公开(公告)号：US20170268128A1

公开(公告)日：2017-09-21

申请号：US15503780

申请日：2015-08-17

Applicant: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION

Inventor： Yabing QI ,  Matthew Ryan LEYDEN

IPC: C30B31/16 ,  C23C16/52 ,  H01L51/00 ,  C30B29/54 ,  C30B25/00 ,  C23C16/448 ,  C30B31/12

CPC classification number: C30B31/16 ,  C23C16/30 ,  C23C16/448 ,  C23C16/52 ,  C30B25/00 ,  C30B25/02 ,  C30B29/12 ,  C30B29/54 ,  C30B31/12 ,  H01G9/2009 ,  H01L33/005 ,  H01L33/26 ,  H01L51/001 ,  H01L51/002 ,  H01L51/4226 ,  H01L51/5012

Abstract: A system and method for fabricating a perovskite film is provided, the system including a housing for use as a CVD furnace having first and second sections coupled with first and second temperature control units, respectively. The first and second sections correspond substantially to the upstream and downstream of gases, respectively. One or more substrates are loaded in the second section and controlled by the second temperature control unit, and an evaporation unit containing an organic halide material is loaded in the first section and controlled by the first temperature control unit. Each of the substrates is pre-deposited with a metal halide material. The inside of the housing is pumped down to a low pressure.