cycles. The assembly and transfer processes employed are carried out at room temperature and pressure and are thus amenable to low cost, high-rate device production.
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