公开(公告)号：US20180178207A1

公开(公告)日：2018-06-28

申请号：US15754091

申请日：2016-08-18

Applicant: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION

Inventor： Stephan STEINHAUER ,  Vidya Dhar SINGH ,  Mukhles Ibrahim SOWWAN

IPC: B01J37/02 ,  B01J23/89 ,  B01J35/00 ,  B01J35/06 ,  B01J37/14 ,  B01J37/34 ,  C23C16/40

CPC classification number: B01J37/0226 ,  B01J23/892 ,  B01J23/8926 ,  B01J35/0013 ,  B01J35/06 ,  B01J37/14 ,  B01J37/347 ,  B82Y30/00 ,  B82Y40/00 ,  C01G3/02 ,  C01P2004/03 ,  C01P2004/04 ,  C01P2004/16 ,  C01P2004/80 ,  C23C16/40 ,  C30B29/16 ,  C30B29/60 ,  C30B33/00

Abstract: A method for manufacturing nanoparticle decorated nanowires by a vacuum deposition system having a deposition chamber and an aggregation chamber connected thereto includes: mounting a metal member in the deposition chamber; performing thermal oxidization of the metal member in the deposition chamber in an oxygen atmosphere so as to grow metal oxide nanowires on a surface of the metal member; without breaking vacuum in the vacuum deposition system, generating a vapor of a catalytic metal particles clusters in the aggregation chamber that is connected to the deposition chamber; and without breaking vacuum in the vacuum deposition system, transporting the generated catalytic metal particles clusters to the deposition chamber so as to decorate the metal oxide nanowires with catalytic metal nanoparticles made of the catalytic metal particles.